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Sekepe sa semiconductor quartz wafer
Boitsebiso bo potlakileng:
1. Mabitso a mang: Tanka ea quartz ea semiconductor,bate ea quartz bakeng sa semiconductor,tanka ea quartz bakeng sa semiconductor.
2. Kopo: Seketsoana sa Semiconductor Quartz sa wafer bakeng sa lits'ebetso tsa mocheso o phahameng joalo ka ho hasana, oxidation, CVD, annealing, joalo-joalo, tlhahisong ea semiconductor.
3. Litekanyetso tsa mantlha:
Ultra-high purity quartz (> 99.99% SiO₂) : e qoba ho silafatsoa ke li-ion tsa tšepe (Na +, K +, Fe³+, joalo-joalo) 'me e finyella litlhoko tsa bohloeki ba mekhoa e tsoetseng pele (<5nm nodes).
Ho hanyetsa mocheso o phahameng: mocheso o tsoelang pele oa ho sebetsa 1200 ℃, ho hanyetsa mocheso hang-hang 1300 ℃.
Inert ea lik'hemik'hale: E hana ho sebetsa likhase tse kang HCl, H₂, O₂, SiH₄ le tikoloho ea asiti/alkaline. E sa senyeheng bakeng sa tshebediso ya nako e telele.
Tlhaloso
Semixlab Semiconductor Quartz wafer boats ke lisebelisoa tsa bohlokoa tsa ho jara tse etselitsoeng lits'ebetso tsa mocheso o phahameng joalo ka phallo, oxidation, CVD, annealing, joalo-joalo, tlhahisong ea semiconductor. E entsoe ka bohloeki bo phahameng ba maiketsetso a quartz e nang le khanyetso e phahameng ea mocheso, botsitso ba lik'hemik'hale le coefficient e tlase ea katoloso ea mocheso, e khona ho jara li-wafers libakeng tse thata tsa ts'ebetso ho netefatsa ts'ebetso e tsitsitseng le tlhahiso ea lihlahisoa.
Lisebelisoa tse sebetsang: E lumellana le mefuta eohle ea Sebōpi sa Horizontal / Vertical Diffusion (Horizontal / Vertical Diffusion Furnace), tsamaiso ea LPCVD le lisebelisoa tsa phekolo ea mocheso o potlakileng (RTP).
Netefaletso ea boleng
Taolo ea boleng bo thata: 100% ea 100% ea ho fumana ho lutla ha helium mass spectrometry (sekhahla sa ho lutla <1×10⁻⁹ mbar·L/s). Tlaleho ea bohloeki ba lintho tse bonahalang (teko ea ICP-MS) e fanoa bakeng sa beche ka 'ngoe.
Maemo a Setifikeiti: Ho latela litlhaloso tsa SEMI F47, ka ISO 9001: 2015 setifikeiti sa tsamaiso ea boleng.
Bophelo ba tšebeletso: bophelo bo tloaelehileng tlas'a maemo a tloaelehileng bo feta lilemo tse 2 (ho itšetlehile ka makhetlo a ts'ebetso le maemo a mocheso).
Hobaneng re khetha seketsoana sa rona sa quartz?
Litšebeletso tse ikhethileng: Boholo bo ikhethileng le kaho ho latela mohlala oa lisebelisoa (TEL, Kokusai, ASM, joalo-joalo) le litlhoko tsa ts'ebetso.
Karabelo e potlakileng: Nako e tloaelehileng ea ho fana ke libeke tse 3, litaelo tse potlakileng li ka fokotsoa ho isa matsatsing a 10 a ho sebetsa.
Marang-rang a litšebeletso tsa lefats'e: Fana ka keletso ea theknoloji, tataiso ea ho kenya le ts'ehetso ea tlhokomelo ea ka mor'a thekiso.Litlhaloso tsa Material.
songolo
Tlhaloso ea morero
Sebopeho sa lintho tse bonahalang Fused Quartz
Bohloeki ≥99.99% SiO₂
Wafer boholo bo lumellana 8 ", 12 "(e ka etsoa ka 6" kapa 18 ")
Thempereichara ea ho sebetsa ≤1200°C (e tsoelang pele) / 1300°C (tlhōrō)
Motsoako oa katoloso ea mocheso (CTE) 0.55×10⁻⁶/°C (20-1000°C)
Bokhopo ba bokaholimo (Ra) ≤0.2μm
Matla a tloaelehileng matlapa a 25/50/100
Likhase tse sebetsang tse sebetsang O₂, N₂, H₂, Ar, SiH₄, HCl, joalo-joalo.
| Thepa ea mochini | Boima ba 'mele (g/cm3) | 2.2 |
| Boima ba Mohs | 6-7 | |
| Matla a hatellang (MPa) | 1100 | |
| Matla a ho tiea (N/mm2) | 50 | |
| Matla a Flexural (N/mm2) | 65 | |
| Matla a torsional (N/mm2) | 30 | |
| Young's modulus (MPa) | 7.2x104 | |
| Karo-karolelano ea Poisson | 0.16 | |
| Mali a futhumatsang | Coefficient ea katoloso ea mocheso (20~320℃,k-1) | 5.5x10-7 |
| Thermal conductivity (20 ℃,W·m-1k-1) | 1.4 | |
| Mocheso o khethehileng (20 ℃, J·kg-1k-1) | 670 | |
| Sebaka sa ho nolofatsa (℃) | 1700 | |
| Sebaka sa ho hola (℃) | 1180 | |
| Sebaka sa khatello (℃) | 1080 | |
| Thepa ea motlakase | Ho hanyetsa motlakase (Ω·m) | 1x1016(20 ℃) |
| Dielectric constant (10GHz) | 3.74 | |
| Tahlehelo ea dielectric (10GHz) | 0.0002 | |
| Matla a dielectric (V·m-1) | 3.7x107 |
dikopo
Mocheso o phahameng oxidation / diffusion: silicon doping (phosphorus, boron diffusion), kholo ea heke ea oxide.
Deposition ea filimi e tšesaane: LPCVD polycrystalline silicon, Silicon nitride (Si₃N₄) deposition.
Anealing process: annealing ka mor'a ho kenngoa ha ion (RTA), motsoako oa tšepe.
Semiconductor ea moloko oa boraro: silicon carbide (SiC), gallium nitride (GaN) epitaxy process.
Molemo oa Khatello
1. Litšobotsi tsa lintho tse bonahalang
Ultra-high purity quartz (>99.99% SiO₂) : e qoba tšilafalo ea li-ion tsa tšepe (Na +, K +, Fe³ +, joalo-joalo) 'me e finyella litlhoko tsa bohloeki bakeng sa mekhoa e tsoetseng pele (<5nm nodes).
Ho hanyetsa mocheso o phahameng: mocheso o tsoelang pele oa ho sebetsa oa 1200 ° C, ho hanyetsa mocheso hang-hang oa 1300 ° C, ha ho na kotsi ea deformation kapa crystallization.
Ho se sebetse ha lik'hemik'hale: Ho mamella likhase tse sebetsang tse kang HCl, H₂, O₂, SiH₄ le tikoloho ea acid / alkaline. E sa senyeheng ts'ebelisong ea nako e telele.
2. Moralo o nepahetseng
Ntlafatsa sebopeho:
Ho nepahala ha sebaka sa slot ke ± 0.05mm, ho netefatsa boemo bo nepahetseng ba wafer (8/12 inch) le ho thibela mengoallo kapa ho falla.
Moqapi o thibelang mocheso oa mocheso, o ikamahanya le ho phahama ka potlako le ho oa (sekhahla sa mocheso ≤20 ° C / min).
Sebopeho sa likaroloana tse tlase: Bokaholimo bo entsoe ka mokhoa o nepahetseng haholo (Ra ≤0.2μm) ho fokotsa sehokelo sa likaroloana le ho oa.
3. Phetoho e fapaneng
Boikhethelo ba Bokhoni: Tšehetsa likotoana tse 25, likotoana tse 50, likotoana tse 100 le lintlha tse ling tse tloaelehileng, le tsona li ka etsoa ka nomoro ea slot e sa tloaelehang.
Mofuta oa ho ikamahanya le maemo: Seketsoana se Bulehileng, Seketsoana se Koetsoeng kapa mofuta o khethehileng oa seketsoana (joalo ka moralo oa seketsoana se ka tlase sa sekepe).
LBH
Q1: Na o ka fana ka boholo bo sa tloaelehang kapa moralo o khethehileng?
A1: Semixlab e tšehetsa lits'ebeletso tsa tloaelo, ho kenyelletsa le tokiso ea boholo, moeli o kaholimo oa mocheso (ho hlokahala ntlafatso ea thepa) kapa mofuta oa sebopeho. Ka kopo ikopanye le sehlopha sa tekheniki sa Semixlab bakeng sa litlhoko tse ikhethang.
Q2: Nako ea ho etella pele e telele hakae?
A2: Nako ea ho fana ka lihlahisoa tse tloaelehileng ke libeke tse 4-6, 'me nako ea ho qapa le ho netefatsa lihlahisoa tse tloaelehileng ke libeke tse 2-3.
Q3: Na u fana ka tšehetso ea tekheniki ka mor'a thekiso?
A3: E, re fana ka lipuisano tsa bophelo bohle ba tekheniki le litšebeletso tsa karabelo ea tšohanyetso. Haeba ho na le mathata a ho kenya kapa ho sebelisa, ho ka ikopanya le sehlopha sa tšehetso ka nako efe kapa efe ka imeile kapa mohala.
Q4: Na sehlahisoa se kopana le litekanyetso tsa indasteri ea semiconductor?
A4: E, mokhoa oa tlhahiso o lumellana le litekanyetso tsa SEMI mme o netefalitsoe ke tsamaiso ea boleng ba ISO 9001. Sehlopha se seng le se seng se lekoa bakeng sa ho tiisa moea, ho hanyetsa mocheso le ho hloeka pele ho tloha fekthering.
