Lesale la Porous TaC le koahetsoeng ke Graphite

Li-porous TaC Coated Graphite Rings tse tsoang Semixlab ke likarolo tsa bohlokoa tikolohong ea semiconductor e batloang haholo, e fanang ka nako e telele e ke keng ea lekanngoa, botsitso le ts'ebetso ea ts'ebetso. Ke khetho e nepahetseng bakeng sa SiC epitaxy, GaN MOCVD, diffusion, le lits'ebetso tsa CVD moo ho ts'epahala le ts'ebetso e leng bohlokoa.

Thepa & Thepa

● Graphite Base: High-density isostatic graphite e nang le sebopeho sa porous bakeng sa boima bo fokotsehileng ba mocheso le ho fetisa mocheso o matlafalitsoeng.

● Tantalum Carbide Coating: Tantalum carbide e phahameng ea melting-point (3880 ° C) e tiisa ho thatafala ho feteletseng, ho se sebetse ha lik'hemik'hale, le ho tšoarella nako e telele likhase tse thata tsa tšebetso.

● Moralo oa Porous: E ntlafatsa phallo ea khase, e fokotsa khatello ea kelello sebakeng sa heno nakong ea ho palama baesekele ka potlako, 'me e fokotsa tšilafalo ea likaroloana.

Litšebeletso tsa Semixlab

● Moralo o Tloaelehileng & Litekanyo tse ikamahanyang le epitaxy kapa lisebelisoa tsa sebōpi.

● Lisebelisoa tse Hloekileng ka ho Fetisisa ho finyella litlhoko tse thata tsa tšilafalo ea semiconductor.

● Taolo ea Boleng e thata e netefatsang botenya ba ho roala, ho khomarela, le ho ntlafatsa porosity.

● Tšehetso ea Global Technology bakeng sa masela a semiconductor le baetsi ba lisebelisoa.

Ikopanye le Semixlab kajeno ho kopa lisampole, litlhaloso tsa tekheniki, kapa litharollo tse ikhethileng.

Lisebelisoa tsa Bohlokoa Mekhoeng ea Semiconductor

1. Mekhoa ea Epitaxy (SiC, GaN, le Si)

Lits'ebetsong tsa kholo ea epitaxial joalo ka MOCVD, CVD, le SiC epitaxy, mehele ea TaC e koahetsoeng ka graphite e bapala karolo ea bohlokoa likopanong tsa susceptor le meahong ea taolo ea phallo ea khase. Moralo oa bona oa porous o thusa ho laola kabo ea khase e tsamaisang thepa, ho thibela moferefere le ho etsa bonnete ba hore ho tsamaisoa ka mokhoa o ts'oanang oa selelekela sebakeng sa wafer. Sena se fella ka ho ntlafala ha botenya ba layer, bofokoli bo fokolang, le tlhahiso e phahameng ea lisebelisoa. Thepa ea TaC e sireletsa karoloana ea graphite ho li-precursor tse mabifi tse kang HCl, NH₃, silane, le hydrocarbons, e lelefatsa bophelo ba ts'ebeletso tlas'a maemo a tsoelang pele a mocheso o phahameng (> 1500 ° C).

2. Diffusion le Annealing Furnaces

Nakong ea phallo ea li-dopant le mocheso o phahameng oa mocheso ka mor'a ho kenngoa ha ion, mehele ea graphite e sebelisoa e le tšehetso le likarolo tsa ho leka-lekanya mocheso ka har'a lisebelisoa tsa sebōpi. Sebopeho sa tsona se nang le masoba se theola boima ba mocheso, se etsa hore ho potlake ho nyoloha le ho pholisa, ha ho ntse ho fokotsa khatello ea mocheso ho li-wafers. Lesela la TaC le thibela oxidation le ho senyeha ha lik'hemik'hale, ho netefatsa hore selikalikoe se boloka botsitso ba sebopeho ho pholletsa le linako tse pheta-phetoang tsa mocheso. Ka ho tsitsisa tikoloho ea li-wafer, mehele ena e thusa ho fihlela liprofaele tse tsitsitseng tsa dopant le ho fokotsa li-wafer warpage.

3. Likamore tsa PECVD le LPCVD

Ka har'a li-reactor tsa PECVD le LPCVD, masale a graphite a koetsoeng a TaC a sebetsa joalo ka lithapo tsa kamore, likarolo tse sireletsang, kapa masale a tšehetso. Litikoloho tsena hangata li pepesa lisebelisoa ho plasma bombardment le likhase tse senyang haholo joalo ka mefuta e thehiloeng ho fluorine le chlorine. Lesela la TaC le bonts'a khanyetso e phahameng ea khoholeho ea plasma, ho fokotsa haholo ho tšolloa ha likaroloana le kotsi ea tšoaetso. Ho feta moo, sebopeho sa porous se thusa ho qhala mocheso ka mokhoa o ts'oanang, ho netefatsa hore litekanyetso tse tsitsitseng tsa ho beha lifilimi le ho ntlafatsa mokhoa oa ho pheta-pheta.

4. Etching le Deposition Tikoloho

Lits'ebetsong tse omeletseng tsa ho omella le ho beha filimi e tšesaane, masale a graphite a nang le porous a TaC a sebetsa e le litšitiso le lintho tse matlafatsang tse fokotsang ho putlama ka morao le khoholeho ea likarolo tse bohlokoa tsa plasma. Ho thatafala ha koae le ho se sebetse ha lik'hemik'hale ho thibela liketso tse sa batleheng ka likhase tse sebetsang, ho fokotsa mehloli ea tšilafalo. Ts'ebeliso ea bona e bohlokoa ho boloka bohloeki ba kamore, ho ntlafatsa nako, le ho sireletsa liphaephe tsa boleng bo holimo ho tsoa tšilafalong e bolaeang lihlahisoa.