Letlapa la Potoloho le Apesitsoeng ke TaC

Semixlab TaC Coated Rotation Plate e etselitsoe maemo a mocheso o phahameng le a senyang ao hangata a kopanang le semiconductor epitaxy, CVD, le mekhoa ea kholo ea kristale. Lipoleiti tsena tse potolohang li bapala karolo ea bohlokoa ho ts'ehetsa bajari ba li-wafer kapa li-susceptors nakong ea potoloho ea substrate e tsoelang pele, ho netefatsa phepelo e tšoanang ea mocheso le ho beoa. Ka ho sebelisa lesela la tantalum carbide (TaC), karolo ena e fumana nako e telele e tsitsitseng, botsitso ba mocheso, le ho sebetsa nako e telele ha ho hlokahala lits'ebetso tsa vacuum le mocheso o phahameng oa semiconductor.

Semixlab's Customization & Support Services

● Custom Coating Teckness & Geometry

Ebang ke bakeng sa 200mm, 300mm, kapa lipoleiti tse potolohang tse ikhethileng, sehlopha sa Semixlanb se fana ka litharollo tsa TaC tse ikhethileng tsa jiometry tse etselitsoeng tikoloho ea hau ea ts'ebetso.

● Tlhophiso ea ho Khetha Lintho

U hloka thuso ea ho etsa qeto lipakeng tsa graphite, SiC, kapa quartz substrates? Baenjineri ba rona ba thusa ho khetha lisebelisoa tse nepahetseng tsa ho roala TaC.

● Potlako ea Prototyping & Litšebeletso tse Nyenyane tsa Batch

E loketse bakeng sa tlhahiso ea R & D le ea lifofane, Semixlab e tšehetsa litaelo tse tlaase tsa MOQ ka linako tse khutšoanyane tsa ho etella pele.

● Tšehetso e Ikemetseng ka mor'a Thekiso

Ho tloha ho tataiso ea ho kenya ts'ebetso ho isa ho lateleng ts'ebetso ea coating, sehlopha sa rona sa tekheniki se netefatsa hore o fumana boleng ba nako e telele le ts'epahalo ho tsoa karolong e 'ngoe le e 'ngoe eo re e tlisang.

● Khōlo ea SiC le GaN Epitaxial

● Metal Organic Chemical Vapor Deposition (MOCVD)

● Tlaase/High Pressure Chemical Vapor Deposition (LPCVD / HPCVD)

● Sapphire le SiC Crystal Growth Furnaces

● Likamore tse Tsoetseng Pele tsa Thin Film Processing

silicon carbide epitaxial kholo sebōpi le lisebelisoa tsa mantlha

Joaloka moetsi ea ka sehloohong oa TaC Coated Rotation Plate le mofani oa thepa Chaena, Ka tsebo e tebileng ea indasteri, theknoloji ea ho roala ka mokhoa o nepahetseng, le boitlamo bo matla ba ho ntlafatsa, Semixlab e fana ka likarolo tse koahetsoeng ke TaC tse finyellang litekanyetso tse thata tsa indasteri ea semiconductor. Re tšepa ka tieo ho ba molekane oa hau oa nako e telele Chaena.

Lintho tsa Bohlokoa tsa 'Mele le Melemo ea Ts'ebetso

1. E ikhethang Thermal Stability

TaC e na le ntlha ea ho qhibiliha e fetang 3880 ° C, e etsang hore poleiti e pota-potiloeng e tsitsang ka mokhoa o ikhethang nakong ea ts'ebetso ea nako e telele ea mocheso o phahameng.

Boemo bona ba ho mamella mocheso bo bohlokoa bakeng sa litsamaiso tsa MOCVD, LPCVD, le PVD, moo likaroloana li pepesehelang ho feto-fetoha ha mocheso le mocheso o feteletseng.

2. Boiketlo bo Phahameng ba Lik'hemik'hale

Tantalum carbide ha e kenelle ka lik'hemik'hale ho likhase tse mabifi tse ngata le lintho tse senyang, ho kenyelletsa chlorine, hydrogen, le metsoako ea halogenated.

Khanyetso ena ea lik'hemik'hale e tiisa ts'ebetso ea nako e telele le likotsi tse fokotsehileng tsa tšilafalo, tse bohlokoa bakeng sa SiC epitaxy, deposition ea GaN, le kholo ea filimi ea oxide.

3. E Hlollang ka Thata le Khoholeho ea mobu Resistance

Ka boima ba Vickers ka holimo ho 2000 HV, bokaholimo bo koahetsoeng ke TaC bo hanela ho roala ha mochini ho tsoa mecheng e potolohang le tšusumetso ea likaroloana.

Monyetla o fetolela bophelo bo atolositsoeng ba ts'ebeletso le khafetsa ea phetisetso e tlase, ho fokotsa nako ea ho phomola ha tlhahiso ea semiconductor.
mela.

4. Molemo ka ho Fetisisa Coating Uniformity le Adhesion

Semixlab's proprietary CVD coating process e netefatsa likarolo tse teteaneng, tse ts'oanang, le tse khomaretsoeng hantle tsa TaC, tse bohlokoa bakeng sa liphetho tse tsitsitseng tsa ts'ebetso le tlhahiso e nyane ea likaroloana.