Sesebelisoa sa sekepe sa quartz wafer boat

Semixlab quartz boat support ke sesebelisoa sa ho jara se sebetsang hantle se etselitsoeng liindasteri tsa semiconductor, photovoltaic, LED le precision electronics. E entsoe ka lisebelisoa tse phahameng tsa maiketsetso tsa quartz. E le lisebelisoa tsa mantlha ts'ebetsong ea mocheso o phahameng, litšehetso tsa seketsoana sa quartz li fetohile tse tsamaisang li-wafers, li-wafers tsa silicon, likaroloana tsa khalase le likarolo tse ling tse nepahetseng ho pharalla, ho kopanya, ho hlahisa lik'hemik'hale, CVD (mouoane oa lik'hemik'hale) le lits'ebetso tse ling ka lebaka la botsitso ba tsona bo botle ba mocheso, ts'ebeletso ea nako e telele ea tlhahiso ea lik'hemik'hale le ho thusa bareki ho finyella nako e telele.

Maemo a kopo kapa lisebelisoa: 

Semiconductor diffusion, annealing, oxidation, le CVD (Chemical Vapor Deposition) tshebetso.

Matla a Khamphani

Semixlab Technology Co., Ltd e na le litsi tse 2 tsa R&D, metheo ea tlhahiso ea 2, mela ea tlhahiso ea 12, basebetsi ba 150+, le litlaleho tsa matsete a R&D ho feta 30%. Sebopeho sa sehlahisoa sa rona se sebelisoa haholo-holo ho LED, potoloho e kopantsoeng ea IC, semiconductor ea moloko oa boraro, photovoltaic le liindasteri tse ling. Semixlab e na le R&D e matla, tlhahiso le liteko tse kopaneng le bokhoni ba ho netefatsa. Ka nako e ts'oanang, re lula re ntlafatsa theknoloji le lisebelisoa tsa rona ka matsete a limilione tse mashome ka selemo.

Litšebeletso tse hlophisitsoeng

Ho fihlela litlhoko tse fapaneng, re fana ka lits'ebeletso tse feto-fetohang tsa maemo le ho ts'ehetsa liphetoho tse latelang tsa paramente:

Litlhaloso tsa boholo: Ikamahanya le li-substrates tse fapaneng joalo ka lisenthimithara tse 8 le lisenthimithara tse 12, kapa u iketsetse meaho e nang le sebopeho se ikhethileng ho latela lits'oants'o tsa bareki.

Phekolo ea bokaholimo: Ho phatloha ha lehlabathe ka boikhethelo, ho roala (joalo ka silicon carbide coating) le lits'ebetso tse ling ho matlafatsa ts'ebetso maemong a itseng.

Ho kopanya lisebelisoa: E ka bapisa le litšiea tsa quartz, li-baffles le likarolo tse ling ho theha tsamaiso e feletseng ea ho jara.

Sistimi ea netefatso ea boleng

Teko ea thepa e tala: Lehlabathe la quartz le tsoang kantle ho naha, le hlahlobiloeng ke ICP-MS (e kopantsoeng ka mokhoa o ts'oanang oa plasma mass spectrometry).

Taolo ea ts'ebetso: CNC machining e nepahetseng + tlhahlobo e ikemetseng, mamello ea boholo ba senotlolo ≤± 0.05mm.

Liphutheloana tse hloekileng: Sephutheloana sa 100 sa tikoloho se hloekileng haholo ho qoba tšilafalo ea lipalangoang.

Maemo a tloaelehileng a ts'ebeliso

Tlhahiso ea semiconductor: e sebelisetsoa ho kenya li-annealing tsa mocheso o phahameng, oxidation le lits'ebetso tse tšesaane tsa ho beha lifilimi tsa li-wafer ka har'a libopi tse pharalletseng le libopi tse emeng.

Indasteri ea Photovoltaic: Ho jara le ho fetisetsa lisele tsa PERC le TOPCon ka PECVD, phallo ea phosphorus le mekhoa e meng.

LED epitaxy: Boemo bo nepahetseng le kholo e phahameng ea mocheso oa epitaxial ea likaroloana tsa safire ka thepa ea MOCVD.

Sebaka sa lipatlisiso: Ho sila le ho etsa liteko litsing tsa laboratori tse nang le mocheso o phahameng oa mocheso le tikolohong ea vacuum.

1. Ho hanyetsa mocheso o phahameng haholo

Tšehetso ea sekepe sa quartz e ka mamella maemo a mocheso o phahameng ka holimo ho 1200℃ ka nako e telele, e nang le coefficient e tlase haholo ea ho atolosa mocheso (e ka bang 5.5 × 10⁻⁷/℃). E ntse e ka boloka botsitso ba sebopeho tlas'a maemo a pholileng ka potlako le ho futhumatsa, ho qoba ho phatloha kapa ho senyeha ho bakoang ke khatello ea mocheso, le ho netefatsa hore ts'ebetso e pheta-pheta.

2. Bohloeki bo phahameng haholo le bohloeki ba lik'hemik'hale

E entsoe ka 99.99% kapa ho feta lehlabathe la quartz le hloekileng haholo, ha ho na pula, ha ho na tšilafalo, e thibela ka katleho li-ion tsa tšepe kapa litšila tse nyenyane ho silafatsa bokaholimo ba mocheso ka mocheso o phahameng, haholo-holo tse loketseng lits'ebetso tse tsoetseng pele tse nang le litlhoko tse tiileng tsa bohloeki (joalo ka tlhahiso ea chip e ka tlase ho 7nm).

3. Moralo o nepahetseng oa sebopeho

Bokaholimo ba tšehetso ea seketsoana bo entsoe ka mokhoa o nepahetseng haholo (bothata ba Ra≤0.2μm), bo nang le sebopeho sa sekotjana se nang le tokelo ea molao, se ka khonang ho jara li-substrates tsa boholo bo fapaneng (joalo ka li-wafers tsa 8/12-inch), ho netefatsa ho futhumala ho tšoanang le ho potoloha ha khase, le ho ntlafatsa ts'ebetso e ts'oanang.

4. Bophelo ba tšebeletso ea nako e telele

Ha ho bapisoa le li-graphite tsa setso kapa li-ceramic carriers, lisebelisoa tsa quartz li na le khanyetso e matla ea kutu, sekhahla se tlase sa tahlehelo maemong a acidic / alkaline, 'me potoloho ea tšebeliso e tsoelang pele e ka fihla likhoeling tsa 12-24, e fokotsa haholo litšenyehelo tse felletseng tsa bareki.