Liphaephe tsa sebōpi tse koahetsoeng ka CVD

Ho Semixlab, re ikhethile ka ho fana ka Li-Tube tsa Furnace tse koahetsoeng ka CVD SiC tse sebetsang hantle tse entsoeng bakeng sa tikoloho ea tlhahiso ea li-semiconductor tse hlokang boiteko bo boholo. Ha re kopanya substrate e matla haholo le sekoahelo sa Chemical Vapor Deposited (CVD) Silicon Carbide se hloekileng haholo, li-tube tsa rona tsa sebōpi li fana ka botsitso bo ikhethang ba mocheso, ho hanyetsa mafome, taolo ea tšilafalo le bophelo bo bolelele ba tšebeletso.

E etselitsoe lits'ebetso tse tsoetseng pele tsa ts'ebetso ea mocheso, li-tube tsa sebōpi tse koahetsoeng tsa Semixlab CVD SiC li sebelisoa haholo liontong tsa ho hasana, litsamaisong tsa oxidation, li-reactor tsa epitaxy, lisebelisoa tsa kholo ea kristale ea SiC, le litsamaisong tsa ts'ebetso ea vacuum tse nang le mocheso o phahameng.

Li-Tube tsa Sebōpi tse koahetsoeng ka CVD SiC ke Eng?

Tube ea sebōpi e koahetsoeng ka CVD SiC ke sebopeho se kopaneng se nang le thepa ea substrate e khethiloeng ka hloko (High-Purity Isostatic Graphite) e koahetsoeng ka lera le teteaneng la Silicon Carbide (SiC) e hloekileng haholo ka theknoloji ea Chemical Vapor Deposition.

Har'a litsamaiso tsena tsa thepa, graphite e hloekileng haholo e kopantsoeng le sekoahelo sa CVD SiC e tsejoa haholo e le e 'ngoe ea litharollo tse sebetsang ka ho fetisisa bakeng sa lisebelisoa tsa ho sebetsana le mocheso oa semiconductor. Litšobotsi tsa 'mele tsa Li-Tube tsa Sebōpi tse koahetsoeng ka CVD SiC

Bokaholimo ba Silicon Carbide bo Hloekileng Haholo

Lera la CVD SiC le fana ka:

● Bohloeki bo phahameng haholo bo nang le tšilafalo e tlase haholo ea tšepe

● Sebopeho se senyenyane se teteaneng, se se nang masoba

● Khanyetso e ntle ea oxidation

● Ho hanyetsa likhase tse senyang haholo

● Tshebetso e tlase ea tlhahiso ea likaroloana

● Karolo e ka tlaase ea Graphite e Hloekileng ka ho Fetisisa

Karolo e ka hare ea Isostatic Graphite e thusa ka:

● Ho tsamaisa mocheso hantle haholo

● Kabo e tšoanang ea mocheso

● Ho hanyetsa mocheso o phahameng

● Khatello e tlase ea katoloso ea mocheso

● Sebopeho se bobebe empa se tiile ka mechine

Motsoako ona o nolofalletsa lipeipi tsa onto ho sebetsa ka mokhoa o tšepahalang libakeng tse nang le mocheso o phahameng o fetang 1400°C ha o ntse o boloka botsitso ba boholo le bohloeki ba ts'ebetso.

Hobaneng u lokela ho khetha Semixlab?

Semixlab e shebane le ho fana ka thepa e tsoetseng pele le likarolo tse nepahetseng bakeng sa lisebelisoa tsa tlhahiso ea semiconductor.

Matla a rona a kenyelletsa:

● Bokgoni ba ho sebelisa lisebelisoa tsa ho futhumatsa tsa semiconductor

● Tlhahiso ea graphite e hloekileng haholo le likarolo tsa SiC

● Theknoloji e tsoetseng pele ea ho roala ea CVD

● Litharollo tsa boenjiniere tse ikhethileng

● Boleng bo tsitsitseng le ketane ea phepelo e tšepahalang

● Tšehetso bakeng sa lits'ebetso tsa SiC, GaN, silicon, le li-semiconductor tse kopaneng

Ka ho kopanya boiphihlelo ba saense ea thepa le boiphihlelo ba indasteri ea semiconductor, Semixlab e thusa bareki ho ntlafatsa botsitso ba ts'ebetso, ho fokotsa likotsi tsa tšilafalo, le ho eketsa bophelo ba ts'ebeletso ea lisebelisoa.

Hore na o ntse o ntshetsa pele dionto tsa ho hasanya, di-reactor tsa epitaxy, ditsamaiso tsa kgolo ya kristale ya SiC, kapa disebediswa tse tswetseng pele tsa ho sebetsana le mocheso, Semixlab e fana ka ditharollo tsa tube ya onto ya CVD SiC tse entsweng ka boiketsetso tse etseditsweng ho fihlela ditlhoko tse thata tsa tlhahiso ya semiconductor ya sejwalejwale.

Ikopanye le Semixlab kajeno ho buisana ka litlhoko tsa hau tsa kopo le ho fumana hore na li-tube tsa rona tsa sebōpi tse koahetsoeng ka CVD SiC tsa sehlopha sa semiconductor li ka ntlafatsa ts'ebetso ea hau ea ts'ebetso le ts'epo ea ts'ebetso joang.

Likopo ho Semiconductor Manufacturing

Motsoako oa substrate e hloekileng haholo le sekoahelo se teteaneng sa CVD silicon carbide o nolofalletsa li-tube tsena tsa sebōpi ho sebetsa ka mokhoa o tšepahalang ho pholletsa le mefuta e mengata ea lits'ebetso tsa tlhahiso ea semiconductor. Litsamaisong tsa ho hasana le ho chesoa ha mocheso, bokaholimo bo koahetsoeng ke SiC bo fana ka khanyetso e ntle ho sepakapaka se nang le oxidizing mochesong o phahameng ha bo ntse bo fokotsa tlhahiso ea likaroloana le tšilafalo ea tšepe. Menyetla e tlase le ho se sebetse hantle ha lik'hemik'hale tsa lera la CVD SiC li thusa ho boloka botsitso ba ts'ebetso nakong ea potoloho e telele ea tlhahiso.

Litšebelisong tsa kholo ea epitaxial, ho kenyeletsoa silicon, silicon carbide (SiC), le tlhahiso ea metsoako ea semiconductor, bohloeki ba tube ea ontong le botsitso ba mocheso lia hlokahala bakeng sa ho fihlela ho kenngoa ha filimi ka mokhoa o ts'oanang le liphetho tsa ts'ebetso tse ka phetoang. Seaparo se teteaneng sa SiC se sebetsa e le thibelo e sireletsang khahlanong le likhase tsa ts'ebetso e senyang ha ka nako e ts'oanang se boloka litšobotsi tsa mocheso tse hlokahalang bakeng sa taolo e nepahetseng ea mocheso ho pholletsa le kamore ea reactor.

Bakeng sa tlhahiso e tsoetseng pele ea semiconductor ea matla, haholo-holo tlhahisong ea lisebelisoa tsa SiC le GaN, li-tube tsa sebōpi tse koahetsoeng ka CVD SiC li kenya letsoho ho ntlafatseng botsitso ba tšimo ea mocheso, ho fokotsa likotsi tsa tšilafalo, le ho ntlafala ha ts'epo ea lisebelisoa. Bokhoni ba tsona ba ho mamella potoloho ea mocheso khafetsa tlas'a maemo a mocheso o phahameng le a vacuum bo li etsa hore e be tharollo e ratoang ea thepa bakeng sa litsamaiso tsa kholo ea kristale, lisebelisoa tsa ho kenya metsi, le lisebelisoa tse ling tsa bohlokoa tsa ts'ebetso ea mocheso.