TaC Coated Graphite Susceptor bakeng sa Khōlo ea LED Epitaxial

TaC (Tantalum Carbide) Coated Graphite Susceptor e entsoeng ke Semixlab e entsoe ka ho khetheha bakeng sa mekhoa e phahameng ea mocheso oa mocheso oa LED e kang GaN le AlGaN MOCVD. Ka ho kopanya substrate e phahameng ea graphite e nang le seaparo sa TaC se nang le CVD-deposited densely, susceptor ena e tiisa ho tšoana ho ikhethang ha mocheso, botsitso ba lik'hemik'hale, le taolo ea tšilafalo - ea bohlokoa bakeng sa ho finyella boleng bo phahameng ba kristale le ts'ebetso e tsitsitseng ea LED.

Sebopeho sa Boitsebiso le Litšobotsi tsa Bohlokoa

Boitsebiso ba Base: High-Purity Isostatic Graphite, Excellent thermal conductivity, low density, le machinability e nepahetseng.

Lera la ho Koaela: TaC (Tantalum Carbide) ka Ts'ebetso ea CVD, bokaholimo bo teteaneng haholo, ho thatafala ho hoholo, le ho se sebetse ha lik'hemik'hale libakeng tsa NH₃/H₂.

Likopo tse Tloaelehileng ho Kholiso ea Epitaxial ea LED

Ts'ebetsong ea kholo ea epitaxial ea LED, haholo-holo bakeng sa li-semiconductors tse thehiloeng ho GaN, TaC Coated Graphite Susceptor e sebetsa e le sehokelo sa bohlokoa sa mocheso le lik'hemik'hale lipakeng tsa sistimi ea ho futhumatsa ea MOCVD le li-wafers tse ntseng li holisoa. Sebopeho sa eona se ikhethang sa thepa le botšepehi ba sebopeho se e nolofalletsa ho phetha likarolo tse ngata tsa bohlokoa ho pholletsa le potoloho ea LED ea epitaxy - ho tloha ho nucleation ho ea kholo e feletseng ea lera.

1. E tsitsitseng Wafer Heating le Mocheso o Uniformity

Nakong ea MOCVD epitaxy, susceptor e sebetsa e le karolo e ka sehloohong ea ho fetisa mocheso, ho etsa bonnete ba hore bokaholimo bo boloka mocheso o ts'oanang le o laoloang hantle (hangata pakeng tsa 1000-1200 ° C bakeng sa kholo ea GaN).

● Mocheso o phahameng oa mocheso oa substrate oa graphite o lumella ho ajoa ha mocheso ka potlako le ho homogeneous.

● Thepa ea TaC, e nang le mosi o tsitsitseng le botsitso bo botle ba mocheso, e netefatsa hore mocheso ona o khantša ka ho lekana ho li-wafers kaofela, ho fokotsa mocheso o ka bakang botenya bo sa tsitsang, ho khumama ka lebaka la khatello ea maikutlo, kapa ho hlahisa bokooa.

● Ho li-reactor tse nang le li-wafer tse ngata, ho tšoana hona ho bohlokoa ho finyella botenya le sebopeho sa filimi ea GaN le AlGaN tse tsitsitseng ho pholletsa le li-wafers.

2. Thibelo ea Tšilafalo ea Carbon

E 'ngoe ea lintho tse amehileng haholo ka kholo ea LED ea epitaxial ke tšilafalo ea khabone e tsoang likarolong tse se nang letho tsa graphite mochesong o phahameng tlas'a hydrogen le ammonia atmosphere.

● Ho roala ha CVD TaC ho sebetsa e le mokoallo o teteaneng oa ho hasana, ho arola ka ho feletseng karoloana ea graphite ho tloha moeeng oa tšebetso.

● Sena se thibela carbon sublimation kapa outgassing, e leng ka tsela e 'ngoe e ka lebisang ho kenyelletsoeng ha carbon e sa batleheng ka har'a lattice ea GaN - ho fokotsa matla a khanyang a khanyang, ho tsamaisa thepa, le ho tšepahala ha sesebelisoa sa LED.

● Ka ho boloka tikoloho e hloekileng ea khōlo, susceptor e koahetsoeng ke TaC e nolofalletsa likarolo tse phahameng tsa epitaxial tse nang le boleng bo botle ba kristale le bofokoli bo fokolang.

3. Ntlafatso ea Ts'ebetso ea botsitso le Pheta-pheta

Tlhahiso ea epitaxial ea LED e hloka mokhoa o nepahetseng oa ho pheta-pheta ho matha a mangata.

● Sebaka se koahetsoeng ke TaC se boloka tlhahiso e tsitsitseng le ho bonahatsa maikutlo, e leng litekanyetso tsa bohlokoa bakeng sa ho laola mocheso oa pyrometric oa MOCVD.

● Sena se lebisa ho lipalo tse tšepahalang tsa thempereichara, ho theoleloa ho fokotsehileng ha maemo, le ho ntlafala ha mokhoa oa batch-to-batch.

● Ka lebaka leo, bahlahisi ba rua molemo ka tlhahiso e phahameng ea liphaephe, nako e fokotsehileng ea nako, le bophelo bo bolelele ba ho suscepter ha ho bapisoa le mefuta e meng e sa koahetsoeng kapa e koahetsoeng ke SiC libakeng tse itseng tsa mocheso o phahameng.

4. Ho lumellana le Lisebelisoa tse fapaneng tsa LED Reactor Platform

Semixlab's TaC Coated Graphite Susceptors e tsamaellana le lits'ebetso tse kholo tsa MOCVD joalo ka:

● Li-reactor tsa lipolanete tsa AIXTRON

● Veeco K465i, EPIK 700/868

● Taiyo Nippon Sanso SR2000/SR4000

● Li-reactor tse tloahelehileng tsa li-wafer kapa li-single-wafer

Sebapali se seng le se seng se ikamahanya le jiometry ea mochini oa moreki, ho netefatsa hore ho na le tlhophiso e nepahetseng ea wafer, matla a phallo ea khase, le symmetry ea lebala la mocheso bakeng sa lits'ebetso tse ikhethang tsa LED epitaxial.

Melemo ea Semixlab

1. Advanced Material Engineering

Semixlab e sebelisa theknoloji ea ho roala ea CVD TaC e laoloang ka nepo ho fihlela botenya bo nepahetseng, ho khomarela le ho teteana - ho netefatsa ts'ebetso e tšepahalang ea litšitiso le botsitso ba mocheso.

2. Tlhahiso e ikhethileng

Sebapali se seng le se seng se ka etsoa ka mokhoa o ikhethileng ho latela mohlala oa reactor, boholo ba wafer, kapa litlhoko tse ikhethileng tsa ts'ebetso (ho tšoana ha mocheso, ho emissivity, botenya ba ho roala, joalo-joalo).

3. Therisano ea Theknoloji & Tšehetso

Baenjineri ba rona ba ts'ebetso ea epitaxy ka tlung ba fana ka lipuisano tsa tekheniki ea motho a le mong, ba thusa bareki ho khetha thepa, ho tsamaisana le ts'ebetso, le ho ntlafatsa ts'ebetso ea mocheso.

4. Taolo e Thata ea Boleng

Sebapali se seng le se seng se hlahlojoa ka mehato e mengata - ho kenyeletsoa ho lekana ha botenya, tlhahlobo ea ho khomarela, tlhahlobo ea sefahleho sa SEM, le netefatso ea libaesekele tse futhumatsang - ho netefatsa boleng bo ts'oanang le ts'epahalo.