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Bohloeki bo phahameng ba sintered sic furnace tubes
Joaloka moetsi le morekisi ea ka sehloohong oa High Purity Sintered SiC Furnace Tubes naheng ea China, Semixlab's Sintered SiC Furnace Tubes e etselitsoe lits'ebetso tse tsoetseng pele tsa semiconductor, ho kenyeletsoa kholo ea epitaxial, oxidation ea thermal, le diffusion doping. E fumaneha ka litekanyo tsa tloaelo le maemo a bohloeki, li-tubes tsa Semixlab li hlahlojoa ka thata le liteko tsa ho palama libaesekele, li fana ka ts'ebetso e tšepahalang bakeng sa tlhahiso e phahameng ea semiconductor.
Tlhaloso
Li-tubes tsa sebōpi tse phahameng tsa sintered silicon carbide(SiC) ke likarolo tsa bohlokoa tlhahisong e tsoetseng pele ea semiconductor. Li tsejoa ka mokhoa o ikhethang oa botsitso ba mocheso, ho se sebetse ha lik'hemik'hale, le lintho tse fokolang tse sa hloekang, li-tubes tsena li fana ka tikoloho e se nang tšilafalo bakeng sa mekhoa e phahameng ea mocheso e kang ho hōla ha epitaxial, oxidation ea mocheso, le doping ea ho hasana.
songolo
| Thepa ea 'mele ea Sintered Silicon Carbide | |
| Property | Boleng bo tloaelehileng |
| lik'hemik'hale Sebopeho | SiC>95%, Si<5% |
| Tekanyo ea bongata | >3.07 g/cm³ |
| porosity e bonahalang | |
| Modulus ea ho phatloha ho 20 ℃ | 270 MPa |
| Modulus ea ho phatloha ho 1200 ℃ | 290 MPa |
| Ho thatafala ho 20 ℃ | 2400 Kg/mm² |
| Ho robeha ho thata ho 20% | 3.3 MPa · m1/2 |
| Thermal Conductivity ho 1200 ℃ | 45 w/m · K |
| Katoloso ea mocheso ho 20-1200 ℃ | 4.51 × 10-6/℃ |
| Max.mocheso o sebetsang | 1400 ° C |
| Ho hanyetsa mocheso oa mocheso ho 1200 ℃ | Good |
dikopo
Likopo ho Mekhoa ea Semiconductor
1. Khōlo ea Epitaxial
Karolo: Li-tubes tsa Sintered SiC sebōpi li fana ka tikoloho e tsitsitseng ea sebaka se chesang bakeng sa silicon epitaxy le mekhoa e khethiloeng ea SiC epitaxy.
Mathata ho Epitaxy:
● Mocheso o sa tshwaneng o lebisang ho botenya bo sa lekanang.
● Tšilafalo ea likaroloana tse eketsang bokooa ba sekoli lifiliming tsa epitaxial.
● Corrosion e tsoang ho chlorinated kapa halogenated process gase.
Litharollo ka Semixlab SiC Tubes:
● High thermal conductivity etsa bonnete ba hore mocheso o tšoanang o ajoa.
● Sebopeho se teteaneng sa sintered se fokotsa ho lokolloa ha likaroloana.
● Tšireletso e ntle ea kutu e eketsa bophelo ba tšebeletso tlas'a lik'hemik'hale tse mabifi.
2. Thermal Oxidation Process
Karolo: Ka liboping tsa oxidation, li-tubes tsa SiC tse sintered li sebetsa joalo ka kamore ea ho arabela moo liphaephe tsa silicon li pepesetsoang oksijene kapa mouoane ho etsa likarolo tse tšoanang tsa SiO2.
Mathata ho Oxidation:
● Li-tubes tsa quartz li ka holofatsa kapa tsa hlahisa litšila tsa tšepe ka nako e telele.
● Li-gradients tse sa tšoaneng tsa mocheso li ama ho tšoana ha botenya ba oxide.
●Mongobo o phahameng oa mocheso o ka potlakisa ho senyeha ha thepa.
Litharollo ka Semixlab SiC Tubes:
● Tšireletso e matla ea mocheso e thibelang ho phatloha ha tube nakong ea ho futhumatsa le ho pholile khafetsa.
● Bohloeki bo phahameng ba SiC sebopeho se fokotsa tšilafalo le ho boloka boleng ba oxide.
● Bophelo ba nako e telele ba tšebeletso bo fokotsa nako le litšenyehelo tsa ho fetola.
3. Diffusion Doping
Karolo: Li-tubes tsa Sintered SiC li sebetsa e le likamore tsa sebōpi bakeng sa ho hlahisa li-dopants (B, P, As) ka har'a liphaphatha tsa silicon.
Mathata a Phatlalatso:
● Tšebelisano pakeng tsa likhase tsa dopant (POCls, BBr3, PHs) le marako a li-tubes tse bakang tšilafalo.
● Pokello ea likaroloana tse lebisang ho lutla ha mateano le tahlehelo ea lihlahisoa.
● Ho senyeha ha sebopeho nakong ea tšebeliso e atolositsoeng ea mocheso o phahameng.
Litharollo ka Semixlab SiC Tubes:
● Bokaholimo bo sa sebetseng ka lik'hemik'hale bo hanana le tšebetso ea likhase tse dopant.
● Sebopeho sa microstructure se teteaneng se fokotsa ho hlahisa likaroloana.
● Ts'ebetso e tsitsitseng e ka tlase ho 800-1,200°C ea nako ea ts'ebetso e tiisa hore liprofaele tsa dopant li ts'oana.
Molemo oa Khatello
Ho Semixlab, re fana ka tharollo e felletseng e hahiloeng holim'a litšiea tse tharo tsa mantlha:
● Boenjineri ba ho Itloaetsa le Bo nepahetseng: Rea utloisisa hore ts'ebetso e 'ngoe le e' ngoe e ikhethile. Sehlopha sa rona sa boenjiniere se sebetsa le uena ka kotloloho ho rala le ho etsa li-tubes tsa sebōpi tsa SiC tse lumellanang hantle le litlhoko tsa hau tsa ts'ebetso le litlhaloso tsa lisebelisoa. Re ka ntlafatsa boholo, botenya ba lebota, le liphetho tsa bokaholimo ho ntlafatsa ts'ebetso le ho lelefatsa bophelo ba liphaephe.
● Setsebi sa Tekheniki: Sehlopha sa rona sa bo-ramahlale ba lisebelisoa tsa semiconductor ba nang le boiphihlelo se teng ho fana ka tšehetso e tebileng ea tekheniki. Hore na o rarolla bothata ba lihlahisoa kapa o theha mokhoa o mocha oa mocheso o phahameng, re ka fana ka likeletso tsa litsebi mabapi le mokhoa oa ho kopanya likarolo tsa rona tsa SiC bakeng sa liphetho tse nepahetseng.
●Tiiso e Matla ea Boleng ba Pele ho Thomello: Re netefatsa ho nepahala ha phaephe e 'ngoe le e 'ngoe, pheletso ea bokaholimo, le bohloeki re sebelisa metrology e tsoetseng pele le mekhoa ea tlhahlobo ea mantlha. Ts'ebetso ena e thata ea QA e tiisa hore sehlahisoa se seng le se seng sa Semixlab seo u se fumanang se loketse ho etsoa ka bongata bo phahameng ka ntle ho lebokose.
Ho ntlafatsa lits'ebetso tsa hau tsa semiconductor ka Semixlab's high purity sintered SiC furnace tubes-e etselitsoeng ho fana ka botsitso bo ikhethang ba mocheso, ho se sebetse ha lik'hemik'hale, le ts'ebetso e se nang tšilafalo bakeng sa lisebelisoa tsa epitaxy, oxidation le diffusion. Hore na o hloka litekanyo tsa tloaelo, litlhaloso tsa bohloeki bo phahameng, kapa tlhahlobo ea ts'ebetso ea litsebi, Semixlab e netefatsa hore li-wafers tsa hau li fumana chai e ntle le ts'epahalo ea sesebelisoa. Ikopanye le sehlopha sa rona sa tekheniki ho fihlela litlhoko tsa hau tsa tlhahiso ea semiconductor.
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