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Seketsoana sa SiC Wafer se Phahameng ka ho Fetisisa
Joaloka moetsi ea ka sehloohong oa Chaena le mofani oa thepa ea High-Purity SiC Wafer Boat, Semixlab's Silicon Carbide wafer boat e sebelisoa haholo lihokelong tsa bohlokoa tse kang LPCVD, oxidation le annealing ka lebaka la botsitso ba eona bo botle ba mocheso, ho hanyetsa kutu le matla a mochini. Haeba u batla SiC Wafer Boat e ka fokotsang tšilafalo ea likaroloana, ea lelefatsa bophelo ba ts'ebeletso le ho netefatsa polokeho ea liphaephe, sehlahisoa sena e tla ba khetho ea hau e nepahetseng.
Tlhaloso
Lefapheng la tlhahiso ea semiconductor, lits'ebetso tsa mocheso o phahameng li baka mathata a feteletseng ho bajari ba li-wafer. Ha mocheso o feta 1600 ℃, sepalangoang sa quartz sa setso (seketsoana se sebelisoang ke quartz) se qala ho nolofala le ho holofala le ho lokolla litšila, e leng se etsang hore sekhahla sa sekhechana sa liphaphatha se phahame.
High-Purity SiC Wafer Boat, e nang le melemo ea tlhaho ea silicon carbide (SiC), e rarolla ka botlalo ntlha ena ea bohloko ba indasteri mme e fetoha sesebelisoa sa bohlokoa bakeng sa tlhahiso e tsoetseng pele ea semiconductor, haholo-holo tlhahiso ea sesebelisoa sa matla sa SiC.
songolo
Lintho tsa mantlha tsa 'mele le likarolo tsa tekheniki tsa sehlahisoa:
| Matšoao a ts'ebetso | Seketsoana sa SiC Wafer se Phahameng ka ho Fetisisa | Sejari sa setso sa quartz | Melemo e ntlafetseng |
| Boholo ba mocheso o sebetsang | 1800°C (e tsoelang pele) / 2000°C (tlhōrō) | 1200 ° C | Ho hanyetsa mocheso ho ntlafetse ka 50% |
| Ho khanna ho chesang | 4.9 W/cm·K (thempereichara ea kamore) | 1.5 W/cm·K | Bokhoni ba ho felisa mocheso bo eketsehile ka 226% |
| Palo e lekaneng ea ho atolosoa ha mocheso | 4-5 × 10⁻⁶/K | 0.55 × 10⁻⁶/K | Ho tsitsa ha mocheso ho ntlafalitsoe ka makhetlo a 7 |
| thatafala | Mohs 9.2 (ea bobeli ho ea ho daemane) | Mohs 7 | Khanyetso ea ho apara e ntlafalitsoe ka makhetlo a 30 |
| Khatello ea ntlha ea ho kopana le Wafer | <5 MPa (moralo o thibelang ho thella) | > MPA ea 20 | Sekhahla sa Wafer slip se fokotsehile ka 80% |
| Ho lokolloa ha likaroloana | 0 likaroloana/cm² (Bohloeki ba sehlopha sa 100) | > likaroloana tse 50/cm² | Tšilafalo e haufi le lefela |
Ts'ebetso e ntle haholo ea silicon carbide wafer carrier (SiC Wafer Carrier) e tsoa ho thepa ea eona e ikhethang ea mahlale. Ka tlase ke papiso e qaqileng ea likarolo tsa bohlokoa tsa 'mele:
Litekanyetso tsena li fetolela ka kotloloho ho kotulo e ntlafalitsoeng le litšenyehelo tse fokotsehileng tsa tlhahiso ea semiconductor, joalo ka ha ho bonts'itsoe ho tse latelang:
Molemo oa ts'ebetso ea mocheso: SiC's wide bandgap (3.26 eV) e tiisa hore e boloka mohaho o tsitsitseng oa kristale ho 2000 ° C le ho qoba ho fetoha ha mocheso. Thermal conductivity e phahameng (4.9 W / cm·K) e lumella sephaphatha hore se futhumale ka mokhoa o ts'oanang 'me se felisa mefokolo ea lattice e bakoang ke khatello ea mocheso.
Matla a mechine: boima ba 9.2 Mohs bo hanyetsa tšusumetso ea 'mele nakong ea ts'ebetso,' me bophelo ba tšebeletso bo feta makhetlo a 10 ho feta bajari ba quartz ba setso. Moralo o ikhethileng oa semicircular slot o laola khatello ea maikutlo ea li-wafer ka tlase ho 5MPa, ha e le hantle e felisa ts'ebetso e thellang ea mocheso o phahameng.
Ho se sebetse ka lik'hemik'hale: Ho mamella likhase tse senyang haholo tse kang HF le HCl ho feta lihora tse 10,000, 'me tšilafalo ea zero e bolokiloe ho LPCVD, diffusion, oxidation le mekhoa e meng.
dikopo
Karolo ea bohlokoa ea High Purity SiC Wafer Boat
Sekepe sa rona sa High-Purity SiC Wafer se sebelisoa haholo lits'ebetsong tse latelang tsa bohlokoa tsa tlhahiso ea semiconductor:
Ho Aneha ka Mocheso o Phahameng: Mocheng oa tlhahiso oa moetsi oa liphaephe tsa sic, annealing ea mocheso o phahameng ke mohato oa bohlokoa oa ho kenya li-dopants le ho lokisa liphoso tsa lattice. Botsitso bo phahameng ba mocheso oa sekepe sa SiC wafer se netefatsa ho ts'oana le katleho ea ts'ebetso ea ho koala.
Khōlo ea Epitaxial: Hore na ke silicon-based epitaxy kapa silicon carbide wafer epitaxy, ho hanyetsa mocheso o phahameng le ho hanyetsa kutu ea sekepe sa SiC wafer se etsa hore e be sejari se loketseng ho netefatsa kholo ea boleng bo holimo ea epitaxial.
kabo: Seboping sa mocheso o phahameng oa mocheso, seketsoana sa SiC se ka har'a seketsoana sa LPCVD se ka mamella kalafo ea nako e telele ea mocheso o phahameng ho netefatsa phallo e ts'oanang ea liathomo tsa doping le ho theha thepa e nepahetseng ea motlakase.
Thin Film Deposition: Haholo-holo bakeng sa lits'ebetso tsa Lpcvd wafer boat, ts'ebetso e tlase haholo ea phallo ea likotoana le ts'ebetso e ntle ea mocheso oa likepe tsa SiC wafer li thusa ho fumana lifilimi tsa boleng bo holimo, tse tšoanang hantle.
Lisebelisoa tse lumellanang le ts'ebetso e lumellanang:
✔ E lumellana le libono tsa LPCVD tse tloaelehileng (tse kang TEL, Kokusai, ASM, SVG, Tystar, joalo-joalo)
✔ Litlhaloso tsa sephaphatha tse ka khonehang joalo ka 100mm/150mm/200mm
✔ E ts'ehetsa ho kengoa ha lisebelisoa tse otlolohileng le tse otlolohileng
Sekepe sa Semixlab's SiC wafer ke khetho e nepahetseng ea ho ntlafatsa ts'ebetso ea hau ea ts'ebetso le tlhahiso ea lihlahisoa, 'me ke moetapele oa tharollo e tsoetseng pele ea Semiconductor wafer boat.
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