Semiconductor quartz sephaphatha

Semixlab Semiconductor Quartz Wafer ke silika e entsoeng ka mokhoa o nepahetseng, e phahameng haholo-e phahameng e entsoeng bakeng sa maemo a batlang a sebetsa a semiconductor.

E sebelisoa haholo joalo ka sephaphatha sa dummy, carrier wafer, optical substrate, le photomask base ho thermal oxidation, CVD/LPCVD, PECVD, le lithography system.

E entsoe ho tloha ho 99.99% ea boleng bo phahameng ba SiO₂, sephaphatha sena sa quartz se fana ka botsitso bo ikhethang ba mocheso, ho se sebetse ha lik'hemik'hale, le ho pepeseha ha optical, ho netefatsa ts'ebetso e tsitsitseng le e se nang tšoaetso mecheng e tsoetseng pele ea tlhahiso ea semiconductor.

Ⅰ. Thepa le Lika holim'a Thepa

● Boitsebiso: Silika ea tlhaho kapa ea tlhaho e kopantsoeng (SiO₂ ≥ 99.99%).

● Dikgetho tsa Diameter: 2 ", 4", 6 ", 8", 12 "(boholo ba tloaelo bo fumaneha).

● Surface Qetella: Mahlakore a mabeli a bentšitsoeng, a bataletseng ≤ 5 μm, ho hlaka holim'a metsi ≤ 0.5 nm.

● Ho hanyetsa Thermal: E tsitsitse ho fihlela ho 1200 ° C ts'ebetso e tsoelang pele.

● Coefficient ea Katoloso ea Thermal: 5.5 × 10⁻⁷ /°C.

● Phetiso ea Optical:> 90% ho tloha 190 nm ho ea ho 2,600 nm.

Sephaphatha se seng le se seng se hlahlojoa ka thata holim'a metsi, netefatso ea boholo, le tlhahlobo ea bohloeki ho netefatsa ho latela litlhoko tsa semiconductor-grade ka botlalo.

Ⅱ. Mesebetsi ea Bohlokoa Mekhoeng ea Semiconductor

1. Ts'ebetso ea Ts'ebetso ho CVD le LPCVD Systems

Li-wafers tsa quartz li sebelisoa e le dummy kapa spacer wafe ho tsitsisa phallo ea khase le ho tšoana ha mocheso nakong ea SiO₂, Si₃N₄, le polysilicon e tšesaane ea filimi. Ho nepahala ha bona ho netefatsa kholo e ts'oanang ea filimi le tlhahiso e fokolang ea likaroloana nakong eohle ea ho beha.

2. Likopo tsa Oxidation le Diffusion Furnace

Lits'ebetsong tsa oxidation e phahameng ea mocheso le dopant diffusion, li-wafers tsa quartz li sebetsa e le lithebe tsa mocheso kapa li-monitor tsa ts'ebetso, li boloka kabo e tšoanang ea mocheso le ho thibela tšilafalo ea liphaephe tsa tlhahiso.

3. Optical le Lithography Sebelisa

Ka lebaka la transmittance ea eona e phahameng ea optical le index ea refractive index, sephaephe sa quartz se loketse ho etsa photomask, li-DUV exposure substrates, le lisebelisoa tsa optical calibration. E netefatsa phetiso e sa fetoheng ea khanya bakeng sa li-i-line, KrF, le litsamaiso tsa lithography tsa ArF.

4. Litikoloho tsa Plasma le Etching

Lits'ebetsong tse omeletseng tsa etching le plasma CVD, li-wafers tsa quartz li sebelisoa e le lithebe tsa kamore kapa lifensetere tsa plasma, tse fanang ka matla a matla a dielectric le ho tšoarella ha lik'hemik'hale khahlano le likhase tse thehiloeng ho halogen (CF₄, SF₆, Cl₂).

5. Tekanyo ea Metrology le Thepa

Li-wafers tsa quartz li sebetsa e le liphaephe tsa litšupiso bakeng sa botenya ba filimi, mocheso le ho lekanngoa ha sephara. Sebaka sa bona se boreleli haholo, se se nang sekoli se nolofalletsa liphetho tse nepahetseng le tse ka phetoang, ho netefatsa botsitso ba taolo ea ts'ebetso.

Liketso tse tloaelehileng

● Dummy wafer bakeng sa CVD, LPCVD, le lisebelisoa tsa PECVD

● Sebapali sa tšebetso kapa thethe e futhumatsang ka har'a libopi tsa oxidation le diffusion

● Karolo e nyenyane ea photomask bakeng sa UV / DUV lithography

● Sephaka sa litšupiso bakeng sa ho lekanya lisebelisoa le metrology

● Fensetere ea kamore ea plasma le tšireletso ea etching process

Semixlab Semiconductor Quartz Wafer ke setsi sa tšebetso se phahameng se etselitsoeng lits'ebetso tse batloang haholo tsa semiconductor. Ho tsitsa ha eona ho futhumatsang, ho nepahala ha pono, le ho hloeka ha lik'hemik'hale ho etsa hore e be ea bohlokoa haholo ha ho behoa, ho hlahisa oxidation, lithography le metrology. Ka ts'ehetso e felletseng ea tloaelo le boenjiniere, Semixlab e fana ka litharollo tse eketsang botsitso ba ts'ebetso, ts'epo ea lihlahisoa, le ts'ebetso e sebetsang hantle. Re tšepa ka tieo ho ba molekane oa hau oa nako e telele Chaena.