8-inch SiC e kentsoeng selikalikoe sa graphite bakeng sa SiC Epitaxy

Litšobotsi tsa lintho tse bonahalang le tsa 'Mele

Semixlab's SiC e koahetsoeng ka selikalikoe sa graphite se entsoeng ka graphite ea isostatic e le thepa ea motheo, e lateloa ke seaparo se tšoanang sa lik'hemik'hale sa mouoane (CVD) SiC. Sebopeho sena se ikhethang se fana ka tekanyo ea matla, ho nepahala, le ho hanyetsa maemo a thata a tshebetso.

Likopo ho SiC Epitaxy Process

Ts'ebetsong ea kholo ea SiC epitaxial, lesale la graphite le koahetsoeng ke SiC le sebetsa e le karolo ea sebopeho le se sebetsang pakeng tsa sephaphatha, susceptor le likarolo tse ling tsa graphite ka hare ho kamore ea MOCVD kapa CVD reaction. Ts'ebetso ea eona e ama ka kotloloho boleng ba epitaxial layer, ho ts'oana ha filimi, le botsitso ba reactor ka kakaretso - likarolo tsohle tsa bohlokoa bakeng sa tlhahiso e phahameng ea lisebelisoa tsa motlakase tsa SiC.

1. Wafer Support le Alignment

Ring ea graphite e entsoe ka mokhoa o nepahetseng ho netefatsa hore li-wafer centering li nepahetse le ho behoa ka mokhoa o sireletsehileng nakong ea mocheso o phahameng oa mocheso oa epitaxial. Botsitso ba eona bo boholo ka tlas'a mojaro oa mocheso o boloka tekano e nepahetseng ea wafer le ho thibela ho soahlamana ha moeli, ho netefatsa kholo e tsitsitseng ea lera ho pholletsa le bokaholimo.

2. Kabo e sa Tšoaneng ea Thermal

Nakong ea SiC epitaxy, ho boloka mocheso o ts'oanang oa mocheso ho pholletsa le sephaephe kaofela ho bohlokoa ho fihlela botenya ba filimi bo tsitsitseng le ho tsepamisa mohopolo oa doping. Lesale le koahetsoeng la SiC le thusa ho leka-lekanya mojaro oa mocheso ka ho ntlafatsa phetisetso ea mocheso pakeng tsa sebaka sa susceptor le wafer edge, ho fokotsa libaka tse chesang le ho etsa bonnete ba hore ho na le li-epitaxial layer formation esita le mocheso o phahameng o fetang 1600 ° C.

3. Tšireletso ea Tikoloho ea Ts'ebetso

Likarolo tsa graphite tse sa koaeloang li ka hlaseloa habonolo ke khoholeho ea lik'hemik'hale le ho ntšoa ha likaroloana moeeng o sebetsang oa epitaxial o nang le likhase tse kang H₂, SiH₄, le C₃H₈. Ho roala ha CVD SiC holim'a lesale ho sebetsa e le thibelo e sireletsang, ho arola substrate ea graphite ho likhase tse senyang, kahoo ho fokotsa tšilafalo ea litšila le ho thibela likaroloana tse thehiloeng ho carbon hore li kene sebakeng sa kholo. Sena se fella ka bohloeki bo ntlafetseng ba bokaholimo le tlhahiso e phahameng ea lisebelisoa.

4. Phokotso ea Liphello tsa Moeli le Ntlafatso ea Phallo ea Khase

Lits'ebetsong tse tsoetseng pele tsa 8-inch SiC epitaxy, ho ts'oana ha moeli hangata ke phephetso ea bohlokoa ea ts'ebetso. Lesale la graphite le koahetsoeng ke SiC le thusa ho tsitsisa phallo ea khase ea laminar haufi le moeli oa sephaphatha, ho thibela libaka tse ferekaneng le ho netefatsa tikoloho e laoloang ea moeli. Kabo ena e ntlafalitsoeng ea phallo ea khase e kenya letsoho ho ntlafatseng taolo ea botenya ba epitaxial, ho fokotsa litšila le ho etsa bonnete ba hore ho beoa lesela la boleng bo holimo esita le ho li-wafers tse bophara bo boholo.

5. Ho lumellana le Meetso e mengata ea Reactor

Mehele ea graphite ea Semixlab's SiC e etselitsoe ho ikamahanya le mefuta e meholo ea lisebelisoa tsa epitaxy joalo ka AIXTRON, Veeco le LPE. Mehele e ka etsoa ka mokhoa oa geometry, botenya ba ho roala, le sebopeho sa sehokelo ho tsamaisana hantle le li-susceptor tse khethehileng tsa reactor, tse nolofalletsang kopanyo e se nang moeli le ts'ebetso e tsitsitseng ho li-platform tse fapaneng tsa epitaxial.

6. Karolo e Atolositsoeng Bophelong bohle le Tšepahalang ea Ts'ebetso

Ka motsoako oa matla a phahameng a mochini a isostatic graphite le CVD SiC's khanyetso e ikhethang ea ho apara, selikalikoe se koahetsoeng se bonts'a ts'ebetso e ikhethang tlasa ts'ebetso ea nako e telele ea cyclic. E hanela microcracking, corrosion ea lik'hemik'hale, le mokhathala oa mocheso, ho netefatsa ts'ebetso e tsitsitseng ka nako e telele ea ts'ebetso, kahoo e fokotsa makhetlo a tlhokomelo le litšenyehelo tsa ts'ebetso mecheng e phahameng ea tlhahiso ea epitaxy.

Melemo ea Semixlab

Ka boiphihlelo ba lilemo tse fetang mashome a mabeli ho semiconductor epitaxy le theknoloji e tsoetseng pele ea ho roala ceramic, Semixlab e fana ka litharollo tse felletseng bakeng sa likarolo tsa SiC tse hloekileng haholo.

Melemo ea rona ea mantlha:

● Tlhahiso e Tloaelehileng: Boholo bo entsoeng, botenya ba ho roala, le geometry ho ea ka meralo e khethehileng ea li-reactor (AIXTRON, Veeco, LPE, joalo-joalo).

● Tšehetso ea Mohlala: Prototyping e potlakileng le tšebeletso ea mohlala e fumanehang bakeng sa ho hlahlojoa le ho netefatsa ts'ebetso.

● Technical Consultation: Baenjiniere ba nang le phihlelo ba fana ka keletso ea ho rekisa pele ho thekiso le ts'ebetso ho ntlafatsa tshebetso le bophelo bo bolelele.

● Tiisetso ea Boleng: Karolo e 'ngoe le e 'ngoe e hlahlojoa ka mokhoa o nepahetseng, tekanyo ea botenya ba ho koahela, le tlhahlobo ea mocheso o phahameng pele e beleha.