Quartz Disk bakeng sa Ts'ebetso ea Semiconductor

Indasteri ea semiconductor e hloka likarolo tsa bohloeki bo ikhethang le ho nepahala. Li-disk tsa quartz ke lejoe la sekhutlo lebaleng lena, li sebetsa karolo ea bohlokoa lits'ebetsong tse fapaneng tsa mocheso o phahameng le tse hlokang lik'hemik'hale tsa semiconductor. Semixlab Quartz Disk bakeng sa Semiconductor Process e entsoe ka silika e entsoeng ka holimo e hloekileng (SiO2) ho fana ka botsitso bo ikhethang ba mocheso, k'hemik'hale ea lik'hemik'hale, le tšilafalo e tlaase haholo. (RIE/ICP) tšehetso.

Thepa le Litšobotsi

Li-quartz tsa rona tsa semiconductor li entsoe ka quartz ea boleng bo holimo, e leng thepa e tsebahalang ka thepa ea eona e ikhethang. Litšobotsi tsa bohlokoa tsa li-quartz tsa rona li kenyelletsa:

● Bohloeki bo Phahameng: E na le litšila tse fokolang, li-quartz disks tsa rona li thibela tšilafalo ea li-wafers tse bonolo tsa semiconductor, tse bohlokoa bakeng sa ho boloka botšepehi ba lisebelisoa le lihlahisoa.

● Excellent Thermal Stability: Ka coefficient e tlase ea ho atolosoa ha mocheso, li-quartz disks li ka mamella ho fetoha ha mocheso o feteletseng ntle le ho phunyeha kapa ho sotha. Sena se li etsa hore li tšoanelehe bakeng sa lits'ebetso tsa mocheso o phahameng joalo ka annealing, diffusion, le oxidation.

● Ho Iketla ha Lik'hemik'hale: Quartz e hanyetsana haholo le li-acids le lik'hemik'hale tse ngata tse sebelisoang ts'ebetsong ea semiconductor, ho akarelletsa le hydrofluoric acid (HF) le sulfuric acid (H2SO4). Boiketlo bona ba lik'hemik'hale bo tiisa tikoloho e tsitsitseng le e sa sebetseng bakeng sa li-wafers.

● Ponaletso e Phahameng: Quartz e kopantsoeng e na le pepenene e phahameng ho khanya ea ultraviolet (UV), e leng bohlokoa bakeng sa photolithography le mekhoa e meng ea optical.

Li-disk tsa rona tsa quartz li fumaneha ka mefuta e fapaneng ea boholo le botenya, ka mekhahlelo e tloaelehileng e kenyelletsang:

● Bohloeki: >99.995%

● Khoeli ea Katoloso ea Thermal: ~0.54 x 10−6/°C (ho 20-300°C)

● Ntho e Behang: ~1600°C

● Li-diameter tse fumanehang: Ho fihlela ho 300mm

Likopo ho Semiconductor Manufacturing

Li-disk tsa quartz tse hloekileng li bohlokoa haholo lits'ebetsong tse 'maloa tsa bohlokoa tsa semiconductor. Lisebelisoa tsa bona tse khethehileng li kenyelletsa:

● CVD (Chemical Vapor Deposition): Li-disk tsa quartz li sebelisoa e le lipoleiti tsa susceptor kapa li-liner ho li-reactor tsa CVD. Botsitso ba bona ba mocheso le ho se sebetse ha lik'hemik'hale ho netefatsa hore ho futhumala ka mokhoa o ts'oanang le tikoloho e se nang tšilafalo bakeng sa lits'ebetso tse tšesaane tsa ho beha lifilimi.

● PVD (Physical Vapor Deposition): Lits'ebetsong tsa PVD tse kang sputtering, li-quartz disks li sebetsa e le litšehetso tsa sepheo kapa li-substrate holders. Li ka mamella matla a phahameng a kinetic a ts'ebetso ea deposition ha li ntse li boloka botsitso ba dimensional.

● Oxidation le Diffusion: Joalo ka liner bakeng sa libopi kapa e le karolo ea seketsoana sa liphaephe, li-quartz disks li bohlokoa ho oxidation e phahameng ea mocheso le lits'ebetso tsa phallo. Li thibela tšilafalo ea tšepe e tsoang maboteng a sebōpi hore e se ke ea fihla liphaepheng tsa silicon.

● Anealing: Li-disk tsa quartz li fana ka sebaka se hloekileng le se tsitsitseng bakeng sa annealing ea mocheso, mokhoa o sebelisetsoang ho lokisa tšenyo ea kristale le ho kenya li-dopants lisebelisoa tsa semiconductor.

Molemo oa Semixlab: Molekane oa Hao ho Semiconductor Fabrication

Ho Semixlab, ha re na semiconductor quartz disk moetsi feela. Re balekane ba inehetseng katlehong ea hau, re fana ka litšebeletso tse ngata tse etselitsoeng ho nolofatsa ts'ebetso ea hau le ho ntlafatsa ts'ebetso ea hau e sebetsang hantle.

● Boiketlo: Rea utloisisa hore ts'ebetso e 'ngoe le e' ngoe ea masela e ikhethile. Sehlopha sa rona se ka etsa li-disk tsa quartz tse ikhethileng tse etselitsoeng maemo a hau, bohloeki kapa litlhoko tsa kopo.

● Tekolo ea Tekheniki: Litsebi tsa rona tsa tekheniki li fana ka lipuisano tse tebileng ho u thusa ho khetha sehlahisoa se loketseng sa quartz bakeng sa ts'ebetso ea hau e ikhethileng, ho netefatsa ts'ebetso e nepahetseng le bophelo bo bolelele.

● Rapid Prototyping le Sample Service: Re fana ka linako tse potlakileng tsa phetoho bakeng sa li-prototype le lisampole, tse u lumellang hore u leke le ho netefatsa lihlahisoa tsa rona kapele le ka nepo. Sena se potlakisa potoloho ea hau ea R&D mme se fokotsa nako ea ho ea 'marakeng.

Bakeng sa baenjiniere ba ts'ebetso le bareki ba batlang lipoleiti tse ka tšeptjoang tsa lipalangoang, lithebe tsa ho itšehla thajana, le litšehetso tsa optical-grade, Semixlab e fana ka li-disk tsa quartz tse mamellang ka thata, tse nang le sekoli se tlaase tse ntlafatsang lihlahisoa le ho atolosa lisebelisoa tsa ho sebetsa.