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SiC Coated graphite hitara bakeng sa MOCVD
Semixlab SiC Coated Graphite MOCVD Heater ke mochini o futhumatsang o sebetsang hantle haholo o etselitsoeng lits'ebetso tsa tlhahiso ea semiconductor tse sebelisang lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD) ho etsa seaparo sa junifomo, se teteaneng sa silicon carbide (SiC) holim'a karolo e ka holimo-limo ea graphite e hloekileng.
Tlhaloso
Lintlha tse hlalositsoeng
SiC Coated Graphite MOCVD Heater e kopanya mocheso o motle oa mocheso oa graphite le mocheso o phahameng le ho hanyetsa ha kutu ea liphahlo tsa SiC, 'me e sebelisoa haholo ka lisebelisoa tsa tšepe-organic chemical vapor deposition (MOCVD) ho etsa bonnete ba botsitso le bohloeki bo phahameng mekhoeng ea ho hōla epitaxy.
SiC Coated Graphite MOCVD Heater Product Features
1. Bohloeki bo phahameng haholo le botsitso ba lik'hemik'hale
Bohloeki ≥99.99995%: Heater ea rona ea Graphite e lokiselitsoe tlas'a mocheso o phahameng oa chlorination ka ts'ebetso ea CVD, e leng hantle e qobang tšilafalo ea tšepe 'me e finyella tlhokahalo ea libaka tse hloekileng haholo tsa tlhahiso ea semiconductor.
Anti-chemical corrosion: The botenya le bo phahameng bo thata ba SiC coating (Vickers hardness ea 2500-2800) e ka hanela khoholeho ea acid, alkalis, letsoai le lihlapolli tsa organic, tse lelefatsang bophelo ba ts'ebeletso ea lisebelisoa tikolohong ea khase e senyang.
2. Ho hanyetsa mocheso o phahameng haholo
Botsitso bo phahameng ba mocheso: e ka mamella ho fihlela ho 3000 ° C moeeng o sa sebetseng, ts'ebetso e tsitsitseng ho fihlela ho 2200 ° C sebakeng sa vacuum, le 1600-1700 ° C sebakeng sa oxidizing, se loketseng maemo a feteletseng a kamore ea MOCVD reaction.
Mocheso o Monyane oa Katoloso ea Thermal (4.5 x 10-⁶K-¹): Karolo ena ea MOCVD Graphite Heater e fokotsa ho peperana kapa ho phunya ha mohatsela ka lebaka la ho fetoha ha mocheso, ho netefatsa bots'epehi ba sebopeho tlas'a libaesekele tsa nako e telele tsa mocheso.
3. Ts'ebetso e ntlafalitsoeng ea taolo ea mocheso
High Thermal Conductivity (200-300 W / mK): Thermal conductivity e phahameng ea Graphite MOCVD Heater e etsa qeto ea hore sehlahisoa se ka fetisetsa mocheso ka potlako le ka mokhoa o ts'oanang ho finyella kabo e tsitsitseng ea mocheso holim'a mocheso (± 1 ° C), kahoo e ntlafatsa ka katleho ho lekana ha epitaxial layer.
Laminar Gas Flow Field Design: Ka mor'a ts'ebetso e tsoelang pele ea theknoloji le ntlafatso, boreleli ba rona ba MOCVD Heater holim'a metsi (Ra ≤ 0.8μm) le ts'ebetso ea geometry e tiisa hore ho ajoa ka mokhoa o ts'oanang oa likhase tse sebetsang hantle le ho fokotsa ho se tšoane ha deposition ho bakoang ke moferefere.
songolo
Tekheniki Parameters Papiso le Melemo
| litsobotsi | Li-heaters tse koahetsoeng ka Semixlab SiC | Li-heaters tse tloaelehileng tsa graphite |
| Boholo ba mocheso o sebetsang (inert) | 3000 ° C | 2500 ° C |
| K'hemik'hale e Hloekileng | ≥99.99995% | ≤99.99 |
| Ho khanna ho chesang | 300 W / mK | 120-150 W/mK |
| Coating mamarello | 415 MPa (ho kobeha ha lintlha tse 4) | MP100 |
| Bophelo bo tloaelehileng (lipotoloho) | > 500 lipotolohong | Lipotoloho 100-200 |
Molemo oa Khatello
Ke hobane'ng ha Semixlab?
Boikemisetso: Semixlab e ikemiselitse ho fana ka lihlahisoa tse ikhethileng le lits'ebeletso tsa tekheniki ho bareki ba rona. Re ts'ehetsa ho etsoa ha boholo bo sa tloaelehang (ho fihla ho 360mm bophara) le botenya ba ho roala (20-500μm) ho fana ka litlhoko tse ngata tsa lisebelisoa.
Setifikeiti sa Lefatše: SiC Coated Graphite Heater ea rona e tsamaellana le SEMI, e netefalitsoe ke ISO 9001, 'me lihlahisoa tsa rona li romelloa haholo Europe le United States, hammoho le Japane le Korea Boroa, ka molemo o moholo oa theko / ts'ebetso.
Synergy ea tekheniki: Semixlab esale e ts'oara tšebelisano e haufi le litsi tse holimo tsa lipatlisiso tsa China, e sebelisa mahlale a patiloeng a nang le tokelo ea molao (joalo ka ts'ebetso ea CGT Carbon's SiC³) ho ntlafatsa ts'ebetso ea likhoele le ho hanyetsa mocheso oa mocheso.
