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High-purity isostatic graphite bakeng sa semiconductors
High-purity isostatic graphite ke ntho e ka sehloohong e tsoetseng pele tlhahisong ea semiconductor, Ka ho ts'oana ha eona ka mocheso, ho nepahala ha sebopeho, le ts'ebetso e se nang tšoaetso, isostatic graphite e ntse e le ea bohlokoa ho nts'etsopele ea mekhoa ea semiconductor e kang MOCVD, RTP, diffusion, le SiC epitaxy. Boima ba eona bo ts'oanang le ts'ebetso e ntle haholo ea machina e lumella ho etsoa ka nepo ha likarolo tse rarahaneng, tse sebetsang hantle. Re lebeletse lipuisano tsa hau tse ling.
Tlhaloso
songolo
| Lintho tsa 'mele tsa graphite ea isostatic | ||
| Property | Unit | Boleng bo tloaelehileng |
| Tekanyo ea bongata | g / cm³ | 1.83 |
| thatafala | H.S.D. | 58 |
| Phalliso ea Motlakase | μΩ.m | 10 |
| Matla a Flexural | MPa | 47 |
| Compressive Matla | MPa | 103 |
| Matla a tšepe | MPa | 31 |
| Modulus e monyane | GPA | 11.8 |
| Katoloso ea Thermal(CTE) | 10-6K-1 | 4.6 |
| Thermal Conductivity | W·m-1K-1 | 130 |
| Karolelano ea Boima ba Thollo | μm | 8-10 |
| Kutloelo-bohloko | % | 10 |
| Litaba tsa Ash | ppm | ≤5 (kamora ho hloekisoa) |
dikopo
Semixlab Bohloeki bo phahameng ba Isostatic graphite, ka lebaka la bohloeki ba eona bo phahameng, sebopeho se setle sa lijo-thollo, boima bo tšoanang, ho hanyetsa mocheso oa mocheso, le machinability e babatsehang, e sebelisoa haholo indastering ea semiconductor. Ka tlase ke lihlahisoa tse kholo tse phethiloeng le likarolo tsa tsona tse tsamaisanang le lits'ebetso tsa bohlokoa:
Isostatic Graphite bakeng sa Likopo tsa Semiconductor
1. Ho MOCVD (Metal-Organic Chemical Vapor Deposition)
MOCVD ke ts'ebetso ea mantlha ea ho etsa likarolo tsa epitaxial tsa GaN, GaAs, le SiC. Hangata graphite ea Isostatic e sebelisoa ho etsa:
● Li-susceptors: Sebeletsa e le li-wafer carrier tse tšoarang le ho li potoloha ka har'a reactor. Li fana ka phetisetso ea mocheso e ts'oanang, ho netefatsa kholo e tsitsitseng ea epitaxial ho pholletsa le bokaholimo. Ka tloaelo e koahetsoe ka CVD SiC kapa TaC ho ntlafatsa khanyetso ea lik'hemik'hale le ho lelefatsa bophelo.
● Li-Wafer Carriers / Likepe tsa Graphite: E sebelisoa ho kenya li-wafers tse ngata ka nako e le 'ngoe. Li hloka machining a nepahetseng ho boloka sephara se bataletseng le ho qoba tšoaetso.
● Heater Elements: Licheso tsa Graphite li fana ka masimo a mocheso a tsitsitseng le a tšoanang a bohlokoa bakeng sa epitaxy ea boleng bo phahameng.
Karolo ea bohlokoa: Isostatic graphite e netefatsa ho tšoana ha mocheso, botsitso ba lik'hemik'hale, le bophelo bo bolelele ba tšebeletso, bo amang ka ho toba boleng ba filimi ea epitaxial.
2. Ho Annealing & Diffusion Furnaces
Mehato e phahameng ea mocheso oa mocheso, joalo ka phallo ea dopant, oxidation, le annealing, e itšetlehile haholo ka likaroloana tsa isostatic graphite, ho kenyelletsa:
● Diffusion Furnace Boats: Tšoara li-wafers nakong ea mocheso o phahameng oa mocheso le ts'ebetso ea ho hasana ha dopant. Graphite e fana ka botsitso bo botle ba mocheso le deformation e nyane tlasa ho palama baesekele e futhumetseng khafetsa.
● Li-Liners le Li-Insulation Components: Lisebelisoa tsa graphite le lithebe li sireletsa likamore tsa sebōpi hore li se ke tsa silafala le ho ntlafatsa ho tšoana ha mocheso.
● Heater Tubes & Elements: E sebelisoa e le li-heaters tse hanyetsang libakeng tse phahameng tsa mocheso, ho fana ka mocheso o nepahetseng le o tsitsitseng.
Karolo ea bohlokoa: Likarolo tsa graphite tsa Isostatic li etsa hore kalafo e se ke ea silafala, e tsitsitseng, 'me e phetoe mocheso, e leng ea bohlokoa bakeng sa ts'ebetso ea dopant le phokotso ea sekoli.
3. Ho SiC Epitaxy (4H-SiC, 6H-SiC kgolo)
Kholo ea SiC epitaxial e hloka mocheso o phahameng haholo (> 1500°C) le tikoloho ea khase e senyang. Isostatic graphite e sebelisetsoa ho etsa:
● Li-Susceptors tse koahetsoeng ke SiC: Fana ka tšehetso ea substrate nakong ea SiC epitaxy, ho etsa bonnete ba hore kabo e babatsehang ea mocheso le botsitso ba holim'a metsi tlas'a maemo a feteletseng.
● Li-Graphite Paddles & Wafer Holders: Li-wafers tse sireletsehileng nakong ea ho potoloha le ho phalla ha khase, ho netefatsa sekhahla sa ho hōla se tšoanang le botenya ba lera.
● Likarolo tsa Ts'ebetso ea Tube: Likarolo tsa sebopeho sa graphite ka hare ho li-epitaxy reactor li mamella maemo a mabifi ha li ntse li boloka bohloeki.
Karolo ea bohlokoa: Isostatic graphite ho SiC epitaxy e fana ka ho nepahala ha dimensional, lik'hemik'hale tse hanyetsanang le lik'hemik'hale, le tsamaiso e tšepahalang ea mocheso, e susumetsang ka ho toba tlhahiso ea sephaphatha le ho tšoana ha filimi ea epitaxial.
Joaloka morekisi ea ka sehloohong oa graphite ea isostatic e phahameng haholo Chaena, Semixlab e ikemiselitse ho fana ka lihlahisoa tse tsoetseng pele le tharollo ea tekheniki bakeng sa indasteri ea ho sebetsa ea semiconductor. Re amohela lipotso tsa hau ka nako efe kapa efe 'me re tšepa ka tieo ho ba molekane oa hau oa nako e telele.
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