Graphite e bonolo e ikutloa

Jwalo ka moetsi ya ka sehloohong wa Soft Felt Insulations Chaena, Semixlab's Soft Graphite Felt ke e 'ngoe ya disebediswa tsa motheo tsa carbon tse nang le mocheso o phahameng tse entsweng bakeng sa tlhahiso ya semiconductor. E entswe ka faeba ya carbon e hlwekileng haholo mme e hlwekisitswe ka graphitization e laolwang, Graphite Soft Felt ya rona e fana ka conductivity e tlase ya mocheso le ho latela melao ya mechini e hlokahalang ditshebetsong tse thata ka ho fetisisa tsa mocheso, ho kenyeletswa epitaxy, diffusion, annealing, le ion implantation. Semixlab soft insulation ke thepa ya bohlokwa haholo tshebetsong ya semiconductor thermal. Re labalabela ho fumana potso ya hao.

Lits'ebetsong tsa epitaxy tse kang MOCVD le LPE, tsamaiso e nepahetseng ea mocheso e susumetsa ka ho toba boitšoaro ba kholo ea kristale, ho nepahala ha doping, le sebopeho sa bokaholimo. Semixlab Soft Graphite Felt e sebetsa e le lera la ho thibela mocheso le sebetsang hantle ka har'a sebaka se chesang le likopano tsa bohlokoa tsa graphite tse potolohileng, e thusa ho fokotsa tahlehelo ea mocheso oa likokoana-hloko le ho tsitsisa kabo ea mocheso haufi le susceptor. Ka ho boloka tšimo ea mocheso e ts'oanang le ho thibela khatello ea thermomechanical pakeng tsa likarolo tsa graphite le quartz, felt e fokotsa seqha sa wafer, e fokotsa mapetso a manyane ka har'a hardware ea graphite, 'me e tšehetsa ho thehoa ha lera la epitaxial ka mokhoa o tsitsitseng. Sebopeho sa eona se bonolo, se hatelletsoeng se boetse se monya ho se lumellane ha katoloso ea mocheso, se atolosa bophelo ba ts'ebeletso ea likopano tsa libaka tse chesang ha se ntse se fokotsa tšebeliso ea matla a sistimi ka kakaretso.

Liforong tsa ho hasana ha mocheso o phahameng, Soft Graphite Felt e nolofalletsa tikoloho e tsitsitseng, e ka phetoang ea mocheso e hlokahalang bakeng sa ho kenya tšebetsong dopant le ho thehoa ha makunutu. Ho tsamaisa mocheso oa eona o tlase haholo le boemo ba eona bo tlase ba ho tsoa ha khase li etsa mokoallo o hloekileng, o laoloang oa ho thibela mocheso o sireletsang lipeipi tsa quartz le li-module tsa heater ho tloha ho feto-fetohang ha mocheso ka potlako. Sena se ntlafatsa ho tšoana ha mocheso nakong ea potoloho e telele ea ho hasana le ho fokotsa kotsi ea ho tšoha ha mocheso, ho thusa ho boloka ts'epo ea sebopi le ho ntlafatsa botsitso ba ho kenella ha dopant ho pholletsa le lihlopha tse felletseng tsa wafer. Bokhoni ba thepa ba ho mamella oxidizing le sepakapaka se sa sebetseng mochesong o phahameng bo netefatsa ho lumellana ho matla le mefuta e mengata ea lik'hemik'hale tsa ho hasana.

Semixlab Soft Graphite Felt e boetse e bapala karolo ea bohlokoa lits'ebetsong tsa ho kenya li-semiconductor, ho tloha ho kenya li-oven ka mokhoa o tloaelehileng ho isa ho kenya li-oven ka potlako (RTA) le mehato ea ho kenya li-carbonization mochesong o phahameng e sebelisoang litheknolojing tsa SiC le GaN wafer. Sebopeho sa eona se senyenyane sa carbon-carbon se boloka botsitso ba sebopeho ho feta 2000°C tlas'a maemo a sa sebetseng 'me se lula se tsitsitse ka lik'hemik'hale tikolohong ea haedrojene, naetrojene le vacuum. Sena se etsa hore feel e be e loketseng ho sireletsa lintho tse ka hare tsa oven, ho boloka ho tšoana ha mocheso, le ho thibela tšilafalo nakong ea ho kenya li-oven ka khatello ea maikutlo, mehato ea ho kenya tšebetsong, le lipotolohong tsa tokiso ea liphoso. Bonolo ba thepa bo e lumella ho sebetsa e le insulation le buffer ea mechini, ho thusa ho tsitsisa lisebelisoa tsa graphite ka ho potoloha ha mocheso khafetsa le ho netefatsa botsitso ba nako e telele ba boemo ba mocheso oa ho kenya li-oven.

Mekhoa ea ho kenya li-ion—haholo-holo tse hlokang ho hlaphoheloa ha mocheso ka mor'a ho kenya li-ion—e rua molemo haholo ho Soft Graphite Felt ka lebaka la tlhahiso ea eona ea likaroloana tse tlase haholo, bohloeki ba lik'hemik'hale, le ho hanyetsa ho ts'oaroa ke mocheso. Litšobotsi tsa ho thibela le ho sireletsa likarolo tsa graphite tsa ka hare nakong ea liphetoho tse matla tsa mocheso tse amanang le ho kenya matla a mangata le tatellano e latelang ea ho kenya li-ion. Ho se sebetse ha eona ka lik'hemik'hale ho sireletsa li-wafer le lisebelisoa ho tsoa tšilafatsong ea tšepe.

Ho pholletsa le lits'ebetso tsena tse 'ne tsa semiconductor, Semixlab's Soft Graphite Felt e fana ka tharollo e felletseng liphephetsong tsa mocheso, tsa mechini le tsa bohloeki tse amanang le tlhahiso ea sejoale-joale ea wafer. Bokhoni ba eona ba ho tsitsisa kabo ea mocheso, ho fokotsa kotsi ea tšilafalo, le ho sireletsa lisebelisoa tsa ontong le epitaxy bo etsa hore e be thepa ea bohlokoa bakeng sa taolo ea ts'ebetso e nepahetseng haholo. E entsoe ka litekanyetso tse thata tsa tlhoekiso 'me e fumaneha ka bongata, botenya le litekanyo tse ka fetoloang, Soft Graphite Felt ea rona e hokahane ka mokhoa o se nang sekoli le li-reactor tsa MOCVD, lionto tsa ho hasana, li-module tsa annealing, lisebelisoa tsa ho kenya li-ion, le litsamaiso tse ling tse tlase tsa mocheso o phahameng.