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Carbon Composite Crucible
The Carbon Carbon Composite Crucible (C/C Crucible) e tsoang Semixlab e etselitsoe maemo a boima ka ho fetesisa a kholo ea kristale ea semiconductor le ts'ebetso ea epitaxial. Semixlab's Carbon Carbon Composite Crucible e etselitsoe ho sebelisa li-high-modulus carbon fibers le matrices a carbon a hloekileng, ho finyella boemo ba ts'ebetso bo lokiselitsoeng bakeng sa kholo ea CZ silicon, silicon epitaxy, le SiC PVT sublimation kgolo. Ebang ke tsa masela a silicon a eketsang ho tšoana hoa ingot, baetsi ba li-epitaxy ba ntlafatsang ho tšoana ha deposition, kapa bahlahisi ba SiC ba nyolohelang ho li-boules tse kholoanyane, Carbon Carbon Composite Crucible e fana ka motheo o tiileng, o sa silafalang hantle bakeng sa tlhahiso ea semiconductor ea sejoale-joale.
Tlhaloso
Khōlong ea kristale ea silicon (ts'ebetso ea Czochralski), crucible ea C / C e sebelisoa haholo-holo e le ts'ehetso ea meralo le karolo ea ho tsitsisa mocheso e potolohileng fused-silika ka hare crucible. Katoloso ea eona e tlase ea mocheso, matla a phahameng a mochini, le ts'ebetso e ntle ea ho ts'oaroa ha mocheso li thusa ho boloka geometry ea crucible nakong ea lipotoloho tse telele tsa ho hula, ho fokotsa deformation ea quartz le ho nolofalletsa mocheso o ts'oanang haholoanyane. Sena se kenya letsoho ka kotloloho taolong e ntlafetseng ea ho kheloha, bophelo ba quartz crucible bo ka sebelisoang nako e telele, le ho ts'oana ho matlafalitsoeng ho ingot ea silicon e hlahisoang ke monocrystalline.
Ka har'a silicon le SiC epitaxy system, Carbon Carbon Composite Crucible e sebetsa e le sesebelisoa se tsitsitseng sa mocheso o phahameng le karolo ea taolo ea mocheso, e tšehetsang li-susceptors le meaho e ts'oereng liphaephe. Bokhoni ba motsoako oa ho boloka botsitso le ho se sebetse ha lik'hemik'hale sebakeng sa haedrojene, se chlorine, kapa se nang le vacuum e ngata bo bohlokoa bakeng sa ho fokotsa tšilafalo le ho fihlela tšebetso e lebelletsoeng ea mocheso. Sephetho ke botenya ba epitaxial layer bo sa feto-fetoheng, boleng bo holimo ba boemo ba lisebelisoa, le nako e ntlafalitsoeng ea ho sebetsa ka matla.
Bakeng sa kholo ea SiC monocrystal e sebelisa Physical Vapor Transport (PVT), C / C crucible e fetoha karolo ea mantlha ea kamore ea sublimation. Bokhoni bo sa tloaelehang ba mocheso o phahameng oa metsoako ea carbon-carbon-e fetang 2200 ° C sebakeng se se nang moea-e lumella crucible hore e mamelle nako e telele ea ho fokotsa mocheso ha e ntse e boloka mocheso o tsitsitseng oa bohlokoa bakeng sa phokotso ea bokooa ba SiC boules. Lintho tsa eona tse fokolang tse sa hloekang le lihlahisoa tse fokolang tsa likaroloana li fokotsa kotsi ea ho phatlalatsoa ha doping le micropipe ka boomo, ho tšehetsa tlhahiso ea likristale tsa boleng bo phahameng ba 4H le 6H SiC tse sebelisoang ho lisebelisoa tsa elektronike tse tsoetseng pele.
E etselitsoe lisebelisoa tsa semiconductor tsa moloko o latelang, Semixlab C / C crucible e nolofalletsa tlhahiso e phahameng, nako e telele ea bophelo ba lisebelisoa, le boleng bo phahameng ba kristale ho pholletsa le mekhoa e mengata ea tlhahiso. Semixlab's Carbon Carbon Composite Crucible e entsoe ka taolo e thata ea ts'ebetso, ho kenyeletsoa khetho ea selelekela sa bohloeki bo phahameng, densification ea mehato e mengata, le kalafo ea thepa e holimo. Sephetho ke crucible e nang le botsitso bo botle ba sebopeho, khanyetso e matlafalitsoeng ea oxidation, le phokotso e kholo ea tokollo ea likaroloana ha e bapisoa le mefuta e meng e tloaelehileng ea graphite. Sehlahisoa se seng le se seng se hlahlojoa ka nepo le netefatso ea mochini oa mocheso ho netefatsa ts'ebetso e ts'oanang ho li-drawer tsa CZ tsa indasteri, li-epitaxy reactor tse otlolohileng / tse tšekaletseng, le libono tsa SiC PVT.
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