Sesebelisoa sa sephaphatha sa quartz se hloekileng

Quartz Wafer Carrier (eo hape e tsejoang ka hore ke High Purity Quartz Wafer Boat) ke karolo ea bohlokoa lits'ebetsong tsa masela a semiconductor. E etselitsoe ho ts'oara le ho tsamaisa li-wafers tsa silicon ka mokhoa o sireletsehileng, e netefatsa tlhophiso e nepahetseng ea li-wafer nakong ea phallo, oxidation, LPCVD, ALD, annealing le lits'ebetso tsa ho hloekisa.

Kaho ea eona e hloekileng ea quartz e thibela tšilafalo le ho boloka botšepehi ba li-wafers, e nolofalletsang chai e tsitsitseng le ts'ebetso e nepahetseng libakeng tse hloekileng tsa kamore.

Thepa & Thepa ea 'Mele

● Boitsebiso: 99.99% high-purity synthetic fused quartz

Lintho tsa Bohlokoa tsa 'Mele le Liparamente:

● Bohloeki: ≥ 4N (99.99%) - e fokotsa litšila tsa tšepe le likaroloana

● Thermal Resistance: E tsitsitse ho fihla ho 1,050 ° C - 1,200 ° C ts'ebetsong e tsoelang pele

● Thermal Shock Resistance: Mocheso o tlase oa katoloso ea mocheso (0.55×10⁻⁶/°C)

e tiisa ho tšoarella liphetohong tse potlakileng tsa mocheso

● Ho tsitsa ha lik'hemik'hale: Ho hanyetsa ka mokhoa o babatsehang ho likhase tsa acidic le alkaline process

● Ho nepahala ha Dimensional: Mamello ka hare ho ± 0.05 mm bakeng sa sebaka se lekanang sa wafer

● Surface Finish: Libaka tse bentšitsoeng tse boreleli (Ra ≤ 0.2 μm) ho thibela mengoallo ea liphaphatha.

● Ho pepeseha: Phetiso e phahameng ea UV le IR bakeng sa ho shebella tšebetso ea optical

Likopo tsa High-Purity Quartz Wafer Carriers Ho pholletsa le Mekhoa

Ho feto-fetoha ho fapaneng ha lipalangoang tsa li-quartz tsa quartz tsa bohloeki bo phahameng ho atoloha ho pholletsa le mefuta e mengata ea mehato ea ho etsa li-semiconductor. Moralo oa bona o matla le bots'epehi ba thepa bo netefatsa ts'ebetso e nepahetseng esita le libakeng tse thata ka ho fetisisa:

● Diffusion & Oxidation Furnaces: Lits'ebetsong tsena tse mahlonoko tsa mocheso, lipalangoang tsa rona tsa quartz wafer boat li fana ka ts'ehetso e tsitsitseng, ntle le tšoaetso bakeng sa li-wafers. Botsitso ba bona bo phahameng ba mocheso le katoloso e tlase ea mocheso li thibela khatello ea maikutlo holim'a li-wafers, ho netefatsa kholo ea filimi e ts'oanang le lintlha tsa doping tsa bohlokoa bakeng sa ts'ebetso ea sesebelisoa.

● Chemical Vapor Deposition (CVD): Nakong ea CVD, lifilimi tse tšesaane li kenngoa holim'a li-wafers. Bajari ba rona ba quartz ba boloka bots'epehi ba bona ba sebopeho le bohloeki leha ho na le likhase tse sebetsang hantle le mocheso o phahameng, ho thibela tlhahiso ea likaroloana le ho netefatsa ho beoa ha filimi ea boleng bo holimo.

●Annealing: Annealing ka mor'a ho kenngoa ho hloka taolo e nepahetseng ea mocheso. Bajari ba quartz ba netefatsa kabo e tšoanang ea mocheso ho pholletsa le sephaphatha, ba khothaletsa tokiso ea kristale le ho kenya ts'ebetso ea dopant ntle le ho hlahisa litšila.

● Wet Etching & Cleaning: Leha ka tloaelo li sebelisoa lits'ebetsong tse omeletseng, likepe tsa quartz li boetse li sebelisoa liteisheneng tse ling tse metsi moo ho kenella ha lik'hemik'hale ho mefuta e mengata ea acid (ntle le HF) ho leng molemo bakeng sa ho ts'oara li-wafers nakong ea ho hloekisa kapa mehato e itseng ea etching.

●Ion Implantation: Le hoja e sa amehe ka ho toba ho kenngoeng ka boeona, li-quartz carriers li sebelisetsoa ho kenya le ho laolla li-wafers ka har'a implanter, ho netefatsa ho tšoaroa ka mokhoa o sireletsehileng.

● Photolithography: Bakeng sa ho tsamaisa le ho sebetsana le li-wafers pakeng tsa mehato e fapaneng ea photolithography (mohlala, ho roala, ho pepeseha, nts'etsopele), bajari ba rona ba fana ka sethala se tsitsitseng le se hloekileng.

Sesebelisoa se seng le se seng se phahamisa thepa e ikhethang ea quartz ho boloka maemo a holimo a bohloeki, taolo ea mocheso, le botsitso ba mochini bo hlokahalang bakeng sa ho hlahisa lisebelisoa tse tsoetseng pele tsa semiconductor.

Melemo ea Tšebeletso ea Semixlab

Ho Semixlab, re Moetsi ea tšepahalang oa Quartz Wafer Carrier ea tšepahalang ea nang le boiphihlelo bo pharaletseng ba likarolo tsa ts'ebetso ea semiconductor. Re fana ka:

● Moralo o Tloaelehileng & Tlhahiso - Litekanyo tse hlophisitsoeng, linomoro tsa slot, le meralo ea lipalangoang ho tsamaisana le boholo bo ikhethileng ba liphaephe (4", 6, 8, 12") le mefuta ea sebōpi.

● Therisano ea Theknoloji - Litlhahiso tse ikhethileng mabapi le ts'ebetso ea ho ntlafatsa chai le ho fokotsa nako.

● Prototype & Sample Service - Potlako ea prototyping le tlhahlobo ea sampole bakeng sa merero e tšoanelehang.

● Taolo ea Boleng ka Thata - Tlhahiso e netefalitsoeng ea ISO le tlhahlobo ea 100% pele e romelloa.