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Ho Hloeka ho Holimo ho Felt Soft
Semixlab's High Purity Soft Felt e entsoe ka ho khetheha bakeng sa ts'ebeliso e hlokang mocheso o phahameng oa tšimo tlhahisong ea semiconductor. E hlahisitsoe ho tsoa ho li-precursor tse thehiloeng ho carbon tsa boleng bo holimo 'me e hloekisitsoe ka ts'ebetso e tsoetseng pele, thepa ena e bonolo ea felt e fana ka maemo a litšila a tlase haholo, ho thibela mocheso o motle, le ho ikamahanya le maemo ho ikhethang ha sebopeho. Sebopeho sa eona se tenyetsehang se lumella ho kenngoa ka nepo ka har'a meralo e rarahaneng ea tšimo ea mocheso, ho nolofalletsa maemo a mocheso a ntlafalitsoeng le maemo a tsitsitseng a ts'ebetso. Re labalabela potso ea hau.
Tlhaloso
Ke hobane'ng ha bohloeki bo le bohlokoa masimong a mocheso? Ha ho hlahisoa moloko oa boraro?
Li-semiconductor (SiC/GaN), li-insulation felt tsa setso tse nang le molora o mongata (ho feta 500ppm) li atisa ho ntša litšila tsa tšepe mochesong o fetang 1600°C. Sena se baka liphoso tsa lattice 'me se fokotsa chai ea wafer.
Felt e bonolo ea Semixlab e feta ts'ebetsong ea rona e ikhethang ea tlhoekiso ea lik'hemik'hale ea mocheso o phahameng, e leng se etsang hore boemo bohle ba litšila bo theohele tlase ho 5ppm. Sena ha se netefatse feela tikoloho e hloekileng ea kholo empa hape se fana ka botsitso bo feteletseng ba mocheso bo hlokahalang bakeng sa kholo ea kristale ea potoloho e telele.
Semixlab Edge
Re feta mofani feela - re molekane oa hau oa sebaka sa mocheso o phahameng. Re thehiloe ke bafuputsi ba CAS, re ipabola ho kopanyeng litharollo tsa ho thibela mocheso le lipeipi tsa CVD (TaC/SiC). Ha re fane feela ka felt ea ho thibela mocheso; re ntlafatsa tšimo ea hau e felletseng ea mocheso re sebelisa li-heater tsa graphite le TaC e nang le masoba ho fokotsa tšebeliso ea matla. Machining ea rona ea CNC ea 5-axis e ka hare e nolofalletsa lisebelisoa tse ikhethileng, tse kopantsoeng esale pele tse lumellanang hantle le moralo oa hau oa setofo ka liphoso tsa lefela.
songolo
| Matlo | Felt e Thehiloeng ho PAN ea Premium | Felt e Thehiloeng ho Viscose e Ikhethang ka ho Fetisisa |
| Litšila ka Kakaretso | ≤5 ppm (GDMS) | P10 ppm |
| Litaba tsa Carbon | ≥99.99% | ≥99.95% |
| Tekanyo ea bongata | 0.10 - 0.15 g/cm³ | 0.08 - 0.12 g/cm³ |
| Mocheso o futhumatsang. (@1000°C) | 0.12 - 0.15 W/m·K | 0.09 - 0.13 W/m·K |
| Boemo ba tšebeletso ea Max. | 2800°C (Sesebelisoa se sa Sebetseng/Se nang Letlalo) | 2600°C (Sesebelisoa se sa Sebetseng/Se nang Letlalo) |
| Botenya bo Tloaelehileng | 3mm / 5mm / 10mm / 20mm | 3mm / 5mm / 10mm / 20mm |
dikopo
Lisebelisoa tse Bohlokoa
Ts'ebetso e netefalitsoeng:
E entsoe bakeng sa kholo ea SiC le Silicon (PVT/CZ), felt ea rona e sebetsa e le setsibi sa mocheso ho thibela ho falla ha kristale. Ho MOCVD/Epitaxy (e tsamaellanang le Aixtron, NuFlare), e lula e sa sebetse tlas'a phallo ea H2/NH3 e senyang, e thibela ho hasana ha litšila. Bakeng sa Fiber Drawing le Sapphire Sintering, thepa ea eona ea ho tlosa khase e sa tsoe ka har'a gas e netefatsa botšepehi ba vacuum le ho thibela tahlehelo ea chai.
Molemo oa Khatello
Melemo ea mantlha
Bohloeki bo phahameng haholo (<5ppm), bo lekoa ke GDMS. Al, B, Fe le litšila tse ling tsa bohlokoa tse laoloang ka thata ho qoba tšilafalo e tšelang kholong ea epitaxial.
Thermal insulation e ntle haholo: ho tsamaisa mocheso ka tlase ho 0.12 W/m·K ho 1000°C, ho fokotsa tahlehelo ea mocheso le ho laola gradient ea mocheso ka hare ho ±1°C.
Ho lahla ha likaroloana ho tlase: fiber e ntlafalitsoeng le kalafo ea bokaholimo li fokotsa lerōle lipotolohong tsa vacuum, li sireletsa li-susceptor tsa graphite tsa CVD (TaC/SiC) le li-heater.
Ho tenyetseha le ho lekana ho hoholo: e bonolo ebile e ka hatelloa bakeng sa ho phuthela ka mokhoa o se nang sekoli ka 360° holim'a lionto tse rarahaneng, e thibela ho lutla ha mocheso ho tsoa ho insulation e thata.
LBH
Lipotso Tse Botsoang Khafetsa Tse Lokisitsoeng
P: Semixlab soft felt e ntlafatsa bophelo ba tšebeletso ea li-heater tsa graphite joang?
K: Ka ho fana ka thebe e tsitsitseng haholoanyane ea mocheso, feel ea rona e bonolo e fokotsa mojaro oa matla o hlokoang ke hitara ho boloka mocheso o reriloeng, ka hona e fokotsa lebelo la sublimation ea khabone le oxidation ea likarolo tsa mocheso tsa graphite.
P: Na fel ea hao e ka sebelisoa libakeng tse nang le khase e phallang haholo?
K: E. Bakeng sa lits'ebetso tse nang le lebelo le phahameng la khase (joalo ka MOCVD), re khothaletsa felt ea rona e thehiloeng ho PAN e nang le bongata bo boholo kapa tharollo e kopantsoeng e shebaneng le foil ea graphite, e thibelang khoholeho ea faeba le ho netefatsa hore ha ho na tšilafalo ea likaroloana.
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