Sesepa se entsoeng ka sic se koahetsoeng ka mokhoa o ikhethileng

SiC coated wafer susceptor ke karolo ea bohlokoa tlhahisong ea semiconductor, haholo ts'ebetsong ea kholo ea epitaxial joalo ka MOCVD, PECVD, le CVD. E sebetsa e le sejari se tsitsitseng se ts'ehetsang li-wafers tlas'a maemo a mocheso o phahameng, a senyang le a se nang metsi, ho netefatsa hore mocheso o fetisoa ka mokhoa o ts'oanang le ts'ebetso e se nang tšoaetso. Ka ho sebelisa lesela la CVD SiC holim'a sesebelisoa se phahameng sa graphite susceptor, susceptor e kopanya ts'ebetso e ntle ea mocheso le khanyetso e phahameng ea lik'hemik'hale-e etsa hore e be ea bohlokoa haholo bakeng sa tlhahiso ea semiconductor ea moloko o latelang.

Sebopeho sa Thepa & Thepa ea 'Mele

The Customized SiC Wafer Susceptor ho tloha Semixlab e etsoa ka lisebelisoa tse peli tsa mantlha:

CVD SiC Coating

●Bothata bo ikhethang (Mohs 9+) le ho tšoarella

● Bohloeki bo phahameng (> 99.999%) ho fokotsa tlhahiso ea likaroloana

●Ho se sebetse hantle ha lik'hemik'hale khahlanong le likhase tse senyang (HCl, NH₃, H₂, joalo-joalo)

●Ho tsitsa ha mocheso ho fihla ho **1600°C

● Dense, junifomo barbota botenya bakeng sa bophelo bo bolelele ba tšebeletso

Motlatsi oa Graphite ea Phahameng ka ho Fetisisa

● High thermal conductivity bakeng sa kabo e tsitsitseng ea mocheso

● Sebopeho se bobebe ha se bapisoa le li-ceramics tsa monolithic

● E entsoe ka mokhoa o nepahetseng ho fihlela litlhoko tse tiileng tsa sephaphatha

● Matla a tsitsitseng a mochine tlas'a libaesekele tse futhumetseng

Lintho tsena tse kopantsoeng li etsa hore SiC e koahetsoeng e khone ho hanyetsa mocheso oa mocheso, khoholeho ea plasma, le tšilafalo ea likaroloana, ho netefatsa boleng bo tsitsitseng bo tsitsitseng.

Likopo ho Semiconductor Processing

SiC coated wafer susceptor e sebelisoa haholo lits'ebetsong tse tsoetseng pele tsa semiconductor, haholo ho:

● Epitaxial Wafer Growth (Epi Wafer Manufacturing) : E netefatsa ho futhumala ha mokhoa o ts'oanang le ho fokotsa ho inama ha li-wafer nakong ea ho beoa ha epitaxial ea SiC, GaN, GaAs, le li-semiconductors tse ling.

● Mekhoa ea MOCVD & CVD : E fana ka sebaka se tsitsitseng sa lik'hemik'hale, se hloekileng haholo bakeng sa ho beha filimi e tšesaane e tšoanang.

● LED & Power Semiconductor Fabrication : E ts'ehetsa liphaephe tse khanyang tsa LED le lisebelisoa tse pharalletseng tsa bandgap ka likamoreng tsa kholo ea mocheso o phahameng.

● Ho Aneha le ho Phatlalatsa ha Mocheso o Holimo : E boloka botsitso ba sebopeho tlas'a mekoloko ea mocheso e pheta-phetoang ha e ntse e thibela tšilafalo.

Ka ho ntlafatsa phetisetso ea mocheso le ho boloka bots'epehi ba bokaholimo, mokelikeli o susumetsa ka kotloloho tlhahiso ea liphaephe, ho ts'oana, le phokotso ea sekoli - e etsa hore e be karolo ea bohlokoa meleng ea epitaxial process.

Melemo ea Tlholisano ea Semixlab

Ho Semixlab, re fana ka likarolo tse fetang tse tloaelehileng - re fana ka litharollo tse ikhethileng tse fihlelang litlhoko tse batloang ke baetsi ba li-semiconductor:

Tsebo ea ho Itloaetsa

Ho rala le ho etsa li-susceptors ka boholo bo fapaneng, libopeho, botenya ba ho roala, le lijeometri ho tsamaisana le li-reactor tse khethehileng tsa MOCVD/CVD.

SiC Coated Wafer Holder

Silicon Carbide e koahetsoeng ka Wafer Susceptor

Tekheniki Consultation

Sehlopha sa litsebi tsa boenjiniere se fana ka likhothaletso tse ikhethileng tsa ts'ebetso ho ntlafatsa chai ea li-wafer le ho lelefatsa bophelo ba mohanyetsi.

Teko e Feteletseng ea Boemo

Lihlahisoa tsohle li etsa liteko tse matla bakeng sa botsitso ba mocheso, khanyetso ea lik'hemik'hale, le ho tšoarella ha mochini tlas'a maemo a ts'ebetso ea 'nete.