8-inch TaC Coated Air Float Tray bakeng sa SiC Epitaxy

8-inch TaC Coated Air Float Tray ke karolo ea bohlokoa ts'ebetsong ea li-wafer SiC epitaxy, e etselitsoeng ho tšehetsa le ho tsamaisa liphaphatha tsa silicon carbide nakong ea kholo ea epitaxial. Sebakeng se boima sa libono tsa SiC epitaxy, literei li tlameha ho mamella mocheso o phahameng haholo, likhase tse senyang, le linako tse telele tsa ho sebetsa. Ka ho kopanya CVD TaC coating le li-graphite substrates tse phahameng haholo, terei ena e phaphametseng moea e tiisa ho tšoarella ho hoholo, botsitso ba mocheso, le ts'ebetso e ts'oanang - e etsa hore e be sesebelisoa sa bohlokoa tlhahisong e phahameng ea SiC.

Ⅰ. Sebopeho sa Thepa le Lintho tsa 'Mele

TaC Coated Air Float Tray e kopanya lisebelisoa tse tsoetseng pele ho fihlela matla a mochini le ho hanyetsa lik'hemik'hale tse hlokahalang ho semiconductor epitaxy:

●Substrate Material: Mokelikeli oa graphite o hloekileng haholo (lintho tse sa hloekang haholo-holo, mocheso o phahameng oa mocheso)

● Lera la Tšireletso ea Moaho: CVD TaC Coating (Tantalum Carbide) e sebelisoa ka mouoane oa lik'hemik'hale bakeng sa ho roala ho feteletseng le ho hanyetsa kutu.

Lintho tsa Bohlokoa tsa 'Mele:

TaC Coating Purity: ≥ 99.99%

Ho thatafala (HK): ~ 2000 HK

Sebaka se qhibilihang: ~3,880 °C

Thermal Conductivity: E ntle haholo, e netefatsa hore ho futhumatsoa ka mokhoa o ts'oanang

Resistance to Halogen Corrosion: Ho tsitsisa ho ikhethang tikolohong ea epitaxial e ruileng ea chlorine le fluorine.

Boima ba Graphite Base: ~1.85–1.95 g/cm³

Mocheso o sebetsang: Ho fihla ho 2,000 °C libakeng tse laoloang

Mehaho ena e netefatsa hore 8-inch TaC Coated Tray e khona ho mamella mathateng a malelele a epitaxial ha e ntse e fokotsa tlhahiso ea likaroloana le tšilafalo ea wafer.

Ⅱ. Mesebetsi ea Bohlokoa ho SiC Epitaxy

8-inch TaC Coated Tray ea rona e bapala karolo ea bohlokoa ts'ebetsong ea semiconductor SiC epitaxy ka ho etsa mesebetsi e mengata ea bohlokoa:

● Kabo ea Mocheso o Tšoanang: Ts'ebetso e phahameng ea mocheso oa graphite substrate le ho roala ha TaC ho netefatsa phetisetso e ntle ea mocheso le mocheso o ts'oanang ho liphaephe tsohle tsa SiC. Ho tšoana hona ho bohlokoa bakeng sa ho fihlela botenya ba epitaxial layer le morphology.

● Tšireletso Khahlanong le Etching le Tšilafalo: Thepa ea TaC e sa sebetseng ka lik'hemik'hale e thibela hantle karoloana ea graphite ho sebetsana le likhase tse tlang pele ho eona, tse ka bakang etching le ho hlahisa tšilafalo ea likaroloana. Tšireletso ena ke senotlolo sa ho boloka tikoloho e hloekile ea ts'ebetso le ho netefatsa hore ho na le lihlahisoa tse ngata tsa sephaphatha.

● Nako e Atolositsoeng ea Bophelo: Thepa e tšoarellang ea TaC e eketsa haholo nako ea bophelo ea susceptor ka ho sireletsa graphite hore e se ke ea senyeha le ho senyeha ha lik'hemik'hale, ho fokotsa khafetsa ea ho nchafatsa le ho theola litšenyehelo tsa ts'ebetso.

●Moetso oa Phallo ea Moea: Moralo o ikhethileng oa ho phaphamala ha moea o fokotsa ho kopana ha 'mele pakeng tsa susceptor le phaposi, ho fokotsa likhohlano le ho thibela ho hlahisa likaroloana tse ka silafatsang liphaphatha. Moralo ona ke ka lebaka leo o tsejoang hape e le TaC Coated Air Float Tray.

Melemo ea Semixlab

Ho Semixlab, re fetela ka nqane ho lihlahisoa tse tloaelehileng ho fana ka litharollo tse lumellanang le litlhoko tse ikhethileng tsa ts'ebetso ea hau ea epitaxy.

●Ho ikhethela: Re fana ka likhetho tse felletseng tsa ho itlhophisa, ho kenyelletsa le libopeho tse fapaneng, boholo le botenya ba ho roala, ho tsamaisana hantle le litlhaloso tsa hau tsa reactor le litlhoko tsa ts'ebetso.

● Therisano ea Setsebi: Sehlopha sa rona sa baenjiniere ba nang le boiphihlelo se fana ka tšehetso e tebileng ea tekheniki le therisano, e u thusa ho ntlafatsa ts'ebetso ea hau le ho kopanya lihlahisoa tsa rona ntle le moroallo.

● Teko e Matla ea Pele ho Thomello: Poleite e 'ngoe le e' ngoe ea TaC Coated e etsa tlhahlobo e feteletseng ea boemo pele e ka romeloa. Re netefatsa ts'ebetso ea eona le botšepehi tlas'a mocheso o phahameng le libakeng tse nang le lik'hemik'hale tse mabifi ho netefatsa hore e tla finyella litlhoko tsa hau tse boima tsa ts'ebetso.