6 inch TaC e koahetsoeng ka heater ea graphite

Semixlab's 6-inch TaC-coated graphite heaters hangata e sebelisa substrate ea graphite e hatelitsoeng ka isostatically kapa e phahameng haholo. Potoloho e futhumatsang (hangata e le khoele e kholo kapa mokhoa o chitja) o etsoa ka mochine 'me lesela le sireletsang la tantalum carbide (TaC) le behoa holim'a metsi kapa libakeng tsa bohlokoa. Lifuthumatsi tsena li sebelisa mocheso o thibelang ho futhumala ho fana ka mohloli o ts'oanang oa mocheso o ts'epahalang ka ho toba bakeng sa liphaphatha tse nyane (mohlala, 6" / 150 mm) kapa li-susceptors. TaC e koahela haholo e ntlafatsa bophelo ba likaroloana le bohloeki libakeng tse phahameng tsa mocheso, tse senyang.

Ⅰ. Likarolo ho Mekhoa e Meholo ea Semiconductor

1. Epitaxy (SiC, GaN, le Si Layers)

Ts'ebetsong ea kholo ea epitaxial, heater ea graphite ea 6 inch TaC ke ntho ea mantlha ea mocheso e ikarabellang bakeng sa ho fumana mocheso o tsitsitseng le o ts'oanang oa substrate. Taolo e nepahetseng ea mocheso e bohlokoa bakeng sa ho boloka botenya ba lera, boleng ba kristale, le phokotso ea sekoli ho SiC, GaN, le Si epitaxy. Thepa ea TaC e sireletsa karoloana ea graphite ho likhase tse nang le chlorinated le hydrogen-based, tse senyang haholo mochesong o phahameng. Sena se tiisa bophelo bo bolelele ba tšebeletso ha se ntse se thibela tšilafalo le ho lokolloa ha likaroloana ka kamoreng.

2. Kemiso ea Mouoane oa Lik'hemik'hale (CVD / MOCVD / PECVD)

Litsamaisong tsa CVD le MOCVD, liheater li bohlokoa bakeng sa ho boloka tikoloho e laoloang bakeng sa kholo ea lifilimi tse tšesaane. Thepa ea TaC e fana ka khanyetso ea khoholeho ea plasma le ho se sebetse ha lik'hemik'hale, ho etsa hore hitara e loketse tikoloho ea PECVD le LPCVD moo ho sebelisoang mefuta ea fluorine le chlorine. Essivity ea eona e phahameng le conductivity ea mocheso e netefatsa hore ho futhumala ka potlako le litekanyetso tsa ho pholisa, ho matlafatsa ts'ebetso ea botsitso.

3. Phatlalatso le Mekhoa ea ho Aneha

Nakong ea phallo ea mocheso o phahameng oa mocheso le ho kenngoa ha dopant ka mor'a ho kenngoa, ho futhumatsa ka mokhoa o ts'oanang ho bohlokoa bakeng sa ho fumana ts'ebetso e nepahetseng ea dopant le profaele ea phallo. Sefuthumatsi sa graphite se koahetsoeng ke TaC se fokotsa khatello ea mocheso le ho netefatsa tikoloho e laoloang ea liphaphatha. Ho hanyetsa ha eona ho oxidation le ho palama baesekele e futhumatsang ho ntlafatsa ho ts'epahala le ho pheta-pheta ho pholletsa le lits'ebetso tse ngata.

4. Etching le Surface Treatment

Libakeng tse omeletseng, licheso tse koahetsoeng ka TaC li sebetsa e le sethala sa ho futhumatsa sa substrate se mamellang maemo a plasma a fluorine le chlorine. Ho roala ho sireletsa setsi sa graphite ho tloha khoholeho ea mobu le ho lokolloa ha likaroloana, ha ho ntse ho boloka botsitso ba mocheso bakeng sa sebaka sa sekhukhu. Sena se etsa hore ho be le ho nepahala ho ntlafetseng le ho fokotsa litšila tsa kamore.

Ⅱ. Lintho tsa Bohlokoa le Mehaho:

Graphite Susceptor: Ts'ebetso e ntle ea motlakase, conductivity e phahameng ea mocheso, machinability e matla, le mocheso o tlase oa mocheso (o rata ho phahama ka sekhahla ha mocheso).

Sebopeho sa Potoloho se Chesang: Mehele / li-spirals tse bohareng li sebelisetsoa ho finyella mocheso oa mocheso oa mahlaseli; meralo ea libaka tse ngata e ka sebelisoa ho lokisa li-gradients/ho kheloha ha mocheso hantle.

TaC (Tantalum Carbide) Coating: Sebaka se phahameng sa ho qhibiliha (≈3880 ° C), boima bo phahameng, lik'hemik'hale le ho hanyetsa plasma, le motlakase o babatsehang oa motlakase. E le lera le sireletsang, e fokotsa ts'ebetso ea lik'hemik'hale ka likhase tsa ts'ebetso, e fokotsa ho tsoa ha likaroloana, 'me e lelefatsa bophelo.

Khokahano ea Sehokelo / Ho Adhesion: Ho khomarela pakeng tsa TaC le graphite, botenya ba ho roala, le taolo ea khatello ea maikutlo ke lintlha tsa bohlokoa tsa taolo ea ts'ebetso, tse amang bophelo le ho ts'epahala.

Ⅲ . Ts'ebetso ea Liphephetso le tharollo

Ha o sebelisa heater ea graphite ea 6 inch TaC e kentsoeng lits'ebetsong tsa semiconductor, ho na le lintlha tse 'maloa tsa boenjiniere tse hlokang tlhokomelo e hlokolosi. Ho sebetsana le litaba tsena ka nepo ho netefatsa ts'ebetso e tsitsitseng, bophelo bo bolelele ba ts'ebeletso, le boleng bo tsitsitseng ba li-wafer.

1. Ho Koaela ho Kopanya le Kotsi ea Peeling

Bothata:

Haeba pente ea TaC e sa tlamahane ka matla le motheo oa graphite, e ka ebola kapa ea petsoha ka mor'a ho futhumatsa le ho pholisa khafetsa. Sena se ka hlahisa likaroloana le ho fokotsa bophelo ba heater.

tharollo:

● Etsa kopo e tsoetseng pele ea holim'a holim'a metsi pele u koahela (etching le ho hloekisa ho eketsa matla a ho kopanya).

● Sebelisa optimized CVD parameters ho finyella lera le teteaneng le le ts'oanang la TaC.

● Etsa tlhahlobo ea ho khomarela nakong ea tlhahlobo ea boleng ho qoba liphoso tse patehileng.

2. Thermal Khatello ea mali le Cracking

Bothata:

Ho fetoha ha mocheso ka potlako nakong ea mekhoa e kang RTP (Rapid Thermal Processing) ho ka baka khatello pakeng tsa graphite le lera la TaC, e leng se lebisang ho mapetsong kapa ho senyeha.

tharollo:

● Rala hitara e nang le litšobotsi tsa ho atolosa mocheso pakeng tsa graphite le TaC.

● Sebelisa lithapo tse laoloang tsa ho futhumatsa / tse tsidifatsang ho fokotsa mocheso oa mocheso.

● Sebelisa graphite e hloekileng haholo, e nang le lijo-thollo tse fokolang tse nang le katoloso e tlaase ea mocheso bakeng sa substrate.

3. Uniform Heating Across Wafer

Bothata:

Haeba setsi sa TaC kapa setsi sa graphite se na le botenya bo sa lekaneng, se ka baka libaka tse chesang kapa libaka tse batang, tse lebisang ho bokooa ba liphaphatha.

tharollo:

● Sebelisa machining e nepahetseng ho substrate ea graphite e nang le mamello e tiileng ea li-dimensional.

● Etsa bonnete ba hore ho apara ho tšoana le ho laola CVD e tsoetseng pele.

● Sebelisa 'mapa oa mocheso nakong ea taolo ea boleng ho netefatsa kabo e tsitsitseng ea mocheso.

4. Tšebeletso ea Bophelo bohle le Cycle ea Phetoho

Bothata:

Ha nako e ntse e ea, esita le licheso tse molemo ka ho fetisisa li senyeha tlas'a maemo a feteletseng, a ka bakang nako e sa lebelloang ea ho theoha.

tharollo:

● Theha kemiso ea ho chencha e itšetlehileng ka lihora tsa ts'ebetso le k'hemistri ea khase.

● Lula u le teng ka lihitara ho fokotsa tšitiso ea tlhahiso.

● Sebetsa le mofani oa thepa ho etsa tlhahlobo ea bophelo bohle le tlhahlobo ea ho hlōleha bakeng sa ntlafatso e tsoelang pele.

Ha e le hantle, thepa le sebopeho sa heater ea graphite ea 6 inch TaC e koahetsoeng ka graphite e tiisa botsitso ba mocheso o phahameng, ho hanyetsa kutu, le botšepehi ba sebopeho, e leng se etsang hore e be karolo ea bohlokoa bakeng sa epitaxy e tsoetseng pele, CVD, le mekhoa ea ho hasana. Ikutloe u lokolohile ho ikopanya le rona bakeng sa litharollo tse ling tse ikhethileng.