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Siling ea ho Koahela ea CVD SiC
Jwalo ka moetsi ya ka sehloohong wa China wa dikarolo tsa CVD SiC Coating Ceiling, CVD SiC Coating Ceiling e tswang Semixlab ke karolo ya kamore e sebetsang hantle e etseditsweng ditikoloho tse tswetseng pele tsa tlhahiso ya semiconductor, ho kenyeletswa le mekgwa ya ho bea di-epitaxy (EPI) le CVD. Ka ho sebedisa theknoloji ya ho bea di-silicon carbide ya khemikhale e hlwekileng haholo, karolo ena ya siling e fana ka kganyetso e ikgethang ho dithempereichara tse phahameng, dikhemistri tsa tshebetso e senyang, le ho pepesehela plasma ha ka nako e ts'oanang e boloka maemo a tshilafatso ya dikarolwana le tshepe a tlase haholo. E entswe ho tshehetsa maemo a tsitsitseng a kamore le ho pheta-pheta ha tshebetso nako e telele, CVD SiC Coating Ceiling e bapala karolo ya bohlokwa ho sireletseng boleng ba kgolo ya epitaxial, ho tshwana ha ho bea di-deposition, le nako ya ho sebetsa ha disebediswa. Re lebeletse potso ya hao ka tjantjello.
Tlhaloso
Mekhoeng ea semiconductor epitaxy (EPI), haholo-holo silicon epitaxy le silicon carbide epitaxy, likarolo tsa siling li lula li pepesetsoa potoloho e feteletseng ea mocheso, tikoloho ea hydrogen e hloekileng haholo, le lintho tse ka pele tse nang le chlorine. Liaparo tsa CVD SiC li fana ka ho se sebetse hantle ha lik'hemik'hale le botsitso ba mocheso, li arola ka katleho meaho ea kamore ho tsoa likhase tse senyang tsa ts'ebetso ha li ntse li fokotsa tlhahiso ea likaroloana. Sebopeho sa tsona se teteaneng, se hloekileng haholo se thibela tšilafalo ea tšepe 'me se thibela ho senyeha ha liaparo nakong ea nako e telele ea tlhahiso, li tšehetsa ka kotloloho kholo ea lera la epitaxial e tšoanang, ho kenyelletsoa ha dopant e tsitsitseng, le botenya bo tlase ba sekoli.
Mekhoa ea ho kenya CVD joalo ka LPCVD le PECVD, siling ea kamore e bapala karolo ea bohlokoa ho bolokeng tikoloho e tsitsitseng ea kamore nakong ea ho kenya khafetsa le ho hloekisa. Haeba ho se joalo, lihlahisoa tse tsamaeang le ts'ebetso le ho kenya filimi holim'a likamore li ka ama haholo ho bapisa lisebelisoa le ho pheta-pheta ha ts'ebetso. Liaparo tsa CVD SiC li bontša ho khomarela ho tlase lifiliming tse bolokiloeng le mamello e ntle ea lik'hemik'hale tsa ho hloekisa tse thehiloeng ho fluorine le chlorine, e leng se nolofalletsang ho hloekisa ka mokhoa o atlehang ka har'a sebaka le ho fokotsa ho arohana. Ka lebaka leo, ho tšoana ha botenya ba filimi, ho pheta-pheta ha ts'ebetso, le nako ea ho sebetsa ha lisebelisoa li ntlafalitsoe haholo, haholo-holo libakeng tsa tlhahiso tse nang le bongata bo phahameng.
Siling ea Semixlab ea CVD SiC Coating e kopanya ho ba le sekoaelo se phahameng, ho ba le bokaholimo bo ka laoloang, le ho khomarela ka matla substrate. Ho lumellana ha katoloso ea mocheso pakeng tsa sekoahelo sa SiC le substrate ea graphite ho netefatsa botšepehi ba mechini tlas'a potoloho e potlakileng ea mocheso, ho fokotsa kotsi ea ho petsoha kapa ho arohana.
Ha ho bapisoa le thepa ea setso ea quartz kapa oxide, CVD SiC e bonts'a mamello e phahameng ho plasma etching le hydrogen etching, e atolosa ka kotloloho linako tsa tlhokomelo ea thibelo le ho fokotsa litšenyehelo tsohle tsa beng. Siling ena ea CVD SiC Coating e entsoe bakeng sa ho lumellana le lisebelisoa tsa mantlha tsa ts'ebetso ea semiconductor, e netefatsang botsitso lipakeng tsa likamore le lisebelisoa tsohle - tsa bohlokoa bakeng sa li-node tse tsoetseng pele tsa ts'ebetso le mela ea tlhahiso ea lisebelisoa tse ngata.
Jwalo ka khamphani e etellang pele theknoloji tsamaisong ya China ya semiconductor epitaxial, Semeixab e ikemiseditse ho fa indasteri ya semiconductor mahlale a tswetseng pele le ditharollo tsa dihlahiswa tsa CVD SiC Coating Ceiling tse ikgethileng. Re ka bapisa mesebetsi le mehlala e tsamaellanang ya dihlahiswa tsa rona le ditlhoko tsa hao tse ikgethang tsa dihlahiswa, ho netefatsa tshebetso e boreleli ya tlhahiso ya khamphani ya hao. Semeixab e labalabela ka tieo ho ba molekane wa hao wa nako e telele Chaena.
songolo
| Lintho tsa motheo tsa 'mele tsa CVD SiC coating | |
| Property | Boleng bo tloaelehileng |
| Sebopeho sa Crystal | FCC β phase polycrystalline, haholo-holo (111) e sekametseng |
| segokanyipalo | 3.21 g, / cm³ |
| thatafala | 2500 Vickers boima (moroalo oa 500g) |
| Boholo ba lijo-thollo | 2 ~ 10μm |
| K'hemik'hale e Hloekileng | 99.99995% |
| Mocheso bokgoni | 640 J·kg-1K-1 |
| Sublimation Mocheso | 2700 ° C |
| Matla a Flexural | 415 MPa RT 4-ntlha |
| Modulus e monyane | 430 Gpa 4pt kobeha, 1300 ℃ |
| Thermal Conductivity | 300Wm-1K-1 |
| Katoloso ea Thermal(CTE) | 4.5 × 10-6K-1 |
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