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SiC e Koahetseng Upper Graphite Barrel bakeng sa SiC Epitaxy
SiC Coated Upper Graphite Barrel bakeng sa SiC Epitaxy ke karolo ea bohlokoa ts'ebetsong ea kholo ea epitaxial ea li-wafers tsa silicon carbide (SiC). E entsoe ke Semixlab, moqomo ona o kopanya graphite e phahameng ea isostatic e nang le seaparo se teteaneng sa CVD SiC, se fanang ka botsitso bo tsotehang ba mocheso, ho hanyetsa kutu, le ho tšoana ha holim'a metsi - ho bohlokoa bakeng sa ho netefatsa boleng bo phahameng ba kristale ba likarolo tsa SiC epitaxial. Re lebeletse lipuisano tsa hau tse ling.
Tlhaloso
Litšobotsi tsa Thepa le Ts'ebetso
graphite ea mantlha e hlahisoa ho tsoa ho ultra-fine isostatic carbon, e fanang ka porosity e tlase le botšepehi bo botle ba mochini tlas'a mocheso o phahameng.
Thepa ea SiC e kenngoa ka Chemical Vapor Deposition (CVD), e etsa lesela le lesesaane, le ts'ireletso le tlamahaneng ka thata le nang le likarolo tse latelang tsa bohlokoa:
● Bohloeki bo Phahameng le Boiketlo ba Lik'hemik'hale: E thibela tšilafalo nakong ea kholo ea SiC epitaxial, ho netefatsa kamore ea karabelo e hloekileng le e tsitsitseng.
● Thermal Stability e Phahameng ka ho Fetisisa: E mamella mocheso ka holimo ho 1600 ° C 'me e boloka ho nepahala ha dimensional.
● Ho Hloka ha Khoholeho e Ntle le ho Khanyetso ha Khoholeho: E sireletsa likhase tse sebetsang tse kang H₂ le SiH₄ tse sebelisoang hangata ho SiC epitaxy.
● Ho Adhesion ka Matla le Boreleli ba Boreleli: E fana ka tiiso ea tlhahiso e fokolang ea likaroloana le ho potoloha ha liphaephe tse tsitsitseng nakong ea epitaxial deposition.
Mathata le Litharollo tsa Semixlab
| hlahisitse phephetso | Lebaka | Semixlab Tharollo |
| Ho qoelisoa kapa delamination | Phapang ea katoloso ea mocheso lipakeng tsa graphite le SiC layer | Tšebeliso ea ts'ebetso ea gradient CVD le pretreatment e nepahetseng ea holim'a metsi ho ntlafatsa ho khomarela |
| Tšilafalo ea bokaholimo | Litšila tsa khase kapa li-micro-defects tse koahelang | Ho amoheloa ha lisebelisoa tsa mohloli o phahameng oa SiC le ho hloekisa ka mor'a ho roala |
| Ho sotha ha mocheso tlas'a ho futhumatsa khafetsa | Kabo e sa lekaneng ea mocheso kapa mokhathala oa graphite | Geometry e ntlafalitsoeng ea moqomo le tšebeliso ea isotropic graphite ho ntlafatsa matla a mochini |
| Nako ea bophelo e fokotsehile libakeng tse senyang | Khoholeho ea khase ea H₂ kapa SiH₄ | Tšebeliso ea lera le sirelelitsoeng la SiC e teteaneng (≥100 µm) e nang le sebopeho se teteaneng sa kristale |
Semixlab's Sic Coated Upper Graphite Barrel e fana ka tšireletso e tšepahalang le botsitso lits'ebetsong tsa sic epitaxy, e ntlafatsa boleng ba wafer le ts'ebetso ea reactor. E etselitsoe ts'ebetso ea mocheso o phahameng, bohloeki bo phahameng, le ts'ebetso ea nako e telele, e eme e le karolo ea bohlokoa bakeng sa tlhahiso ea matla a semiconductor ea moloko o latelang. Ikopanye le litherisano tsa tekheniki kapa tšehetso ea moralo o hlophisitsoeng.
dikopo
Lisebelisoa ho SiC Epitaxy
SiC Coated Upper Graphite Barrel e kenngoa sebakeng se ka holimo sa SiC epitaxy reactors (mohlala, AIXTRON, LPE, kapa Veeco systems) 'me e phetha karolo ea bohlokoa ho laola kabo ea tšimo ea mocheso le ho tšoana ha phallo ea khase. Mesebetsi ea eona ea mantlha e kenyelletsa:
● Ho boloka ho leka-lekana ha mocheso pakeng tsa libaka tse ka holimo le tse ka tlaase ho etsa bonnete ba hore botenya ba epitaxial layer bo bongata.
● Ho thibela tšebelisano e tobileng ea lik'hemik'hale pakeng tsa graphite le likhase tse sebetsang, kahoo e lelefatsa nako ea bophelo ea likaroloana.
● Ho ntlafatsa bohloeki ba li-reactor, ho fokotsa tšilafalo ea likaroloana nakong ea li-epitaxial tse ngata.
Ka moralo o ntlafalitsoeng le machining a nepahetseng, moqomo oa Semixlab o kenya letsoho ho boleng bo sa fetoheng ba wafer, litheko tse ntlafalitsoeng tsa chai, le ho fokotsa sekhahla sa tlhokomelo lits'ebetsong tsa SiC epitaxy.
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