SiC Coated Graphite Barrel Susceptor

Tlhahisong ea sejoale-joale ea li-semiconductor-haholo-holo SiC le GaN epitaxy-boleng ba tikoloho ea mocheso ka har'a reactor e lekanya ka kotloloho ho ts'oana, sekhahla sa sekoli, le ho pheta-pheta ha lifilimi tsa epitaxial. Semixlab's SiC Coated Graphite Barrel Susceptor e etselitsoe ho fihlela litlhoko tse thata tse ntseng li eketseha tsa li-reactor tsa mocheso o phahameng oa CVD tse sebelisoang tlhahiso ea lisebelisoa tsa motlakase tse pharalletseng. Ka ho kopanya graphite ea bohloeki bo phahameng le seaparo sa SiC se entsoeng ka mokhoa o nepahetseng, mokelikeli o fana ka mokhoa o ikhethang oa mocheso, botsitso ba lik'hemik'hale, le ho tšepahala ha mechine ho pholletsa le nako e telele, mekhoa e phahameng ea mocheso oa epitaxial.

Karolong ea mantlha ea ts'ebetso ea eona ke meralo ea thepa ea Semixlab, e matlafatsang tlhahiso le karabelo ea mocheso e hlokahalang bakeng sa taolo e tsitsitseng ea boemo ba mocheso. Thepa ea SiC e sebetsa e le tšitiso e sa sebetseng ea lik'hemik'hale khahlanong le lik'hemik'hale tse senyang tsa chlorine tse sebelisoang hangata ho SiC epitaxy, ho thibela ho senyeha ha graphite le ho felisa mohloli o moholo oa tlhahiso ea likaroloana. Tšireletso ena e tiisa maemo a tlaase haholo a tšilafalo 'me e thusa ho boloka tikoloho e hloekileng ea karabelo le tlas'a maemo a mabifi a fetang 1500 °C. Jiometry ea moqomo e ntlafalitsoe ho theha sebaka se tsitsitseng le se leka-lekaneng sa phallo ea khase ho pholletsa le liphaephe tse ngata, ho fokotsa phapang ea lera le ho nolofalletsa botenya ba filimi le ho ts'oana ha doping ho li-multi-wafer epitaxial reactors.

Ho latela pono ea ts'epahalo ea mochini, Semixlab's SiC coated susceptor e boloka botsitso ba sebopeho ho pholletsa le lipotoloho tse pheta-phetoang tsa mocheso le phallo e phahameng haholo. Botenya bo entsoeng ka boenjineri, sebopeho sa micro-crystalline SiC, le khokahano ea katoloso ea mocheso le karoloana ea graphite li sebetsa 'moho ho fokotsa ho roala ha bokaholimo le ho thibela ho senyeha ha likaroloana tse nyane ka nako e telele ea ts'ebeletso. Sena se kenya letsoho ka kotloloho ho chai e phahameng le khafetsa ea tlhokomelo e tlase bakeng sa lisebelisoa tsa epitaxy.

Bakeng sa masela a phahamisang tlhahiso ea sesebelisoa sa matla sa SiC, susceptor e sebetsa e le sesebelisoa sa bohlokoa sa boleng bo tsitsitseng ba epi. E tsitsisa kabo ea mocheso oa li-wafer, e boloka li-coupling tse laoloang tsa mocheso, e sireletsa likaroloana ho tsoa tšilafalong e sa lebelloang, 'me e ts'ehetsa tikoloho e pheta-phetoang, e ts'oanang e phahameng. Ka motsoako ona oa ho tšoarella, bohloeki, le ho nepahala ha mocheso, Semixlab's Barrel Susceptor e thusa bahlahisi ho finyella taolo e matla ea ts'ebetso, ts'ebetso e ntlafetseng ea motlakase ea li-epitaxial layers, le botšepehi bo phahameng ba SiC MOSFETs, diode, le li-module tsa matla.

E etselitsoe ho lumellana le li-platform tse kholo tsa SiC epitaxy tse otlolohileng le tse rapameng, Semixlab SiC Coated Graphite Barrel Susceptor e loketse mela e phahameng ea tlhahiso e batlang likarolo tsa nako e telele le ts'ebetso e ka lebelloang. Yuniti e 'ngoe le e 'ngoe e entsoe ka tlas'a maemo a thata a ho tšoaneleha ha thepa le litekanyetso tsa ho nepahala, ho netefatsa ts'ebetso e ts'oanang ho pholletsa le lihlopha. Ka botsebi ba Semixlab ba lisebelisoa tse tsoetseng pele le boenjiniere ba ts'ebetso ea semiconductor, sehlahisoa se fana ka masela a nang le tharollo e tšepahalang, e netefalitsoeng e ts'ehetsang lintlafatso tse ka lekanyetsoang ho phallo, ho ts'oana ha li-wafer, le ho sebetsa ha lisebelisoa - ho sebetsana le litlhoko tsa ts'ebetso ea indasteri le menahano ea nako e telele ea theko ea beng.