Silicon Carbide Coating Graphite Tray

Lisebelisoa tse Khethehileng tsa Graphite tsa Semixlab bakeng sa Terene ea Silicon Carbide Coating Graphite

Ho Semixlab Technology, Silicon Carbide (SiC) Coated Graphite Trays ea rona e entsoe hore e sebetse ka mokhoa o ts'epahalang maemong a boima ka ho fetesisa a semiconductor - moo mocheso o feteletseng, likhase tse senyang le maemo a hloekileng haholo a kopanang. Literei tsena li kopanya melemo ea mocheso le mochini oa graphite ea isostatic e phahameng haholo e nang le botsitso bo ikhethang ba lik'hemik'hale le bots'epehi ba bokaholimo ba seaparo se teteaneng sa CVD silicon carbide. Sephetho ke karolo e matla, ea bohloeki bo phahameng e bapalang karolo ea bohlokoa ho boloka ts'ebetso e ts'oanang, ho tsitsisa ha lihlahisoa, le ho sebetsa ha lisebelisoa ho pholletsa le mehato e fapaneng ea ho etsa liphaephe tse ka pele.

Ka har'a litsamaiso tsa kholo ea epitaxial-ho kenyeletsoa silicon (Si) le silicon carbide (SiC) epitaxy - SiC e koahetsoeng ka graphite tray e sebetsa e le sejari se nepahetseng sa wafer kapa setsi sa susceptor. E fana ka ts'ehetso e tsitsitseng ea mochini ha e ntse e boloka kabo ea mocheso o ts'oanang ho pholletsa le bokaholimo, e leng bohlokoa bakeng sa taolo ea botenya ba filimi, ho ts'oana ha dopant le boleng ba kristale. Ho roala ha SiC ho sebetsa e le thibelo ea lik'hemik'hale tse nang le lik'hemik'hale tse arolang karolo ea graphite ho likhase tse sebetsang tse kang H₂, HCl, le SiHCl₃, ho thibela tšilafalo ea carbon kapa khase ea khase. Sebaka sa eona se boreleli sa seipone se fokotsa tlhahiso ea likaroloana 'me se nolofalletsa ts'ebetso ea nako e telele libakeng tsa mocheso o phahameng ho fihlela ho 1650 ° C ntle le ho senyeha.

Silicon Carbide Coating Graphite Tray Application Scenarios

Ho MOCVD le mekhoa ea ho beha semiconductor ea metsoako-e sebelisetsoang ho etsa lisebelisoa tsa GaN, GaAs le InP-seterei se sebetsa e le sejana se nang le mocheso o phahameng oa mocheso se lokelang ho mamella ho pepeseha khafetsa ho lik'hemik'hale tsa hydrogen le ammonia. Khanyetso e phahameng ea kutu ea seaparo sa SiC e thibela khoholeho ea mobu le ho senyeha ha holim'a metsi, ho netefatsa morphology ea filimi e tsitsitseng le bophelo bo atolositsoeng ba likarolo. Botsitso bona bo fetolela ka kotloloho maemong a kholo a lebelletsoeng le ho feta ha lisebelisoa tsa LED, matla le tlhahiso ea lisebelisoa tsa RF.

SiC e koahetsoeng ka graphite tray e boetse e bapala karolo ea bohlokoa ho pharalletseng, ho oxidation, ho annealing le tikolohong e potlakileng ea ho sebetsa ha mocheso (RTP). Nakong ea mehato ena e phahameng ea mocheso, terei e sebetsa e le sethala sa ts'ehetso se bolokang ho lokisoa ha li-wafer, ho hanyetsa oxidation, le ho fokotsa ho sotheha ha mocheso. Ts'ebetso ea eona e phahameng ea mocheso e lumella ho fetisoa ha mocheso ka potlako le ka mokhoa o ts'oanang, ho nolofalletsa ho laola mocheso o nepahetseng le ho fokotsa khatello ea mocheso ho li-wafers. Thibelo ea SiC e boetse e sireletsa khahlanong le ho tsoa le ho silafala ha tšepe - lisosa tse peli tsa mantlha tsa tahlehelo ea lihlahisoa tlhahisong e tsoetseng pele ea lisebelisoa.

Ho pholletsa le lits'ebetso tsena kaofela, Semixlab SiC Coated Graphite Tray ha e sebetse feela joalo ka mochini o hlophisitsoeng empa e le sebopeho se hlophisitsoeng hantle se hlalosang botsitso ba mocheso, lik'hemik'hale le bohloeki ba mohato oohle oa tlhahiso. Ka ho kopanya theknoloji e tsoetseng pele ea ho roala CVD, khetho ea thepa e hloekileng, le taolo e thata ea geometri, Semixlab e fana ka likarolo tse finyellang litekanyetso tse thata tsa ho tšepahala le bohloeki ba masela a kajeno a semiconductor. Terei e 'ngoe le e' ngoe e etselitsoe ts'ebetso e ka ntlafalang nakong ea lipotoloho tse ngata tsa ts'ebetso, e fana ka botsitso le nako e telele e hlokoang ke bahlahisi ba lefats'e ba hahamallang tlhahiso e phahameng ea lisebelisoa, bofokoli bo tlase, le nako e atolositsoeng ea lisebelisoa.