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Bohloeki bo phahameng ba quartz ea ho hasana Tube
Semixlab ke moetsi ea etelletseng pele oa likarolo tsa quartz naheng ea China, e sebetsanang le moralo le tlhahiso ea li-tubes tse pharalletseng tsa quartz tse hloekileng bakeng sa semiconductor oxidation, diffusion le annealing process. E entsoe ka silika e hloekileng e hloekileng (≥99.99% SiO₂) 'me e hloekisitsoe ka mokhoa o nepahetseng oa ho etsa le ho laola tšilafalo e tiileng, tube e' ngoe le e 'ngoe e tiisa botsitso bo tsotehang ba mocheso le maemo a sa hloekang a tšepe a tlaase haholo. Re lebeletse lipuisano tsa hau tse ling.
Tlhaloso
Semixlab High Purity Quartz Diffusion Tube e etselitsoe ka ho khetheha lits'ebetso tsa mocheso o phahameng oa mocheso ho etsoa tlhahiso ea semiconductor, ho kenyeletsoa oxidation, dopant diffusion, le annealing.
E entsoe ka silika e kopantsoeng ea ultra-high purity fused (≥99.99% SiO₂), tube e 'ngoe le e' ngoe e etselitsoe ho fana ka botsitso bo ikhethang ba lik'hemik'hale, tšilafalo e fokolang, le ho lumellana ka mokhoa o nepahetseng oa mocheso-ho netefatsa liphello tse tsitsitseng tsa ts'ebetso ea li-wafer libakeng tse hlokang ho hloekisa.
Ho sa tsotellehe hore na li kopantsoe ka har'a libopi tse otlolohileng kapa tse tšekaletseng, li-tubes tsa quartz tsa Semixlab li entsoe ka nepo 'me li lekoa ka botlalo ho fihlela litlhoko tse thata tsa IC, LED, MEMS, le tlhahiso ea lisebelisoa tsa motlakase.
dikopo
Likopo ho Mekhoa ea Semiconductor
1. Thermal Oxidation
Ka har'a libono tsa oxidation tsa mocheso, li-tubes tsa phallo ea quartz li sebetsa e le kamore ea karabelo ea mantlha moo li-wafers tsa silicon li pepesetsoang mouoane oa O₂ kapa H₂O mocheso o phahameng (900-1150 ° C).
● E fana ka tikoloho e hloekileng le e tsitsitseng ea oksijene bakeng sa khōlo e tšoanang ea SiO₂.
● E felisa tšilafalo ea ion ea tšepe, e tiisang botšepehi ba dielectric bakeng sa heke le li-isolation oxides.
High purity quartz Diffusion Tube e loketse ho sebetsa ka wafer
2. Phapang ea Dopant
Li-tubes tsa "quartz diffusion" li sebelisetsoa ho hasanya liathomo tsa dopant (joalo ka phosphorus kapa boron) ka har'a silicon substrate ho theha lintlha tse lakatsehang tsa mateano.
● Ho se sebetse hantle ha lik'hemik'hale ho thibela tšilafalo nakong ea liketso tsa POCl₃ kapa BBr₃.
● E boloka bohloeki bo phahameng esita le moeeng o thehiloeng ho halogen.
3. Mekhoa ea ho Anelisa le ea ho khanna
Ka mor'a ho kenngoa kapa ho kenngoa ha ion, li-wafers li kenngoa ka mocheso o phahameng oa mocheso ho kenya li-dopants le ho lokisa tšenyo ea lattice.
● Li-tubes tsa quartz li fana ka kamore e ts'oanang ea thermally, kamore ea tšilafalo e fokolang bakeng sa liphello tse tsitsitseng le tse ka hlahisoang hape.
● E loketse ka bobeli N₂ le ho theha tikoloho ea khase ea khase.
4. LPCVD le R&D Thermal Processing
Likamoreng tse nyane tsa LPCVD kapa libono tsa lipatlisiso, li-tubes tsa phallo ea quartz li ka sebetsa e le kamore ea karabelo le ea polokelo.
● E loketse ho beha lifilimi tsa polysilicon, silicon nitride, le oxide.
● E netefatsa sebopeho sa likaroloana tse tlase le ho pheta-pheta ho phahameng ho pholletsa le matha.
Molemo oa Khatello
Melemo ea Semixlab
1. Bohloeki ba lintho tse bonahalang & Traceability
Tube e 'ngoe le e 'ngoe ea quartz e entsoe ka silika e hloekileng e tsoang ho barekisi ba netefalitsoeng. Litlaleho tsa tlhahlobo ea ICP-MS lia fumaneha ha li kopuoa, li netefatsa ts'ebetso ea sehlopha ka seng.
2. Precision Manufacturing & Customization
Semixlab e fana ka meralo e ikhethileng ho kopana le litekanyo tse khethehileng tsa sebōpi, lintlha tsa mocheso, le mekhoa ea phallo ea khase e hlokoang ke bareki.
Khetho e kenyelletsa:
● Litlhophiso tsa li-tube tse otlolohileng kapa tse tšekaletseng
● Botenya ba marako, botenya ba lebota le lithako tse khethetsoeng ka ho khetheha
● Lithako tse bentšitsoeng kapa tse khomaretsoeng holim'a metsi
● Mekhoa e khethehileng ea ho sebetsana le bajari ba li-wafer tse ngata
3. Teko e Matla & Tiisetso ea Boleng
Tube e 'ngoe le e' ngoe ea phallo e hlahlojoa ka mahlakoreng a mabeli, tlhahlobo ea botšepehi holim'a metsi, le papiso ea khatello ea mocheso pele e romelloa. Sena se tiisa ho lumellana le litsamaiso tsa sebōpi tse tsamaisang indasteri tse kang TEL, Kokusai, Centrotherm, le ASM.
