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Seketsoana sa Quartz se Phahameng ka ho Fetisisa bakeng sa Silicon Wafer
The High Purity Quartz Boat ke karolo ea bohlokoa indastering ea ho lokisa semiconductor wafer, e etselitsoeng ho ts'oara le ho ts'ehetsa liphaephe tsa silicon nakong ea ts'ebetso e phahameng ea mocheso. Ho tloha ho pharalletseng ho isa ho oxidation le annealing, likepe tsa quartz li netefatsa botsitso ba wafer le ho fokotsa likotsi tsa tšoaetso. Tlhahisong ea semiconductor e tsamaisoang ka nepo, lijari tse tšeptjoang tsa li-wafer li bohlokoa bakeng sa ho fihlela ts'ebetso e ts'oanang, chai e phahameng, le boleng bo holimo ba sesebelisoa.
Tlhaloso
Lefatšeng la tlhahiso ea semiconductor, ho nepahala le ho hloeka ke tsona tse ka sehloohong. Sekepe sa quartz ke sengoathoana sa bohlokoa sa lisebelisoa se sebelisetsoang ho ts'oara le ho fetisa liphaephe tsa silicon nakong ea lits'ebetso tse fapaneng tsa mocheso o phahameng.
Likepe tsa quartz li bohlokoa methating e 'maloa ea bohlokoa ea ho etsa li-wafer:
● Phatlalatso: Ts'ebetsong ena, seketsoana sa quartz se tšoara liphaephe tsa silicon ha li ntse li futhumatsoa ka sebōping ho hlahisa li-dopants tse kang boron, phosphorus kapa arsenic. Bohloeki bo feteletseng ba quartz bo netefatsa hore li-dopants tsena ha li silafatsoe, e leng ntho ea bohlokoa bakeng sa ho finyella
lintho tse lakatsehang tsa motlakase.
● Oxidation: Nakong ea oxidation, li-wafers li futhumatsoa ka sebōping sa mocheso o phahameng o nang le oksijene ho hōla lesela le lesesaane, le tšoanang la silicon dioxide (SiO2) holim'a tsona. Lera lena le sebetsa e le insulator, mokoallo o sireletsang, le thepa ea masking.
● Chemical Vapor Deposition (CVD): Mokhoa ona o kenya lifilimi tse tšesaane tsa lisebelisoa holim'a liphaphatha tse tsoang sebakeng sa mouoane. Liketsoana tsa quartz li sebelisoa ho tšoara liphaphatha ka har'a CVD reactor, moo li pepesehelang likhase tse sebetsang ka mocheso o phahameng.
● Anealing: Kalafo ena ea mocheso e sebelisetsoa ho lokisa liphoso, ho kenya li-dopants, le ho imolla khatello ea maikutlo ka har'a sebopeho sa kristale sa li-wafers tsa silicon ka mor'a ho kenngoa ha ion kapa mekhoa e meng ea matla a phahameng.
Boleng ba seketsoana sa quartz bo ama ka kotloloho chai le ts'ebetso ea li-wafers tsa silicon. Likepe tsa rona tsa quartz tse hloekileng haholo li fana ka melemo e ikhethang bakeng sa lits'ebetso tsa hau:
● Bohloeki bo Ikhethang: Lintho tsa rona tsa quartz li na le lintho tse ngata tse tlase haholo tsa litšila tsa tšepe (<10ppm), tse kang K, Na, le Li. Sena se bohlokoa haholo tlhahisong ea li-semiconductor, moo esita le lits'ila tse ngata li ka sebetsang joalo ka li-dopants, tse lebisang ho bofokoli le ho fokotsa ts'ebetso ea motlakase ea li-chips tse felileng.
● Superior Thermal Stability: Ho hanyetsa mocheso o phahameng oa mocheso oa likepe tsa rona tsa quartz ho li lumella ho mamella potoloho e potlakileng ea ho futhumatsa le ho pholisa ntle le ho phatloha kapa ho holofala. Sena se eketsa nako ea bophelo ba lisebelisoa le ho fokotsa nako ea ho theoha. Likepe tsa rona tsa quartz li ka mamella ts'ebeliso e tsoelang pele mochesong o fihlang ho 1200C.
● Ho Thibela Mocheso o Phahameng: Ka mocheso o sebetsang o fihlang ho 1200C, likepe tsa rona tsa quartz li loketse hantle tikoloho e matla ea mocheso e hlokahalang bakeng sa phallo, oxidation, le annealing.
● Ho Hanyetsa Corrosion e Ntle ka ho Fetisisa: Thepa ea quartz e hanyetsana haholo le tlhaselo ea lik'hemik'hale ho tloha ho li-acids le lintho tse ling tse senyang tse sebelisoang ts'ebetsong ea ho etsa li-wafer, ho netefatsa hore li tšoarella nako e telele le ho tšepahala.
Indasteri ea semiconductor e hloka ho nepahala, botsitso le bohloeki. Ka Semixlab's High Purity Quartz Boats, u fumana ts'epo ea ts'ebetso e tsitsitseng ea wafer, tšilafalo e fokotsehileng, le chai e ntle. Ikopanye le rona kajeno ho buisana ka litharollo tsa tloaelo bakeng sa litlhoko tsa hau tsa ho sebetsa ka silicon.
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