Quartz Ignition Tube

Ka har'a libono tse pharalletseng, Quartz Ignition Tube e sebetsa e le kamore e ikemiselitseng ea karabelo bakeng sa ho hotetsa le ho tsitsisa mohloli oa dopant. Ho sa tsotellehe hore na e tšehetsa li-precursors tse tiileng, tse metsi, kapa tse kang khalase-tse kang boron le phosphorus mohloli oa lisebelisoa tse sebelisoang le BBr₃, BCl₃, POCl₃, kapa khalase ea dopant e tiileng-thupu e netefatsa hore ho na le mouoane o tšoanang le moea o tsitsitseng o sa fetoheng nakong ea mocheso o phahameng. Botsitso ba eona ba mocheso bo kaholimo ho 1000 ° C, litšila tse tlase haholo, le ho hanyetsa tlhaselo ea lik'hemik'hale ho thusa ho boloka kabo e tšoanang ea dopant ho pholletsa le li-wafer batches. Ka ho fana ka tikoloho e nyenyane e laoloang e arohaneng le litšila tse entsoeng ka tšepe kapa tse nang le likaroloana, tube ea khase e kenya letsoho ka ho toba botebong ba marang-rang, ho hanyetsoa ha maqephe, le botsitso ba nako e telele.

Ts'ebetsong ea oxidation ea mocheso, Quartz Ignition Tube e bapala karolo ea bohlokoa ho tsitsiseng moea oa karabelo o sebelisoang ho holisa likarolo tsa boleng bo holimo tsa SiO₂. Ka har'a litsamaiso tsa oxidation tse omeletseng le tse metsi, pompo e fana ka sebaka sa bohloeki bo phahameng bakeng sa ho kenya khase, ho hlahisa mouoane, kapa kenyelletso e thusang. Ho hanyetsa ha eona ho matla ha mocheso ho tiisa hore ho na le matla a tsitsitseng a phallo ea oksijene le li-gradients tsa mocheso, ho tšehetsa botenya ba oxide ea junifomo le ho fokotsa tlhahiso ea bokooa holim'a lisebelisoa tsa silicon tsa lisebelisoa. Ha litlhoko tsa oxidation li ntse li tsoela pele ho ea ho litlhaloso tse tiileng tsa ho tšoana le likhakanyo tse fokotsehileng tsa likaroloana, ho hloeka le ho nepahala ha tekanyo ea phaepo ea ho tima ho ba bohlokoa bakeng sa ts'ebetso ea sebōpi.

The tube e boetse e etsa mosebetsi oa bohlokoa ho li-annealing tse phahameng tsa mocheso le li-drive-in cycles, moo e ts'ehetsang ts'ebetso le ho arola bocha ha li-dopants tlas'a maemo a laoloang ka thata. Tikoloho ea eona e tsitsitseng, e tsitsitseng ea quartz e thibela ho sebelisana ho sa batleheng le hydrogen, naetrojene, kapa likhase tsa oxidizing, ho netefatsa hore litlaleho tsa mocheso li lula li lebeletsoe le kotsi ea tšoaetso e lula e le tlaase haholo. Ho ts'epahala hona ho bohlokoa haholo lits'ebetsong tse hlokang likhakanyo tse patisaneng tsa mocheso, joalo ka ts'ebetso ea li-ion tse kentsoeng, li-drive-in tsa likarolo tse arohaneng, le li-anneals tsa post-oxidation tse sebelisetsoang ho ntlafatsa boleng ba dielectric.

Semixlab Quartz Ignition Tube e 'ngoe le e' ngoe e etsoa tlas'a taolo e matla ea ts'ebetso, ho kenyelletsa le ntlafatso e phahameng ea mocheso, sebopeho sa mekhahlelo e mengata, le boemo bo nepahetseng ba mocheso oa mocheso. Tshupu e 'ngoe le e 'ngoe e ea hlahlojoa ho bona ho nepahala ha litekanyo, sebopeho se se nang li-bubble, le litšila tsa mesaletsa ea tšepe ho netefatsa hore e tsamaellana le libaka tsa sebōpi tse nang le mocheso o phahameng joalo ka li-reactor tse tšekaletseng le tse theohileng. Sephetho ke karolo ea quartz e ntlafatsang ts'ebetso ea ho pheta-pheta, ho fokotsa nako ea sebōpi, le ho tšehetsa tlhahiso ea lisebelisoa tse phahameng tsa semiconductor.

Semixlab's Semiconductor Quartz Ignition Tube ke tharollo ea thepa ea bohlokoa bakeng sa masela a batlang ho tšoana hantle ha mocheso, k'hemistri e hloekileng ea dopant, le taolo e matla ea ts'ebetso. Ebang e sebelisoa tlhahisong e tsoetseng pele ea CMOS, ts'ebetso ea lisebelisoa tsa motlakase, kapa mehato e khethehileng ea ho hasanya le ea oxidation, Quartz Ignition Tube e fana ka motheo o tiileng, o hloekileng haholo bakeng sa tlhahiso ea semiconductor ea moloko o latelang. Re lebeletse ka thabo lipotso tsa hau tse ling.