0200-10243 Lesale la Moriti 150mm

1. Kakaretso ea Sehlahisoa

AMAT 0200-10243 Shadow Ring 150mm ke karolo e ka sebelisoang ea quartz e nepahetseng haholo e etselitsoeng ho sebelisoa litsamaisong tsa ts'ebetso ea semiconductor ea 150mm, haholo-holo likamoreng tsa ho betla le tsa CVD.

E entsoe ka quartz e kopantsoeng e hloekileng haholo, lesale lena la moriti le entsoe ho mamella tikoloho e thata ea plasma ha ka nako e ts'oanang le boloka botsitso ba boholo le maemo a tlase a tšilafalo. E etselitsoe ka ho khetheha ho lekana liforomo tsa Lisebelisoa tse Sebelisitsoeng, ho netefatsa ho lumellana le kopanyo e tšepahalang ea ts'ebetso.

Ho Semixlab Technology, re fana ka mehele ea moriti e nkeloang sebaka ea boleng bo holimo ka taolo e tiileng holim'a bohloeki ba thepa, ho nepahala ha mechini, le qetello ea bokaholimo ho fihlela litlhoko tse thata tsa tlhahiso e tsoetseng pele ea semiconductor.

2. Boemo ba Lisebelisoa le Karolo ea Ts'ebetso

Lesale la moriti le kentswe ho potoloha moedi o ka ntle wa wafer kahare ho kamore ya tshebetso, e leng se etsang sebopeho sa bohlokwa pakeng tsa moedi wa wafer le tikoloho e potolohileng ya plasma.

Sebaka se tloaelehileng:

● Ho potoloha wafer holim'a chuck ea electrostatic (ESC) kapa susceptor

● E fumaneha sebakeng seo ho pepesehelang plasma ho sona

● E behiloe pakeng tsa bohale ba wafer le lebota la kamore

Karolo e sebetsang tsamaisong:

● E sebetsa e le lera la 'mele le moeli oa ts'ebetso

● E susumetsa kabo ea plasma le boitšoaro ba tšimo ea motlakase ea moeli

● E sebetsa e le karolo ea tšireletso ea sehlabelo khahlanong le ho pepesehela plasma ka ho toba

Lisebelisoang tse tsoetseng pele tsa semiconductor, esita le diphetoho tse nyane maemong a bohale di ka ama haholo tshebetso ya tshebetso ka kakaretso, e leng se etsang hore lesale la moriti e be karolo ya bohlokwa meralong ya taolo ya tshebetso.

3. Mesebetsi ea Bohlokoa le Tšusumetso ea Ts'ebetso

Lesale la Moriti la AMAT 0200-10243 le bapala karolo ea bohlokoa ho netefatseng hore ts'ebetso e ts'oana, botsitso ba tlhahiso, le taolo ea tšilafalo.

Tšireletso ea moeli

● E sireletsa mathoko a wafer ho tloha tlhaselong e tobileng ea plasma

● E fokotsa tšenyo ea mathoko, ho phunya le liprofaele tse sa tloaelehang tsa ho phunya

Ntlafatso ea Kabo ea Plasma

● E fetola bongata ba plasma ea sebakeng seo haufi le moeli oa wafer

● E thibela ho tjhesa ho feta tekano kapa ho tjhesa ho feteletseng

Ntlafatso ea ho Tšoana

● E ntlafatsa sekhahla sa ho tjhesa le ho tsitsa ha botenya ba filimi ho pholletsa le wafer

● E fokotsa libaka tse sa kenyelletseng meeli

Taolo ea Tšilafalo

● E hapa lihlahisoa tse setseng tsa ts'ebetso le likaroloana

● E fokotsa kotsi ea hore tšilafalo e fihle libakeng tse sebetsang tsa wafer

Ts'ebetso ea botsitso

● E boloka maemo a tshebetso a ka phetwang ho pholletsa le dipotoloho tse ngata

● E tšehetsa taolo e tiileng holim'a CD (boemo bo tebileng) le thepa ea filimi

4. Mekhoa e Tloaelehileng ea ho Hlōleha le Mehopolo ea ho Nka Sebaka

Ka lebaka la ho pepesehela plasma khafetsa, mocheso o phahameng, le likhase tse arabelang, mehele ea moriti e ka senyeha butle-butle. Ho utloisisa mekhoa ea ho hloleha ho bohlokoa bakeng sa ho boloka botsitso ba ts'ebetso.

Mekhoa e Tloaelehileng ea ho Hlōleha:

① Khoholeho ea Lero la Mali

Tahlehelo ea thepa ea bokaholimo e bakoang ke ho phatloha ha li-ion

E lebisa liphetohong tsa boholo le boitšoarong bo fetohileng ba plasma

② Tshenyo ya Dikhemikhale

Karabelo le likhase tse matla (mohlala, lik'hemik'hale tse thehiloeng ho fluorine)

Liphetho tsa ho hohlana ha bokaholimo le ho fokola ha sebopeho

③ Ho hlahisa likaroloana

Mapetso a manyane kapa ho senyeha ha bokaholimo ho ka lokolla dikarolwana

E eketsa kotsi ea tšilafalo 'me e fokotsa chai

④ Ho bokella sebaka

Ho bokellana ha lihlahisoa tse setseng tsa ts'ebetso (mohlala, masala a polymer)

E fetola maemo a ts'ebetso ea lehae le kabo ea plasma

⑤ Khatello ea Mocheso le ho Petsoha

Ho potoloha ha mocheso khafetsa ho ka baka ho robeha ha maqeba a manyane

E sekisetsa botšepehi ba mechini ha nako e ntse e ea

Tšusumetso ea ho Hlōleha:

● Keketseho ea tšilafalo ea likaroloana

● Phetoho ea CD ea Edge le ho se tšoane

● Tekanyo e fokotsehileng ea wafer

● Ho kheloha ha ts'ebetso le ho fokotseha ha ho pheta-pheta

● Keketseho ea makhetlo a tlhokomelo ea kamore

Ho Semixlab Technology, re sebetsana le liphephetso tsena ka:

● Khetho ea thepa ea quartz e hloekileng haholo bakeng sa ho fokotsa tšilafalo

● Ho sebetsa ka nepo bakeng sa mamello e tiileng ea litekanyo

● Kalafo e ntlafalitsoeng ea bokaholimo ho ntlafatsa khanyetso ea plasma

● Litharollo tse ikhethileng tsa ho roala tse tsoetseng pele (mohlala, ho roala SiC) bakeng sa bophelo bo bolelele le tlhahiso e fokotsehileng ea likaroloana

Na u batla mokhoa o mong o tšepahalang kapa ntlafatso ea ts'ebetso?

Theknoloji ea Semixlab e fana ka litharollo tsa moriti tse entsoeng ka boenjiniere le likhetho tse tsoetseng pele tsa ho roala tse etselitsoeng litlhoko tsa hau tse ikhethileng tsa ts'ebetso. Ikopanye le rona kajeno ho ntlafatsa ts'ebetso ea hau ea ts'ebetso ea semiconductor.