Karolo e ka Holimo ea Khase ea Liner Quartz

Tlhahlobo ea Sehlahiswa

AMAT 0200-09445 Liner Qtz Upper Gas Dist e kentswe karolong e ka hodimo ya dikamore tsa tshebetso tsa semiconductor, hangata ditsamaisong tse sebediswang bakeng sa ditshebetso tsa ho tjhesa kapa tsa ho bea mouoane wa dikhemikhale (CVD).

Lintlha tsa Sehlahisoa sa Bohlokoa

Karolo ena ke karolo ea sistimi e pharaletseng ea kabo ea khase le ea liner ea kamore, e sebetsang hammoho le li-liners tse tlase le lipoleiti tsa kabo ea khase ho netefatsa maemo a ts'ebetso a tsitsitseng.

0200-09445 ha se lesale kapa lesela la quartz feela—ke karolo e sebetsang e kopaneng e kopanyang mesebetsi e 'meli ea bohlokoa ka har'a kamore ea ts'ebetso:

Lesela la Quartz (Lera la Tšireletso ea Kamore)

Jwalo ka lesela le ka hare, e sebetsa e le thibelo e sireletsang pakeng tsa tikoloho ya plasma le bokahodimo ba tshepe ba kamore. E monya ho kobeha ha metsi, e thibela tšilafalo, mme e eketsa bophelo ba tshebeletso ya kamore.

Karolo ea Kabo ea Khase e ka Holimo

Ka nako e ts'oanang, e etselitsoe ho ts'ehetsa le ho tataisa phallo ea khase sebakeng se kaholimo sa kamore. Ha e sebetsa 'moho le lipoleiti tsa khase kapa lihlooho tsa shaoara, e thusa ho aba likhase ka ho lekana ho pholletsa le wafer.

Boitsebiso le Litšobotsi tsa Bohlokoa

AMAT 0200-09445 Liner e entsoe ka quartz e kopantsoeng ea semiconductor-grade (SiO₂), thepa e sebelisoang haholo bakeng sa likarolo tse pepesitsoeng ke plasma ka lebaka la ts'ebetso ea eona e ikhethang.

Litšobotsi Tsa Bohlokoa

Bohloeki bo Phahameng ka ho Fetisisa: Quartz e sebediswang e na le maemo a tlase haholo a ditshila tsa tshepe, e fokotsang dikotsi tsa tšilafalo le ho tshehetsa maemo a tswetseng pele a tlhahiso ya di-semiconductor.

Khanyetso e Hlollang ea Plasma: Quartz e kopantsoeng e mamella ho phatloha ha li-ion le tikoloho ea plasma e arabelang, e leng se etsang hore e lokele tšebeliso ea nako e telele lits'ebetsong tsa etch le CVD.

Ho Tsitsisa Thempereichara ka Botlalo: Thepa e boloka botsitso ba sebopeho tlas'a mocheso o phahameng le potoloho ea mocheso, e netefatsang ts'ebetso e tsitsitseng ha nako e ntse e ea.

Ho se Sebete ha Lik'hemik'hale: Quartz e hanela ho bola ho bakoang ke likhase tse arabelang joalo ka lik'hemik'hale tse thehiloeng ho fluorine le chlorine tse sebelisoang haholo lits'ebetsong tsa semiconductor.

Ho Sireletsa Motlakase: Jwalo ka thepa e sa tsamaiseng motlakase, quartz e thusa ho boloka masimo a motlakase a tsitsitse mme e thusa kabong e tshwanang ya plasma.

Matlotlo ana a etsa hore quartz e be thepa e loketseng bakeng sa likarolo tse kopanyang taolo ea phallo ea khase le ho pepesehela plasma.

Sesebelisoa sa Ka Hare sa Semiconductor

0200-09445 Quartz Upper Gas Distribution Liner e bapala mesebetsi e mengata ea bohlokoa ka hare ho likamore tsa ts'ebetso tsa semiconductor, e susumetsa ka kotloloho boleng ba ts'ebetso le ts'epo ea lisebelisoa.

Ntlafatso ea Kabo ea Khase

Karolo ena e thusa ho tataisa le ho aba likhase tsa ts'ebetso ho pholletsa le kamore, ho netefatsa:

● Phallo e tšoanang ea khase

● Kabo e tsitsitseng ea reactant

● Maemo a tsitsitseng a ts'ebetso

Sena se bohlokoa bakeng sa ho fihlella sekhahla se ts'oanang sa ho phunya kapa ho kenngoa ha filimi holim'a bokaholimo ba wafer.

Tšireletso ea Kamore

Jwalo ka lesela la sehlabelo, e sireletsa mabota a kamore le dikarolo tsa sebopeho ho:

● Ho pepesehela plasma

● Litšusumetso tsa lik'hemik'hale

● Ho bokella sebaka

Sena se fokotsa litšenyehelo tsa tlhokomelo le ho atolosa bophelo ba lisebelisoa tse turang tsa kamore.

Ntlafatso ea Botsitso ba Plasma

Ka ho fana ka bokaholimo bo tsitsitseng ba dielectric ka kamoreng e ka holimo, lesela la quartz le thusa:

● Boloka meeli e tsitsitseng ea plasma

● Fokotsa mathata a motlakase

● Ntlafatsa ho pheta-pheta ha ts'ebetso

Tshilafatso le Taolo ea Likaroloana

Moqomo o hapa dihlahiswa tse latelang mme o fokotsa tlhahiso ya dikarolwana, o thusa ho:

● Boloka kamore e hloekile

● Fokotsa sekhahla sa liphoso

● Ntlafatsa chai ea wafer