SiC Ceramic Graphite Heater

Semixlab SiC Ceramic Graphite Heater ke sesebelisoa sa ho futhumatsa se sebetsang hantle haholo se etselitsoeng maemo a mocheso o phahameng haholo tlhahisong e tsoetseng pele ea li-semiconductor. E entsoe ka motsoako o matla oa silicon carbide (SiC) e koahetsoeng ka ceramic le graphite e phahameng ea bohloeki, mocheso ona o fana ka conductivity e phahameng ea mocheso, botsitso ba lik'hemik'hale, le ho tšoarella ha mechine-e leng se etsang hore e be tharollo e nepahetseng bakeng sa mekhoa ea mocheso ho etsoa ha liphaephe.

Sebopeho sa Thepa le Lintho tsa Bohlokoa tsa 'Mele

●Core Material: graphite ea isostatic e matla haholo, e nang le grained e ntle

● Tšebeliso ea ho Koahela: Mouoane o kentsoeng ka lik'hemik'hale (CVD) silicon carbide (SiC)

●Bothata ba Moaho: ≥ 2500 HV

● Thermal Conductivity: ~120–150 W/m·K (moko oa graphite)

●Mocheso oa ho sebetsa: Ho fihla ho 1500°C sebakeng sa vacuum kapa sa khase e inert

● Ho hanyetsa Oxidation: E ntle haholo libakeng tse laoloang ka lebaka la lera le sireletsang la SiC

●Motlakase Conductivity: Khanyetso e lokiselitsoeng bakeng sa ho futhumatsa ka mokhoa o ts'oanang le matla a matla

●Corrosion Resistance: Khanyetso e phahameng ea likhase tse senyang le lik'hemik'hale tse sebetsang (mohlala, HCl, HF)

Moralo ona o kopaneng o phahamisa ho ts'oana ha mocheso oa graphite le ho tiea ha lik'hemik'hale tsa SiC, ho netefatsa ts'epo ea nako e telele tlasa maemo a thata a libaesekele tse futhumetseng.

Tšebeliso ea lisebelisoa tsa SiC ceramic graphite heaters

Li-heaters tsa SiC ceramic graphite li bapala karolo e ke keng ea nkeloa sebaka ho lihokelo tse ngata tsa bohlokoa tsa tlhahiso ea semiconductor, 'me litšobotsi tsa tsona tse phahameng tsa ts'ebetso li amana ka kotloloho le boleng, ts'ebetso le katleho ea tlhahiso ea lisebelisoa tsa semiconductor.

1. Ho beha filimi e tšesaane (PVD/CVD/ALD): Mekhoeng e tšesaane ea ho hōla ha filimi e kang 'mele oa mouoane (PVD), k'hemik'hale ea mouoane oa lik'hemik'hale (CVD) le deposition layer ea atomic (ALD), li-heaters tsa SiC ceramic graphite li fana ka tikoloho e tsitsitseng le e ts'oanang ea mocheso o phahameng. Sena ke sa bohlokoa bakeng sa ho laola sekhahla sa kholo, sebopeho sa kristale, ho ts'oana le bohloeki ba filimi, 'me se ama ka kotloloho thepa ea motlakase ea sesebelisoa.

2. Ho kenngoa ha Ion: Kamora ho kenngoa ha ion, tšenyo e tla hlaha ka har'a sephaphatha ebe e kenya li-dopants. Li-heaters tsa SiC ceramic graphite li sebelisoa mecheng ea mocheso o phahameng oa mocheso ho thusa ho lokisa tšenyo ea lattice, ho kenya liathomo tsa doping, le ho ntlafatsa kabo ea doping ho netefatsa ts'ebetso ea motlakase le ho ts'epahala ha sesebelisoa.

3. Ts'ebetso ea phallo: Ka seboping sa phallo, li-heaters tsa SiC ceramic graphite
li sebelisetsoa ho fana ka mocheso o phahameng o nepahetseng le o tsitsitseng ho khothalletsa ho ata ha liathomo tsa doping ka har'a sephaphatha sa silicon ho theha libaka tsa mofuta oa P kapa oa N, kahoo ho haha ​​sebopeho sa lisebelisoa tse sa tšoaneng tsa semiconductor.

4. Khōlo ea Epitaxial: Khōlo ea Epitaxial ke mohato oa bohlokoa kholong ea likarolo tsa boleng bo holimo tsa semiconductor. Li-heaters tsa SiC ceramic graphite li ka fana ka taolo e nepahetseng ea mocheso ho netefatsa hore lesela le lumellana pakeng tsa epitaxial layer le substrate, ho fokotsa likoli, le ho ntlafatsa ho tšoana le ho hloeka ha lesela la epitaxial.

5. Ho hloekisa le ho omisa ka mor'a ho omisa: Mehatong e meng ea ho hloekisa le ho omisa ka mor'a ho omisa, ho futhumatsa ho loketseng ho potlakisa mouoane oa solvent kapa phekolo ea mocheso. Ho hanyetsa kutu le bohloeki bo phahameng ba SiC ceramic graphite heaters e etsa hore e be khetho e nepahetseng ea ho qoba tšilafalo ea bobeli.

6. Phekolo ea mocheso oa Wafer: Mehatong e fapaneng ea tlhahiso ea semiconductor, li-wafers li hloka liphekolo tse fapaneng tsa mocheso ho ntlafatsa thepa ea thepa, ho imolla khatello ea maikutlo kapa ho kenya tšebetsong likarolo tse sebetsang. Li-heaters tsa SiC ceramic graphite li finyella litlhoko tsena tse thata tsa phekolo ea mocheso ka karabelo ea tsona e potlakileng le matla a nepahetseng a ho laola mocheso.

Semixlab e ikemiselitse ho fana ka lihlahisoa tsa heater tsa boleng bo holimo tsa SiC ceramic graphite bakeng sa lits'ebetso tsa semiconductor ho fihlela litlhoko tsa hau tse ikhethang lefapheng la tlhahiso ea semiconductor. Ho khetha heater ea rona ea SiC ceramic graphite ho bolela ho khetha chai e phahameng ea ts'ebetso, potoloho e telele ea ts'ebetso ea lisebelisoa le ts'ebetso e tsitsitseng ea tlhahiso. Re labalabela ka tieo ho ba molekane oa hau oa nako e telele Chaena.