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0200-10377 Lesale le le Leng la 195mm DPS Chamber
Ho Semixlab, re fana ka dikarolo tsa letsopa tsa semiconductor tse sebetsang hantle tse entsweng bakeng sa ditikoloho tse hlokang tlhokomelo ya plasma. AMAT 0200-10377 Ring Single 195mm DPS Chamber ya rona e etseditswe ditsamaiso tsa ho betla tsa Applied Materials (AMAT) DPS, tse fanang ka botsitso bo botle ba plasma, tshireletso ya kamore, le ho tshwana ha tshebetso bakeng sa tlhahiso e tswetseng pele ya semiconductor.
Tlhaloso
E entsoe ka thepa ea letsopa ea semiconductor ea boleng bo holimo le theknoloji ea ho sebetsa ka nepo, karolo ena ea lesale la letsopa e fana ka khanyetso e ikhethang khahlanong le khoholeho ea plasma, potoloho ea mocheso, le tlhahiso ea likaroloana libakeng tse omileng tse matla.
AMAT 0200-10377 Ring Single 195mm DPS Chamber ke karolo ea lesale la ceramic le nepahetseng le sebelisoang haholo-holo lits'ebetsong tsa AMAT DPS (Decoupled Plasma Source) bakeng sa lits'ebetso tsa ts'ebetso ea wafer ea 200mm.
Features bohlokoa:
● Thepa ea letsopa e hloekileng haholo
● Ho lumellana hantle ha plasma ea RF
● Tšilafalo e tlase le tlhahiso ea likaroloana
● Ho hanyetsa khoholeho ea plasma ka tsela e phahameng haholo
● Botsitso bo phahameng ba mechine le mocheso
● Ho sebetsa ka mokhoa o nepahetseng bakeng sa ho kopanya kamore ea DPS
Mesebetsi ho AMAT DPS Systems
Litsamaisong tsa ho fata plasma tsa AMAT DPS, Karolo ea Ceramic ea Ring Single 195mm e sebetsa e le karolo ea bohlokoa ea taolo ea plasma le tšireletso ea kamore.
Taolo ea Moeli oa Plasma
Lesale la letsopa le thusa ho ntlafatsa kabo ea plasma haufi le moeli oa wafer, ho ntlafatsa ho tšoana ha ho betla le ho fokotsa ho kheloha ha mokhoa oa moeli nakong ea ts'ebetso ea plasma e nang le bongata bo phahameng.
ESC le Tšireletso ea Kamore
E kentswe ho potoloha sebaka sa electrostatic chuck (ESC), lesale lena le sebetsa e le thibelo e sireletsang kgahlanong le dikhemistri tse matla tsa plasma, e thusang ho fokotsa kgoholeho ya kamore le ho lelefatsa bophelo ba karolo.
Ho Tsitsisa Plasma ea RF
Ka litšobotsi tse tsitsitseng tsa dielectric, lesale la ceramic le thusa ho ntlafatsa ho kopana ha RF le botsitso ba plasma ka hare ho kamore ea DPS.
Phokotso ea Tšilafalo
Sebopeho sa eona sa letsopa se hloekileng haholo se fokotsa tlhahiso ea likaroloana le tšilafalo ea tšepe, se tšehetsa litlhoko tse tsoetseng pele tsa bohloeki ba ts'ebetso ea semiconductor.
Likopo tse Tloaelehileng Mekhoeng ea Semiconductor
AMAT 0200-10377 Ring Single 195mm DPS Chamber e sebelisoa haholo lits'ebetsong tse tsoetseng pele tsa ho etching le ho sebetsana le plasma, ho kenyeletsoa:
Ho thapa ka dielektri: E tšehetsa boits'oaro bo tsitsitseng ba plasma nakong ea lits'ebetso tsa ho hlaba lera la dielectric.
Oxide & Contact Etch: E thusa ho ntlafatsa ho tšoana ha etch le taolo ea moeli oa wafer ha e kopana le ka mekhoa ea ho theha.
Ho Sebetsa ka Tšepe: E fana ka tšireletso ea kamore le botsitso ba ts'ebetso libakeng tsa ho fata tsa tšepe ka plasma.
Ts'ebetso e Tsoetseng Pele ea Plasma: E loketse lits'ebetso tsa plasma tse nang le bongata bo phahameng tse hlokang tšilafalo e tlase ea likaroloana le ts'ebetso e tsitsitseng ea RF.
Tlhahiso ea Semiconductor ea 200mm: E ntlafalitsoe bakeng sa litsamaiso tsa AMAT DPS tse sebetsanang le li-wafer tsa lisenthimithara tse 8 ka har'a fab ea semiconductor.
Ke hobane'ng ha Semixlab?
Semixlab e ikhetha ka likarolo tse tsoetseng pele tsa letsopa la semiconductor bakeng sa ho betla plasma, ho beha, le lisebelisoa tsa ho sebetsana le mocheso.
Re fana ka:
● Lisebelisoa tsa letsopa tsa sehlopha sa semiconductor
● Bokhoni ba ho sebetsa ka ho nepahala
● Likarolo tsa semiconductor tse lumellanang le OEM
● Taolo ea boleng bo tsitsitseng
● Litharollo tsa letsopa tse ikhethileng
Sepheo sa rona ke ho tšehetsa bahlahisi ba li-semiconductor ka litharollo tse tšepahalang le tse sebetsang hantle tsa thepa bakeng sa lisebelisoa tsa tlhahiso ea wafer tsa moloko o latelang.
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