Mehele ea ho Tiisa ea Graphite e Hloekileng ka ho Fetisisa

Masale a ho Tiisa a Graphite a Isostatic a Phahameng a tswang Semixlab a entswe ka graphite e hatellwang ka ho fetisisa e hlwekileng ka ho fetisisa, masale ana a ho tiisa a fana ka tshebetso e tsitsitseng, e sa silafatseng e tshehetsang ka ho toba ts'epo ya tshebetso, botsitso ba tlhahiso, le nako ya ho sebetsa ha disebediswa ho pholletsa le ditsamaiso tse tswetseng pele tsa tlhahiso ya wafer.

Litsamaisong tsa epitaxy, moo taolo e nepahetseng ea phallo ea khase, botsitso ba khatello, le ho tšoana ha mocheso ho hlokahalang, Li-ring tsa Semixlab tsa High-Purity Isostatic Graphite Sealing Rings li bapala karolo ea bohlokoa ho bolokeng botšepehi ba reactor mochesong o tsitsitseng hangata o fetang 1000 °C. Li kentsoe li-interface tsa kamore, meeli ea ho tiisa, le manonyeletso a potolohang kapa a sa sisinyeheng ka har'a sebaka se chesang, masale ana a ho tiisa a bontša katoloso e tlase le ea isotropic ea mocheso, e a lumellang ho boloka botsitso ba tekanyo nakong ea potoloho e pheta-phetoang ea mocheso. Boteng ba tsona ba litšila tse tlase ka mokhoa o ikhethang bo fokotsa kotsi ea ho kenyelletsoa ha dopant ka boomo kapa tšilafalo ea tšepe, ho thusa ho netefatsa botenya bo tšoanang ba lera la epitaxial, liprofaele tse laoloang tsa doping, le kholo ea kristale ea boleng bo holimo lits'ebetsong tsa epitaxy ea silicon le ea semiconductor e kopaneng.

Litšebelisong tsa CVD, LPCVD, le PECVD, likarolo tsa ho tiisa li pepesetsoa motsoako oa likhase tse ka pele tse nang le mocheso o phahameng, vacuum, le tse senyang, 'me maemong a mang tikoloho ea plasma. Li-ring tsa Semixlab tsa High-Purity Isostatic Graphite Sealing Rings li sebelisoa haholo litiisong tsa mamati a kamore, meahong ea ho itšehla thajana ha khase, le libakeng tsa phetoho lipakeng tsa libaka tse chesang le tse batang tsa reactor. Khanyetso ea lik'hemik'hale ea graphite e hloekileng haholo e nolofalletsa ts'ebetso e tsitsitseng boteng ba likhase tse mabifi tsa ts'ebetso tse kang HCl, NH₃, le li-precursor tse thehiloeng ho halogen, ha sebopeho se teteaneng, sa isotropic se fokotsa tlhahiso ea likaroloana le ho senyeha ha mechini nakong ea bophelo bo bolelele ba ts'ebeletso. Ha ho bapisoa le litharollo tsa ho tiisa tsa tšepe, masale a ho tiisa a graphite a fana ka khanyetso e phahameng khahlanong le ho senyeha le mokhathala oa mocheso, e tlatsetsang linakong tse telele tsa tlhokomelo le ho ntlafala ha ts'ebetso e phetoa tlhahisong ea bongata bo boholo.

Ho hasana ha mocheso o phahameng, oxidation, le ts'ebetso e potlakileng ea mocheso li beha litlhoko tse thata ts'ebetsong ea ho tiisa ka lebaka la mocheso o feteletseng, sekhahla se potlakileng sa ho phunya mocheso, le ho potoloha khafetsa ha ts'ebetso. Libakeng tsena, Li-ring tsa Semixlab tsa High-Purity Isostatic Graphite Sealing li boloka botšepehi bo tsitsitseng ba ho tiisa mochesong o fetang 1100 °C, li tšehetsa taolo e tsitsitseng ea sepakapaka ka har'a li-tube tsa ontong le likamoreng tsa RTP. Thepa e ts'oanang ea mechini e fanoang ke ho hatella ha isostatic e thusa ho thibela khatello ea maikutlo sebakeng seo, ho petsoha ha micro-cracking, le ho sotha ha seal nakong ea ho futhumatsa le ho pholisa ka potlako, ka hona ho kenya letsoho ho liprofaele tse tsitsitseng tsa ho hasanya dopant, kholo e ts'oanang ea oxide, le liphello tse pheta-phetoang tsa ts'ebetso ea mocheso tse bohlokoa bakeng sa tlhahiso e tsoetseng pele ea logic le sesebelisoa sa memori.

Ts'ebetsong ea Etch, ho kenyeletsoa le lits'ebetso tsa ho betla ka ommeng tse sebelisang lik'hemik'hale tse thehiloeng ho halogen le libaka tse thusoang ke plasma, masale a ho tiisa aa hlokahala ho boloka botšepehi ba vacuum ha a ntse a fokotsa tlhahiso ea likaroloana le ho senyeha ha lik'hemik'hale. Masale a Setiling a Semixlab a High-Purity Isostatic Graphite a atisa ho sebelisoa libakeng tse sa tobang tsa ho pepesehela plasma, joalo ka libaka tsa ho tiisa tsa kamore le libaka tsa ho itšehla thajana. Ha li kopantsoe le ho tiea ho nepahetseng ha bokaholimo kapa liphahlo tse sireletsang, masale ana a ho tiisa a fana ka khanyetso e tšepahalang khahlanong le likhase tse senyang tsa etch le khatello ea mocheso, a tšehetsa maemo a tsitsitseng a kamore le ho fokotsa kotsi ea tahlehelo ea chai e amanang le tšilafalo.

E entsoe ka ho shebana le bohloeki ba thepa, botsitso ba sebopeho, le ts'epo ea nako e telele, ho lumellana ha Semixlab's High-Purity Isostatic Graphite Sealing Ring le mahlale a tsoetseng pele a ho koahela le ho kopanngoa le meralo e rarahaneng ea lisebelisoa tsa semiconductor ho li etsa tharollo e tšepahalang bakeng sa li-node tsa ts'ebetso tse etellang pele le tse holileng ka ho tšoana. Ka ho fana ka ts'ebetso e tsitsitseng ea ho tiisa tlas'a maemo a thata ka ho fetisisa a ts'ebetso, Semixlab e tšehetsa bahlahisi ba semiconductor ho fihlela chai e phahameng, ts'ebeliso e ntlafalitsoeng ea lisebelisoa, le litšenyehelo tse tlase tsa beng. Re labalabela ka tieo ho ba molekane oa hau oa nako e telele Chaena.