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TaC e koahetsoeng ka reng ea graphite
TaC Coated Graphite Rings e tsoang Semixlab e entsoe bakeng sa ts'ebetso e feteletseng ea tlhahiso ea semiconductor. Masale a rona a ho roala a Tantalum Carbide (TaC) CVD a bohlokoa haholo bakeng sa ts'ebetso ea CVD, PVD le etching ea plasma, e sebetsa e le mehele ea tataiso, mehele e tsepamisitsoeng le mehele ea liner. Fokotsa tšilafalo ea likaroloana 'me u ntlafatse tlhahiso ea li-wafer ka likarolo tsa rona tse tšoarellang le tse tšepahalang.
Tlhaloso
Semixlab TaC Coated Graphite Ring ke karolo ea bohlokoa e sebelisoang haholo ka har'a lisebelisoa tsa tlhahiso ea semiconductor. E na le karolo e ka tlaase ea graphite e hloekileng e koahetsoeng ka hloko ka lera la Tantalum Carbide (TaC). Seaparo sena se tsoetseng pele se fana ka sebaka se phahameng se sireletsang graphite e ka tlaase ho tloha libakeng tse thata tsa lik'hemik'hale le maemo a phahameng a mocheso.
Rings ea rona ea TaC Coated Graphite Rings e thusa lits'ebetsong tse kang Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), le plasma etching. Li sebetsa e le mokoallo o sireletsang, selikalikoe sa tataiso, kapa karolo ea bohlokoa ea mohaho ka kamoreng ea karabelo, ho netefatsa botšepehi le boleng ba semiconductor ea ho qetela.
songolo
| Thepa ea 'mele ea Tantalum Carbide (TaC) Coating | |
| segokanyipalo | 14.3 (g/cm³) |
| Essivity e khethehileng | 0.3 |
| Coefficient ea mocheso oa mocheso | 6.3*10-6/K |
| Ho thatafala (HK) | 2000 HK |
| itoanela hoo ho | 1 × 10-5 Ohm*cm |
| Thermal botsitso | <2500 ℃ |
| Boholo ba graphite bo fetoha | -10 ~ 20um |
| Ho roala botenya | ≥20um boleng bo tloaelehileng (35um±10um) |
dikopo
Likopo ho Mekhoa ea Semiconductor
Thepa e matla ea TaC Coated Graphite Rings bakeng sa tlhahiso ea Semiconductor e etsa hore e be tsa bohlokoa haholo lits'ebetsong tse 'maloa tsa bohlokoa.
1. Kemiso ea Mouoane oa Lik'hemik'hale (CVD)
Lits'ebetsong tsa CVD, moo likhase li arabelang mochesong o phahameng ho beha lifilimi tse tšesaane holim'a li-wafers, kamore ea karabelo ke tikoloho e mabifi haholo. Masale a rona a koahetsoeng ke CVD TaC a sebelisoa e le mehele ea susceptor, mehele ea tataiso le mehele ea liner. Li fana ka tšireletso e ikhethang khahlano le likhase tse senyang le litlhaselo tsa lik'hemik'hale, li thibela tšilafalo ea likaroloana le ho netefatsa botenya ba filimi e ts'oanang ho pholletsa le sephaphatha. Botsitso bo phahameng ba mocheso oa TaC bo lumella ts'ebetso e tsitsitseng leha ho le mocheso o feteletseng.
2. Physical Vapor Deposition (PVD)
Bakeng sa PVD sputtering le e-beam evaporation, mehele ea rona e sebetsa e le likarolo tsa bohlokoa ka har'a phaposi ea vacuum. Li sebetsa e le lireng tse sireletsang kapa lireng tse tataisang tse sireletsang likarolo tse ling tse hlokolosi hore li se ke tsa qhaqhoa ke litšila le ho phatloha ha plasma. Ho thatafala ho makatsang le ho teteana ha TaC ho etsa hore e khone ho mamella khoholeho ea likaroloana haholo, ho fokotsa haholo kotsi ea ho senyeha ha likaroloana le mefokolo e latelang.
3. Plasma Etching
Nakong ea etching ea plasma, plasma e sebetsang haholo e sebelisoa ho khetha ho tlosa lintho tse tsoang sephakeng. Ts'ebetso ena e bua ka likarolo
Molemo oa Khatello
Melemo ea Semixlab TaC Coated Graphite Rings
1. Ho Tšoara Nako e Phahameng
● Tšireletso e teteaneng ea CVD TaC e hanela plasma, tlhaselo ea lik'hemik'hale, le ho apara ha mechine ho feta graphite e se nang letho.
2. Bohloeki bo Phahameng bakeng sa chai ea Semiconductor
● E entsoe ka graphite e sa hloekang haholo-holo e tlaase haholo le ho roala ha TaC e hloekileng haholo ho fokotsa tšilafalo ea ionic.
3. Precision Machining & Coating Control
● Mechine e tsoetseng pele bakeng sa ho mamellana ka thata; junifomo barbotage botenya bakeng sa tshebetso e tsitsitseng.
4. Customization & Engineering Support
● Likhetho tsa li-diameter tse fapaneng, li-profiles tse fapaneng, botenya ba ho roala, le likarolo tsa ho tiisa.
● Therisano ea theknoloji bakeng sa meralo e ikhethileng.
5. Fast Prototyping & Global Supply
● Tlhahiso e potlakileng ea lisampole, tsamaiso ea lefatše lohle, le linako tsa ho etella pele tse tšepahalang.
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Lebenkele la Lihlahisoa tsa Semixlab
