SiC Coated Epitaxial Susceptor

Semixlab's SiC Coated Epitaxial Susceptor e entsoe ho fihlela litlhoko tse matla tsa 4H-SiC le 6H-SiC kholo ea epitaxial. E hahiloe ho tloha ho graphite e hloekileng 'me e sirelelitsoe ka seaparo sa SiC se laoloang hantle, susceptor e fana ka botsitso ba mocheso, botšepehi ba lik'hemik'hale, le ho tiea ha moralo ho bohlokoa bakeng sa lisebelisoa tse tsoetseng pele tsa SiC epitaxial libakeng tse phahameng tsa tlhahiso ea lihlahisoa.

Bohareng ba filosofi ea moralo oa eona ke tlhokahalo ea ho tšoana ho tsitsitseng ha mocheso. The susceptor e sebetsa joalo ka pelo e futhumetseng ea sistimi ea epitaxy, e monya le ho aba mocheso ka ho lekana ho netefatsa taolo e nepahetseng ea boemo ba mocheso. Ho tsitsisa hona ha thempereichara ke motheo bakeng sa ho fihlela sekhahla sa kholo e ts'oanang, kenyelletso e tsitsitseng ea dopant, le botenya bo sa feto-fetoheng holim'a bokaholimo. Bakeng sa lisebelisoa tsa SiC-moo esita le li-gradients tse nyenyane tsa mocheso li ka susumetsang ho hasana ha sefofane sa basal kapa ho etsa hore ho be le liphetoho tsa morphological-ts'ebetso ea mocheso ea susceptor ka ho toba e bōpa boleng le ho pheta-pheta ha likarolo tsa epi tse sebelisoang ho MOSFETs, SBDs, JBS diode, le li-module tsa matla a tsoetseng pele.

Thepa ea SiC e sebelisoang ke Semixlab e fana ka thibelo e boima khahlanong le mefuta ea khase e senyang e kang HCl le silanes ea chlorinated, e sebelisoang haholo ho hatella bofokoli nakong ea SiC epitaxy. Kantle ho lera lena le sireletsang, likaroloana tsa graphite li ne li tla hohola, li hlahise likaroloana, ’me li silafatse bokaholimo ba liphaphatha. Botenya ba ho roala bo entsoeng ka boenjiniere, sebopeho se phahameng sa microcrystalline, le litšobotsi tse matla tsa ho khomarela li netefatsa ts'ebetso ea nako e telele tlas'a libaesekele tse chesang haholo. Ka ho thibela tlhahiso ea likaroloana le ho senyeha ha thepa, susceptor e sireletsa bohloeki ba tikoloho ea epitaxial-e leng ntho ea bohlokoa ho fokotsa liphoso tsa stacking, likoti tse holim'a metsi, le mekhoa e meng ea bokooa e amanang le kholo ea SiC.

Semixlab's epitaxial susceptor e boetse e bapala karolo ea bohlokoa ho bopeng phallo ea khase ka har'a mochini. Jiometry ea eona e ntlafalitsoe bakeng sa ho holisa moeli oa laminar o tsitsitseng, o leka-lekaneng hantle holim'a bokaholimo, e nolofalletsang ho fana ka selelekela sa pele le kinetics e ts'oanang ea karabelo ho li-wafers tse ngata. Sebaka sena sa phallo se laoloang se lebisa ntlafatsong e ntlafalitsoeng ea li-intra-wafer le wafer-to-wafer, ho ts'ehetsa lifensetere tse thata tsa ts'ebetso le tlhahiso e phahameng ea tlhahiso.

Ho tšepahala le ho pheta-pheta ka ho lekana ho bohareng ba moralo. Semixlab e 'ngoe le e' ngoe ea Semixlab e entsoe ka ho nepahala ho tiileng, litekanyetso tsa bohloeki ba thepa, le metrics ea botšepehi ba ho roala e tiisitsoeng ka tlhahlobo ea optical, thermographic, le microstructural. Sena se tiisa hore li-susceptors li sebetsa ka mokhoa o ts'oanang ho li-batch tsa tlhahiso, ho fokotsa ho hoholeha ha calibration, ho fokotsa nako, le ho ts'ehetsa nako e atolositsoeng ea lisebelisoa.

Ka motsoako ona o kopantsoeng oa ho nepahala ha mocheso, ho tšoarella ha lik'hemik'hale, botsitso ba mochine, le ts'ebetso e fokolang ea tšilafalo, Semixlab SiC Coated Epitaxial Susceptor e fana ka motheo o tšepahalang bakeng sa moloko o latelang oa 4H-SiC le 6H-SiC epitaxy. E etselitsoe masela a phahamisang tlhahiso ea lisebelisoa tsa motlakase tsa SiC le ho batla likarolo tse nolofalletsang kholo ea epitaxial e ts'epahalang, e phetoang, e ts'oanang e phahameng.

Ka boiphihlelo bo tebileng ba Semixlab ba boenjiniere ba thepa ea semiconductor le lisebelisoa tsa ts'ebetso, susceptor e eme e le sesebelisoa sa bohlokoa bakeng sa ts'ebetso e phahameng ea lisebelisoa, chai e ntlafalitsoeng, le ts'ebetso e tsitsitseng ea nako e telele ea tlhahiso. Semixlab e amohela lipotso tsa hau ka nako efe kapa efe 'me e tšepa ka tieo ho ba molekane oa hau oa nako e telele Chaena.