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Likarolo tse koahetsoeng ka halofo ea khoeli tsa SiC
Likarolo tsa LPE Half Moon ke likarolo tsa reactor tse entsoeng ka nepo tse etselitsoeng tikoloho ea semiconductor epitaxy ea mocheso o phahameng. Li entsoe ka graphite e hloekileng haholo ea isostatic 'me li sirelelitsoe ke sekoahelo se teteaneng sa SiC, likarolo tsena li bapala karolo ea bohlokoa ho ntlafatseng kabo ea tšimo ea mocheso, ho tsitsisa matla a phallo ea khase, le ho fokotsa tšilafalo ea likaroloana ka har'a litsamaiso tsa epitaxy tsa LPE, CVD, le MOCVD. Geometry ea tsona ea half-moon e ntlafalitsoe ka ho khetheha ho ntlafatsa ho tšoana ha ts'ebetso, ho fokotsa litlamorao tsa bohale, le ho ntlafatsa boleng ba lera la epitaxial bakeng sa lits'ebetso tse hlokang thuso tse kenyeletsang lisebelisoa tsa Si, SiC, le GaN. Re labalabela ho fumana lipotso tsa hau tse ling.
Tlhaloso
Likarolo tsena tse koahetsoeng ka halofo ea khoeli tse koahetsoeng ke SiC ha e le hantle ke likarolo tsa graphite tse nepahetseng tse sebelisoang ho epitaxy ea SiC e mochesong o phahameng. Hang ha li kentsoe ka har'a sebaka se chesang sa reactor, li thusa ho boloka kamore e tsitsitse, ho boloka botsitso ba mocheso, le ho tšehetsa phallo e tsitsitseng ea khase nakong ea tlhahiso e telele.
Li entsoe ka graphite e hloekileng haholo e nang le sekoahelo se teteaneng sa CVD SiC holimo. Haeba u sebelisa sethala sa reactor se lumellanang le litsamaiso tsa epitaxy tsa mofuta oa LPE SpA, likarolo tsena li ka sebetsa e le tse nkeloang sebaka ka kotloloho kapa tsa fetoloa ha ho hlokahala.
Features senotlolo
-High-bohloeki isostatic graphite substrate
-Sekoahelo se sireletsang sa CVD SiC se teteaneng
-Khanyetso e ntle khahlanong le ho thothomela ha mocheso
-Tlhahiso ea likaroloana tse tlase e sebetsa
-Sekoahelo se lula hantle
- E sebetsa hantle bakeng sa epitaxy ea potoloho e telele
Re fana ka eng?
Re etsa likarolo tse 'maloa tsa reactor tse lumellanang le meaho ea kamore ea setaele sa LPE:
Likarolo tse halofo ea khoeli
-Likoahelo tsa tšireletso
-Likarolo tsa tataiso ea phallo
-Likarolo tsa tšehetso tsa Wafer
-Mehele e sireletsang
Likopano tsa graphite tse ikhethileng
difeme
Karolo ka 'ngoe e qala ka ho etsoa ka nepo ho tsoa mefuteng e khethiloeng ea graphite, ebe e manehoa ka CVD SiC, 'me qetellong e hlahlojoa litekanyo. Re laola botenya ba ho koahela, boemo ba bokaholimo, le litekanyo tsa bohlokoa ho netefatsa ts'ebetso e tsitsitseng maemong a tlhahiso ea semiconductor.
Tšebeletso ea Tloaelo
Re ka thusa ka:
-OEM tlhahiso ea sebaka
-Ho iketsetsa lintho ho latela litšoantšo tsa hau
-Boenjiniere bo fapaneng ho tsoa disampoleng
Tšehetso ea tlhahiso ea sehlopha
songolo
Mekhoa e Tloaelehileng ea Tekheniki
| paramethara | Boleng bo tloaelehileng |
| Boitsebiso ba Base | Graphite e sa fetoheng e hloekileng haholo |
| barbotage | CVD SiC |
| Ho koahela Bohloeki | > 99.99999% |
| Botenya (Graphite) | 1.75 - 1.90 g/cm³ |
| bueloang Mocheso | ho fihlela ho 2000°C+ |
| Ho roala botenya | 50 – 200 μm (e ka fetoloa) |
| Bokhopo ba Sefahleho (Ra) | E laoloa ka kopo |
| Matla a ho khomarela | Ha ho delamination tlas'a mocheso oa libaesekele |
| Khanyetso ea Lik'hemik'hale | E tsitsitse ka har'a likhase tse nang le H₂, Si |
dikopo
Likarolo tsena li sebelisoa haholo ho:
-Li-reactor tsa SiC epitaxy
-Sesebelisoa sa CVD sa semiconductor
-Mekhoa ea kholo ea kristale e nang le mocheso o phahameng
Li loketse haholo li-platform tsa reactor tse lumellanang le lisebelisoa tsa LPE SpA epitaxy.
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