Ⅰ. Ke maemo afe a ts'ebeliso ea lihlahisoa tsa silicon carbide ceramic?

Li-ceramics tsa Silicon carbide (SiC) li sebelisoa haholo likarolong tsa mantlha tsa lisebelisoa tsa bohlokoa tsa ts'ebetso indastering ea semiconductor le liindasteri tsa photovoltaic ka lebaka la ho hanyetsa mocheso o phahameng haholo, ho hanyetsa kutu, conductivity e phahameng ea mocheso le coefficient e tlase ea ho atolosa mocheso. A latelang ke maemo a ikhethileng a ts'ebeliso ea lihlahisoa tse tloaelehileng:

Sekepe sa silicon carbide

mosebetsi:

SiC Boat e atisa ho sebelisoa ho jara liphaphatha (tse kang li-wafers tsa silicon kapa li-silicon carbide wafers) bakeng sa ho fetisoa le ho behoa maemong a mocheso o phahameng.

Liketsahalo tsa kopo:

Sebaka sa ts'ebetso ea semiconductor: Liboping tse pharalletseng le libopi tsa oxidation, seketsoana se hloka ho sebetsa ka mokhoa o tsitsitseng nako e telele sebakeng sa mocheso o phahameng o kaholimo ho 1000 ° C ho qoba ho senyeha kapa ho silafala ha sephaphatha ka lebaka la khatello ea mocheso.

Indasteri ea Photovoltaic: Ka thepa ea PECVD (plasma enhanced chemical vapor deposition), seketsoana se sebelisetsoa ho tšehetsa liphaephe tsa silicon ho kenya filimi ea silicon nitride anti-reflection, 'me se hloka ho mamella bombardment ea plasma e phahameng-frequency le tikoloho ea mocheso o phahameng.

Silicon carbide furnace tube (SiC Reaction Tube)

Mosebetsi: E le karolo ea mantlha ea kamore ea karabelo ea mocheso o phahameng, e fana ka sebaka se ts'oanang sa mocheso le tikoloho e sa sebetseng ea lik'hemik'hale.

Liketsahalo tsa kopo:

Indasteri ea semiconductor: Sebōping sa oxidation, tube ea sebōpi e hloka ho lula e tsitsitse nako e telele sebakeng sa mouoane oa oksijene kapa oa metsi ho qoba ho lokolloa ha litšila ka lebaka la oxidation kapa corrosion.

Indasteri ea Photovoltaic: Ka seboping sa phallo, tube ea sebōpi e sebelisoa bakeng sa ts'ebetso ea phosphorous (e kang ho lokisa lisele tsa PERC), 'me hoa hlokahala ho hanela ho bola ha khase e nang le asiti moeeng oa POCl₃.

Cantilever Paddle le Boat Holder

Mosebetsi: Seketsoana sa cantilever se sebelisetsoa ho fetisetsa seketsoana sa kristale ka bohona, 'me sets'oants'o sa sekepe se sebelisetsoa ho lokisa boemo ba sekepe sa kristale.

Liketsahalo tsa kopo:

Ts'ebetsong ea semiconductor wafer, paddle cantilever e hloka ho boloka matla a phahameng a mochine nakong ea ho phahamisa le ho theola ka potlako ho qoba ho robeha ka lebaka la mokhathala o chesang; motho ea tšoereng seketsoana o hloka ho boloka ho nepahala ha geometri ka mocheso o phahameng ho thibela ho kheloha ha wafer.

Ⅱ. Litaelo tsa ts'ebeliso ea lisebelisoa tsa silicon carbide indastering ea photovoltaic le semiconductor ke life?

Lisebelisoa tsa mantlha tsa lihlahisoa tsa silicon carbide ceramic li tsepamisitsoe lihokelong tsa mefuta e 'meli ea lisebelisoa:

Matšoao a ts'ebetso	Lisebelisoa tsa graphite	Lisebelisoa tsa silicon carbide
Botsitso bo phahameng ba mocheso	Ho bonolo ho oxidize (> 500 ° C e hloka tšireletso ea ho roala)	Anti-oxidation (e ka mamella moea oa oxidizing 1600 ° C nako e telele)
Ho inertness ka lik'hemik'hale	Ho bonolo ho silafatsoa ke likhase tse nang le asiti (joalo ka Cl₂, POCl₃)	Acid le alkali corrosion resistance (ho kenyeletsoa le mecha ea litaba e senyang joalo ka HF, HNO₃)
Kotsi ea tšoaetso ea likaroloana	Ho bonolo ho hlahisa tšilafalo ea lerōle, e bakang bofokoli ba liphaphatha	Sebaka se teteaneng, ha ho kotsi ea ho tšolloa ha likaroloana
Matla a ho sebetsa	Ho bonolo ho holofala ka mocheso o phahameng (coefficient e phahameng ea katoloso ea mocheso)	Boima bo phahameng (Mohs hardness 9.2), khanyetso e matla ea mocheso oa mocheso
Ho khanna ho chesang	Anisotropy, kotsi e kholo ea ho chesa haholo sebakeng	Mocheso o phahameng oa mocheso (120 W / m`K), sebaka sa mocheso o ts'oanang

Indasteri ea Photovoltaic

Sebōpi sa PECVD: se sebelisetsoang ho kenya lifilimi tse thibelang maikutlo (tse kang silicon nitride). Likarolo tsa silicon carbide li hloka ho hanela bombardment ea ion e bakoang ke ho tsoa ha khanya sebakeng sa plasma ea 400 ~ 500 ° C, ha e ntse e qoba tšilafalo ea filimi.

Diffusion furnace: e sebedisetswang phosphorous/boron diffusion ho etsa mahokelo a PN. Li-tubes tsa silicon carbide sebōpi li hloka ho mamella ho bola ho tloha POCl₃ kapa BBr₃ likhase ho 800 ~ 1000 ° C le ho netefatsa hore doping e tšoana.

Indasteri ea semiconductor

Sebopi sa diffusion le sebopi sa oxidation:

Diffusion furnace: e sebedisoang bakeng sa ts'ebetso ea ho koala ka mor'a ho kenngoa ha ion. Likepe tsa silicon carbide crystal li hloka ho qoba ho lokolla litšila tsa tšepe (tse kang Fe, Ni), ho seng joalo li tla baka ho eketseha ha sephaephe sa ho lutla ha hona joale.

Sebopi sa oxidation: holisa likarolo tsa silicon dioxide sebakeng se omeletseng sa oksijene kapa tikolohong e metsi. Li-tubes tsa silicon carbide sebōpi li hloka ho boloka moea o fokolang oa oksijene mocheso o phahameng oa 1200 ° C ho thibela botenya bo sa lekaneng ba oxide layer.

Ⅲ. Melemo ea thepa ea silicon carbide ke efe ho feta graphite?

Leha lisebelisoa tsa graphite li na le melemo ea theko e tlase le ts'ebetso e bonolo, li tlase haholo ho feta silicon carbide mefuteng e latelang ea bohlokoa:

Tlhahlobo e khethehileng:

Ho ea ka lipalo-palo tsa 'nete tsa tlhahiso ea Veteksemicon, seboping sa semiconductor diffusion, seketsoana sa graphite se hloka ho nkeloa sebaka ka mor'a likhoeli tse ling le tse ling tse 3, ha sekepe sa silicon carbide se ka tšoarella lilemo tse fetang 2,' me lihlahisoa tsa lihlahisoa li eketsoa ka 5% ~ 10%.

Ho ea ka lintlha tsa tlhahiso tse fanoeng ke Semixlab, Ts'ebetsong ea photovoltaic PECVD, silicon carbide cantilever paddle e ka eketsa katleho ea betri ka 2% ~ 5% ka lebaka la ho ba sieo ha tšilafalo ea likaroloana.

Ⅳ. hobaneng u khetha Semixlab?

Semixlab ke moetsi le mofani oa thepa ea ka sehloohong Chaena ea 'nileng a shebana le lipatlisiso tsa liphahlo tsa graphite le SiC ka lilemo tse 20. Kamora lilemo tsa lipatlisiso tsa tekheniki le nts'etsopele, ts'ebetso ea rona ea ho roala SiC e ka fihlela bohloeki bo fetang 99.98%, hape re ka etsa lihlahisoa tsa silicon carbide tsa bohloeki bo fapaneng le theko ho latela maemo a kopo ea hau. Haeba o hloka sehlahisoa se phahameng sa bohloeki, joalo ka ho ikopanya ka kotloloho le lihlahisoa tsa semiconductor wafer, re ka fana ka CVD SiC coating, CVD TaC coating le lits'ebetso tse ling tse holim'a thepa ea substrate ho fihlela litlhoko tsa hau tse fapaneng tse thata tsa tekheniki.