I. LED Epitaxial Susceptor ke eng?

Epitaxial susceptor ke sesebelisoa sa mantlha se sebelisoang lits'ebetsong tsa semiconductor epitaxy. Ka tšepe-organic chemical vapor deposition (MOCVD) kapa molecular beam epitaxy (MBE) thepa e hlokahalang bakeng sa kholo ea epitaxial ea LED chips, mosebetsi oa suscepter ke ho tšehetsa le ho futhumatsa sephaphatha (hangata sapphire, SiC, kapa silicon) e le substrate, ho e tlisa mocheso o matla o phahameng o hlokahalang bakeng sa kholo ea epitaxial chamber le ho etsa hore ho be le mocheso o phahameng oa epitaxial. ho beha filimi e nyane.

Ka mantsoe a bonolo feela, ho tšoana le "sethala se phahameng sa ho futhumatsa le ho tšehetsa" sebōping sa MOCVD, moo lesela le hlahisang leseli la LED le hōlang.

II. Karolo e khethehileng le Kopo ho Mekhoa ea Epitaxial

Sebapali se bapala karolo ea bohlokoa ts'ebetsong ea kholo ea epitaxial, e amang ts'ebetso, ho ts'oana le litšenyehelo tsa chip ea ho qetela ea LED.

1. Karolo: Sepalangoang sa Wafer le Heating Core

● Tšehetso ea Substrate: E na le li-grooves kapa lifofane tse entsoeng hantle bakeng sa ho beha li-wafers tse ngata tsa substrate (mohlala, 2-inch, 4-inch, 6-inch).

● Mocheso o Phahameng oa Mocheso: Terei e futhumatsa sephaphatha ho fihlela mocheso oa sona oa ho hōla (hangata o ka holimo ho 1000 ° C bakeng sa li-LED tse thehiloeng ho GaN) ho sebelisoa mekhoa e kang ea radio frequency (RF) induction heat kapa resistant heat. Terei ke mokhoa o tobileng oa ho fetisetsa mocheso ho sephaphatha.

2. Likopo: Ho netefatsa boleng le ho tšoana ha lera la epitaxial

● Temperature Uniformity: Botenya le sebopeho sa sebopeho sa epitaxial layer se na le maikutlo a feteletseng ho mocheso oa kholo ea epitaxial. Moralo oa terei o tlameha ho netefatsa mocheso o ts'oanang haholo oa holim'a metsi; ho seng joalo, e tla lebisa phetohong ea wavelength le ho khanya ho sa tsitsang libakeng tse fapaneng holim'a sephaphatha.

● Khanyetso ea Corrosion ea lik'hemik'hale: Nakong ea MOCVD, tray e pepesehetse likhase tse sebetsang haholo (tse kang NH3, TMGa, TMIn, joalo-joalo) le libaka tse phahameng tsa mocheso. E tlameha ho ba le khanyetso e ntle ea kutu ho thibela ho fetoha ha litšila ho silafatsa lera la epitaxial.

Bokhoni ba Mocheso le Botsitso ba Mocheso: Terei e hloka mocheso o lekaneng oa mocheso ho boloka mocheso o nepahetseng o hlokoang ke ts'ebetso le ho arabela ka potlako liphetohong tsa mocheso, ho netefatsa hore ts'ebetso e pheta-pheta le botsitso.

III. Lisebelisoa tse ka sehloohong tsa lisebelisoa tsa LED

Hajoale, li-suceptors tsa epitaxial tsa LED li arotsoe haholo ka mekhahlelo e 'meli:

1. Graphite Susceptors:

Likarolo: Bohloeki bo phahameng, bo bonolo ho sebetsa, litšenyehelo tse batlang li le tlase.

Lisebelisoa: E sebelisoa haholo-holo bakeng sa epitaxy ea LED (MOCVD) e thehiloeng ho GaN-based blue/white LED.

Bothata: Ho thibela graphite hore e se ke ea sebetsa ka likhase tse sebetsang ka mocheso o phahameng le ho lokolla litšila tsa carbon tse silafatsang lesela la epitaxial, bokaholimo ba graphite suceptor bo tlameha ho apesoa ka lera la SiC ho sebelisa lik'hemik'hale tsa mouoane (CVD) kapa mekhoa ea ho qoelisoa.

2. Metal Susceptors:

Likarolo: Tse kang li-alloys tantalum (Ta) kapa molybdenum (Mo), tse nang le bohloeki bo phahameng le conductivity e ntle ea mocheso.

Lisebelisoa: E sebelisoa haholo bakeng sa phosphide (joaloka GaP) e khubelu le e mosehla epitaxy ea LED.

IV. Mathata a Maholo

Hona joale, mathata a bohlokoa a tobaneng le li-pallets tsa epitaxial li tsepamisitsoe likarolong tse tharo: ho tšoana, bophelo ba tšebeletso, le boholo bo ntseng bo eketseha.

diphepetso tse	Litaba tse ikhethileng	Liphello tsa Tekheniki
1.Mocheso o tšoanang	Ho laola phapang ea mocheso pakeng tsa moeli le setsi sa literei tse kholo (mohlala, tse fetang 800mm ka bophara) ho thata.	Sena se lebisa ho botelele bo bobe, botenya, le ho ts'oana ha sebopeho lipakeng tsa li-wafers (WIW & WTW), ho fella ka ho fokotseha ha lihlahisoa tsa lihlahisoa.
2.Bophelo le Tšilafalo	Ho petsoha, ho phunya, kapa ho bola ha SiC e koahetsoeng ka tlas'a khatello e phahameng ea mocheso ho pepesa graphite e ka tlaase.	Sena se khutsufatsa bophelo ba literei, tse hlokang ho nkeloa sebaka khafetsa le ho eketsa litšenyehelo tsa tlhokomelo; ho pepeseha ha graphite ho silafatsa lera la epitaxial haholo.
3. Ho phahamisa le ho eketsa boholo (Scaling)	Ka boholo ba liphaephe tse ntseng li eketseha ho tloha ho lisenthimithara tse 2 ho isa ho tse 6 esita le lisenthimithara tse 8, 'me palo ea liphaephe tse jarollotsoeng ka nako e le' ngoe e ntse e eketseha.	mojaro oa mocheso holim'a terei o ntse o eketseha, tsela ea ho tsamaisa mocheso e fetoha e rarahaneng haholoanyane, 'me bothata ba ho qapa le ho etsa tlhahiso bo eketseha ka potlako.
4.Matla a Phallo ea Khase	Li-grooves le libopeho tse holim'a terei li ama sebaka sa phallo ea khase ka har'a sekoti sa MOCVD.	Tšimo e sa tsitsang kapa e sa tsitsang ea phallo ka ho toba e lebisa ho lipalangoang tse sa tšoaneng tsa li-reactants, tse amang boleng ba epitaxial layer.

V. Theknoloji Tharollo

Ho rarolla mathata a boletsoeng ka holimo, tsoelo-pele ea theknoloji indastering e shebana haholo le lintlha tse latelang:

1. Ntlafatso ea Sebopeho sa Tray le Taolo ea Tšimo ea Thermal

Segmented Segmented Heating and Dynamic Temperature Control: Ho sebelisa libaka tse futhumatsang tse laoloang ka boikemelo (tse kang li-thermocouple arrays) ho etsa phetoho ea nako ea sebele, e matla setsing sa terei le mathōkong ho fokotsa tahlehelo ea mocheso le ho fumana matšeliso a phahameng ka ho fetesisa a mocheso.

Moralo oa Sebopeho sa ka Hare sa Lisebelisoa tsa Terei: Ho sebelisa khekhe ea linotši, letlooeng, kapa meralo ea meaho e nang le meaho e mengata ho leka-lekanya matla a mocheso le ho tsamaisa mocheso, ho netefatsa phetisetso e potlakileng le e ts'oanang ea mocheso ho tloha tlase ho ea holimo.

2. SiC Coating Technology Upgrade (The Critical Solution)

Liaparo tsa Ts'ebetso tse Kenyellelitsoeng: Ho sebelisa liphahlo tse nang le mefuta e mengata kapa li-gradient tsa sebopeho, tse kang ho eketsa lesela la "buffer" pakeng tsa graphite le lesela le leholo la SiC, ho bapisa phapang pakeng tsa coefficient of thermal expansion (CTE) pakeng tsa graphite le SiC, kahoo ho fokotsa haholo khatello ea mocheso le ho lieha ho senya.

High-Density, Low-Porosity CVD SiC: Ka ho ntlafatsa ts'ebetso ea CVD deposition, lifilimi tsa SiC tse nang le porosity e tlase haholo le bohloeki bo phahameng haholo lia lokisoa, li ntlafatsa ho hanyetsa ha tsona le letsoalo, le ho lelefatsa bophelo ba literei.

3. Patlisiso e Ncha ea Boitsebiso

Novel Composite Material Trays: Ho lekola lisebelisoa tse kopaneng tse nang le mocheso o phahameng oa mocheso, letsoalo le tlase, le coefficient ea katoloso ea mocheso e haufi le ea li-substrates tsa GaN (tse kang carbon fiber e matlafalitsoeng ke carbon/silicon carbide CFC/SiC composite) ho ntlafatsa ts'ebetso le nako ea bophelo.

Li-trays tsa All-Ceramic: Lits'ebetsong tse ling tse khethehileng tsa epitaxial, li-trays li etsoa ho sebelisoa li-ceramics tse phahameng tsa monolithic (tse kang AlN kapa SiC ceramics), ho felisa ka ho feletseng kotsi ea tšilafalo ea graphite. Leha ho le joalo, mokhoa ona o theko e boima haholo ebile o thata ho o etsa mochini.

Semixlab SiC Coated Graphite Susceptor ke karolo e entsoeng ka mokhoa o nepahetseng e etselitsoeng lisebelisoa tse tsoetseng pele tsa LED epitaxy le MOCVD. E hahiloe ka sekhahla se phahameng graphite ea isostatic substrate ebile e sirelelitsoe ke bohloeki bo phahameng CVD silicon carbide (SiC) ho roala, susceptor ena e fana ka sethala se tsitsitseng sa mocheso bakeng sa ho futhumala ha seaparo sa seaparo sa seaparo le ho hloeka ha kamore ea nako e telele tlas'a maemo a feteletseng a ho sebetsa a fetang 1100 ° C. E mong le e susceptor undergos e nepahetseng machining le barbotage ho ts'oana taolo ho finyella Ultra-boreleli holim roughness ka tlase ho Ra 0.2 μm, ho fokotsa particle adhesion le moferefere khase ka hare MOCVD reactor. Moralo ona o ntlafatsa ho ts'oana ha epitaxial layer, o lelefatsa bophelo ba karolo mme o fokotsa makhetlo a tlhokomelo. Re lebelletse patlisiso ea hau e eketsehileng.