Lesale la Moriti oa Quartz 200mm

Lesale la Moriti la Quartz 200mm (Karolo ea Nomoro ea 0200-10445) ke karolo ea semiconductor e entsoeng ka mokhoa o nepahetseng e etselitsoeng lisebelisoa tsa ho sebetsana le wafer tsa 200 mm. E bapala karolo ea bohlokoa tšireletsong ea moeli oa wafer, taolo ea kabo ea plasma, le phokotso ea tšilafalo ea kamore nakong ea lits'ebetso tsa ho hlaba le ho beha plasma.

E entsoe ka quartz e kopantsoeng e hloekileng haholo, lesale lena la moriti le fana ka khanyetso e ntle khahlanong le mafome a plasma, botsitso ba mocheso, le maemo a litšila a tlase haholo, e leng se etsang hore e be e loketseng libaka tse hlokang tlhahiso ea semiconductor.

Ho Semixlab, re fana ka dikarolo tsa quartz tse nepahetseng haholo tse entsweng ho fihlela maemo a tiileng a mamello le bohloeki a hlokahalang bakeng sa disebediswa tsa tshebetso ya semiconductor.

Tlhahlobo ea Sehlahiswa

Lesale la Moriti la Quartz la 0200-10445 le kentswe ho potoloha bohale ba wafer kahare ho phaposi ya tshebetso. Le etselitsoe ho fana ka moriti o laolwang wa wafer perimeter, ho thusa ho boloka maemo a tsitsitseng a tshebetso ho pholletsa le wafer.

Karolo ena e sebelisoa haholo likamoreng tsa etch le litsamaisong tsa ts'ebetso ea plasma, moo taolo e nepahetseng ea moeli e leng ea bohlokoa bakeng sa ho fihlela chai e phahameng ea wafer le ho tšoana ha ts'ebetso.

Likarolo tse Tloaelehileng tsa Sebopeho

Lesale la Moriti la Quartz la 0200-10445 le entsoe ka litšobotsi tsa sebopeho tse ntlafalitsoeng ka ho khetheha bakeng sa kopanyo ea kamore ea semiconductor.

Bophara ba ka Hare bo Tšoanang le ba Wafer: Bophara ba kahare bo etselitsoe hantle ho lekana le bohale ba wafer ba 200 mm, ho netefatsa boemo bo nepahetseng le litlamorao tse tsitsitseng tsa moriti.

Jiometri e Entsoeng ka ho Sebetsa ka ho Sebetsa: Karolo ena e entsoe ka mamello e tiileng ho netefatsa ho lumellana hantle le likarolo tse potolohileng kamore le ho boloka maemo a ts'ebetso a tsitsitseng.

Li-Notches tsa ho Lokisa: Meralo e mengata e kenyelletsa li-notches tsa ho hokahanya kapa likarolo tsa ho beha sebaka ho netefatsa hore ho kenngoa ho nepahetse ka har'a lisebelisoa.

Botenya bo Hlophisitsoeng: Botenya ba lesale bo laoloa ka hloko ho fana ka tekano e nepahetseng pakeng tsa matla a mechini le ts'ebetso ea tšireletso ea plasma.

Smooth Surface Finish: Sebaka se bentšitsoeng sa boleng bo holimo se fokotsa tlhahiso ea likaroloana 'me se ntlafatsa ho lumellana le tikoloho ea kamore e hloekileng.

Karolo ho Lisebelisoa tsa Semiconductor

Lesale la Moriti la Quartz le bapala karolo ea bohlokoa ho bolokeng maemo a tsitsitseng a ts'ebetso ka har'a likamore tsa plasma.

1. Taolo ea Ts'ebetso ea Wafer Edge

Nakong ea ho hlaba kapa ho beha plasma, sebaka sa moeli oa wafer se ka ba le ho pepesehela plasma e sa tšoaneng. Lesale la moriti le fana ka tšireletso e laoloang ea potoloho ea wafer, e thibelang ho hlaba kapa ho beha plasma e feteletseng moeling.

Sena se thusa ho ntlafatsa:

● ho tšoana ha bohale ba wafer

● mokhoa oa ho pheta-pheta oa ts'ebetso

● tlhahiso ea sesebelisoa

2. Tšireletso ea Likarolo tsa Kamore

Lesale la moriti le boetse le sireletsa likarolo tsa kamore ea bohlokoa tse kang:

● chuck ea motlakase (ESC)

● setsi kapa hitara

● libaka tse potolohileng kamore

Ka ho thibela ho pepesehela le ho beha plasma ka kotloloho, e fokotsa ho tsofala mme e eketsa nako ya bophelo ba dikarolo tsena tsa bohlokwa.

3. Ho Tsitsisa Kabo ea Plasma

Sebopeho sa lesale se thusa ho laola sheath ea plasma haufi le moeli oa wafer, e leng se tlatsetsang ho teteaneng ha plasma ho lekanang haholoanyane le taolo e ntlafetseng ea ts'ebetso ho pholletsa le wafer.

4. Phokotso ea Likaroloana

Ka ho laola libaka tsa ho beoa le ho sireletsa libaka tse bonolo, lesale la moriti le thusa ho fokotsa ho thehoa ha likaroloana ka har'a kamore, e leng ntho ea bohlokoa bakeng sa tlhahiso ea semiconductor e hlahisang chai e ngata.

Lintho tse bonahalang le Melemo ea Bohlokoa

Lesale la moriti le etsoa ka ho sebelisa quartz e kopantsoeng e hloekileng haholo (SiO₂), e leng thepa e sebelisoang haholo tlhahisong ea semiconductor ka lebaka la thepa ea eona e ikhethang ea lik'hemik'hale le mocheso.

Khanyetso e Phahameng ea Plasma:

Quartz e bontša khanyetso e ntle haholo tikolohong ea plasma e thehiloeng ho fluorine le chlorine, e sebelisoang hangata lits'ebetsong tsa ho betla tsa semiconductor. Sena se netefatsa bophelo bo bolelele ba ts'ebeletso le ts'ebetso e tsitsitseng.

Tšilafalo e Tlase ka ho Fetisisa:

Quartz e hloekileng haholo e na le maemo a tlase haholo a litšila tsa tšepe, e thusang ho fokotsa likotsi tsa tšilafalo ka phapusing ea ts'ebetso le ho boloka boleng ba wafer.

Superior Thermal Stability:

Lisebelisoa tsa Quartz li fana ka khanyetso e ntle ea ho thothomela ha mocheso le botsitso ba mocheso o phahameng, e leng se lumellang lesale la moriti ho sebetsa ka mokhoa o tšepahalang tlas'a lipotoloho tse pheta-phetoang tsa ho futhumatsa le ho pholisa likamoreng tsa plasma.

Boikemisetso bo Botle ba Lik'hemik'hale:

Quartz e lula e tsitsitse ka lik'hemik'hale maemong a thata a ts'ebetso ea semiconductor, e fokotsa ho senyeha le tlhahiso ea likaroloana.

Precision Machinability:

Ka mekhoa e tsoetseng pele ea ho sebetsa le ho bentša, quartz e ka finyella mamello e tiileng le lipheletso tse boreleli tsa bokaholimo, tse leng tsa bohlokoa bakeng sa maemo a tsitsitseng a ho sebetsana le wafer.