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Lisebelisoa tse Kopantsoeng tsa Khabone le Khabone
Lisebelisoa tsa Semixlab tsa Carbon-Carbon Composite li entsoe bakeng sa maemo a mocheso a hlokang boiteko a tlhahiso ea semiconductor ea SiC le GaN, li fana ka matla a ikhethang a mocheso o phahameng, botsitso bo phahameng ba litekanyo, le ts'ebetso e tlase haholo ea ho se hloeke. E etselitsoe ho sebelisoa ho li-reactor tsa epitaxy le litsamaiso tsa annealing tsa ts'ebetso ea SiC, likarolo tsena tsa C/C li fana ka tšehetso e tšepahalang ea mechini, ho tšoana ho tsitsitseng ha mocheso, le bophelo bo bolelele ba ts'ebetso tlas'a mocheso o feteletseng o fetang 1500–2000 °C. Litšobotsi tsa tsona tse tlase tsa ho tima khase le ho hanyetsa hantle ho thothomela ha mocheso li etsa hore li be ntle bakeng sa meaho ea li-heater, li-wafer carriers, li-insulation assemblies, le liforeimi tse tšehetsang mojaro ka har'a MOCVD, CVD, le lisebelisoa tsa annealing tse nang le matla a mangata. Re amohela lipotso tsa hau.
Tlhaloso
Lisebelisoa tsa Semixlab tsa Carbon-Carbon Composite (C/C) li entsoe bakeng sa litlhoko tse feteletseng tsa mocheso tsa tlhahiso ea semiconductor ea moloko o latelang, li fana ka botsitso bo ikhethang ba mechini, ho nepahala ha boholo ba nako e telele, le mamello ea mocheso e sa bapisoeng le e meng libakeng tse nang le mocheso o phahameng le bohloeki bo phahameng.
Ho li-reactor tsa kholo ea epitaxial tsa SiC le GaN, metsoako ea C/C e sebetsa e le meaho ea bohlokoa e jarang mojaro le ea taolo ea mocheso lipoleiting tsa hitara, liforeimi tsa bajari, lisebelisoa tsa tšehetso le likopano tsa ho kenya mocheso. Sebopeho sa bona se ikhethang sa microstructure se fana ka matla a ikhethang a phahameng, phetoho e tlase haholo ea mocheso, le khanyetso e phahameng ea mokhathala tlas'a lipotoloho tsa mocheso tse phetoang tsa 1500–1800 °C, ho netefatsa boemo bo tsitsitseng ba wafer le masimo a mocheso a tsitsitseng nakong eohle ea ho matha ha epitaxy nako e telele.
Ha e sebetsoa ka mahlale a ikhethileng a tlhoekiso le ho holisa, thepa ea Semixlab ea C/C e fihlella maemo a litšila a tlase haholo a loketseng tikoloho ea SiC le GaN MOCVD, CVD, le PVT, e fokotsa likotsi tsa tšilafalo le ho tšehetsa kholo ea kristale e ts'oanang boemong ba wafer le boule. Khanyetso e phahameng ea mocheso ea C/C e boetse e felisa mekhoa ea ho hloleha ha micro-fracture e tloaelehileng ho li-ceramics kapa graphite e tloaelehileng ha e etsoa lipotoloho tse potlakileng tsa ramp-up le cooling tse amanang le ts'ebetso ea epitaxial.
Ho annealing ya ts'ebetso ya SiC—hangata e etswang mochesong o fetang 1700 °C—Disebediswa tse Kopantsweng tsa Carbon-Carbon di sebetsa e le dikarolo tse matla tsa sebopeho, dikopano tsa hitara, le dikarolo tsa ho thibela mocheso ka hara dikamore tsa anneal tse nang le matla a mangata. Bokgoni ba tsona ba ho boloka matla a mechini a fetang 2000 °C, hammoho le ho se ntshe ha khase e ngata le ho se sebetse hantle ha dikhemikhale, di netefatsa tikoloho e hlwekileng le e laolwang ya mocheso e hlokahalang bakeng sa ts'ebetso ya dopant ho di-MOSFET tse tswetseng pele tsa SiC, di-diode le di-module tsa motlakase.
Ho fapana le graphite e tloaelehileng, thepa ea C/C e boloka botšepehi ba litekanyo nakong ea bophelo bo bolelele ba mocheso o phahameng, e nolofalletsa liprofaele tsa ts'ebetso ea dopant tse nepahetseng le tse ka phetoa, e fokotsa ho sisinyeha ha ho ts'oana ha annealing, le ho ntlafatsa ts'ebetso ea motlakase oa sesebelisoa ka kakaretso le chai.
Mokhoa oa boenjiniere oa Semixlab o kopanya meralo ea fiber e ikhethileng bakeng sa ts'ebeliso, bongata ba matrix bo etselitsoeng uena, le liphahlo tsa holim'a carbon tse nang le bohloeki bo phahameng tse sa hlokeng boikhethelo, tse lumellang likarolo tsa C/C ho fihlela litlhoko tse thata tsa lisebelisoa tsa epitaxy le annealing. Tsoelo-pele ena ea theknoloji e fella ka nako e telele ea bophelo, potoloho e fokotsehileng ea tlhokomelo, le ho tšoana ha mocheso ho ntlafetseng haholo.
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