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TaC Coated Pedestal support Plate
Joaloka moetsi ea ka sehloohong oa Chaena le mofani oa thepa ea TaC Coated Pedestal Support Plates, Semixlab TaC Coated Pedestal Support Plate e etselitsoe ho fana ka ts'ebetso e babatsehang libakeng tse tsoetseng pele tsa tlhahiso ea semiconductor tse kang CVD, epitaxy, le plasma etching systems. E etselitsoe maemo a feteletseng a mocheso le lik'hemik'hale, e fana ka sethala sa mocheso se tsitsitseng le se ts'oanang se ntlafatsang ka ho toba boleng ba liphaephe, ho lumellana ha deposition, le ts'ebetso ea ho ikatisa. Re amohela lipotso tsa hau.
Tlhaloso
Ho Semixlab Technology, rea hlokomela hore poleiti ea tšehetso ea pedestal e sebetsa e le e 'ngoe ea likarolo tsa bohlokoa ka ho fetisisa tsa meralo le tsa mocheso ka har'a likamore tse tsoetseng pele tsa semiconductor. Libakeng tse nang le mocheso o phahameng joalo ka epitaxy, CVD, le plasma etching system, pedestal ha e tšehetse feela sephaphatha kapa susceptor ka mochini, empa hape e bapala karolo ea makhaola-khang ho netefatsa ts'ebetso e nepahetseng ea mocheso, ts'ebetso e tsitsitseng ea lik'hemik'hale, le ts'ebetso e pheta-phetoang ho pholletsa le potoloho e 'ngoe le e 'ngoe ea tlhahiso.
E entsoe ka lisebelisoa tse phahameng tsa graphite 'me e koahetsoe ka likarolo tse tsoetseng pele tse kang Tantalum Carbide (TaC), poleiti ea tšehetso ea pedestal e sebetsa e le sebopeho se tsitsitseng sa mocheso pakeng tsa mochine oa ho futhumatsa le oafer. Tlhophiso ena e thusa ho arola mocheso o ts'oanang sebakeng sohle sa wafer-e leng ntho ea bohlokoa bakeng sa ho finyella litekanyetso tse tsitsitseng tsa ho hōla ha lifilimi, li-profiles tse laoloang tsa dopant, le ho fokotseha ho fokolang ha mekhoa ea epitaxial kapa deposition. Ts'ebetso e phahameng ea mocheso oa sebopeho sa motheo, e kopantsoeng le ho se sebetse hantle ha lik'hemik'hale tsa TaC, ho tiisa hore sethala se lula se tsitsitse 'me se sa bolaee esita le tlas'a ho palama baesekele khafetsa mochesong o fetang 1200 ° C.
Ka ntle ho taolo ea mocheso, pedestal support plate e boetse e sebetsa e le ntho ea bohlokoa ea ho laola tšilafalo. Nakong ea ts'ebetso ea plasma etching le CVD, tikoloho ea kamore hangata e kenyelletsa likhase tse sebetsang tse kang chlorine, fluorine, kapa silane. Mefuta ena e ka hlasela ka matla libaka tse sa sireletsoang, ea hlahisa lihlahisoa tse sa batleheng kapa likaroloana tse senyang chai e ngata. Ka ho kopanya seaparo se teteaneng le se ts'oanang sa TaC, Semixlab's pedestal solution e thibela ho senyeha ha thepa le ho senyeha ha likaroloana, ka tsela eo ho boloka sebopeho se hloekileng sa ts'ebetso le ho atolosa bophelo bohle ba tšebeletso ea hardware.
Ho feta moo, ho bata le ho nepahala ha mochini oa poleiti ea tšehetso ho tiisa boemo bo tsitsitseng ba li-wafer le sebaka se ts'oanang sa ts'ebetso - lintlha tse susumetsang ka kotloloho matla a phallo ea khase, kabo ea plasma le ho leka-lekana ha mocheso. Semixlab e tsoetseng pele ea ho qeta holim'a metsi le theknoloji ea ho laola ho lumellana ho lumella pedestal ho boloka polane ea sub-micron le maemo a holimo a tlase ho Ra 0.2 μm, ka katleho ho fokotsa bofokoli bo fokolang le ho se tšoane ha lifilimi nakong ea tlhahiso e phahameng haholo.
Ha e le hantle, poleiti ea tšehetso ea pedestal ha se sebopeho sa mochini feela - ke sesebelisoa sa mantlha sa ts'ebetso le ts'epahalo. Ka moralo o ntlafalitsoeng oa mocheso, thekenoloji e phahameng ea ho roala, le khetho e matla ea thepa, Semixlab Technology e fana ka likopano tsa maoto tse tšehetsang li-node tsa tlhahiso ea semiconductor tsa moloko o latelang, ho tloha lisebelisoa tse pharalletseng tse kang SiC le GaN ho isa lits'ebetsong tse tsoetseng pele tsa silicon epitaxy.
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