SiC Coated Epitaxial Susceptor for Wafer Processing

SiC Coated Epitaxial Susceptor ke karolo ea bohlokoa ts'ebetsong ea semiconductor wafer, haholo-holo mekhoeng ea kholo ea epitaxial joalo ka MOCVD, CVD, le LPE. E sebetsa e le sejana sa li-wafer ka har'a li-reactors tse phahameng tsa mocheso, susceptor e tiisa boemo bo tsitsitseng, mocheso o ts'oanang, le ts'ebetso e se nang tšoaetso, tse bohlokoa bakeng sa ho hlahisa li-epitaxial layers tsa boleng bo phahameng ho SiC le li-wafers tsa semiconductor tse kopantsoeng.

Mesebetsi ea Bohlokoa Ts'ebetsong ea Wafer

1. Nepahetseng Wafer Support

The susceptor e fana ka sethala se tsitsitseng sa li-wafers nakong ea kholo ea epitaxial. Ho nepahala ha eona ka boholo le ho batalla ha bokaholimo ho fokotsa ho feto-fetoha ha liphaephe kapa ho fetoha ha eona, ho etsa bonnete ba hore e behiloe ka mokhoa o ts'oanang holim'a bokaholimo bohle.

2. Optimized Thermal Management

Ka setsi sa graphite le seaparo se teteaneng sa SiC, susceptor e kopanya conductivity e phahameng ea mocheso le ho hanyetsa mocheso o phahameng. Sena se nolofalletsa:

● Ho futhumatsa le ho tsidifala ka potlako

● Kabo ea mocheso o tšoanang ho pholletsa le sephaphatha

● Taolo e ntlafetseng ea botenya ba epitaxial layer le profiles tsa doping

3. Corrosion & Contamination Resistance

Ka mekhoa ea epitaxial e kenyelletsang likhase tse senyang (NH₃, HCl, Cl₂), seaparo sa SiC se sireletsa karoloana ea graphite ho tloha khoholehong le ho thibela tlhahiso ea likaroloana. Sekhahla sa SiC se nang le bohloeki bo phahameng se tiisa tikoloho e hloekileng ea ho hōla, ho fokotsa mefokolo ea kristale le likotsi tsa tšilafalo.

4. Taolo ea Ts'ebetso & Melemo ea Optical

Thepa ea optical ea "SiC coating" e lumella ho lekanya mocheso o nepahetseng oa infrared-based le tokiso ea emissivity, ho kenya letsoho ho beheng ts'ebetso e ntle le kholo ea epitaxial e ts'oanang.

Mathata a Theknoloji le Lintlafatso

Leha ho na le melemo ea eona, SiC ea rona e koahetsoeng ke li-epitaxial susceptors e tobane le mathata a itseng a boenjiniere:

1. Coating Uniformity - Ho roala ha SiC e sa tshwaneng ho ka lebisa ho hotspots kapa ho futhumala ho sa lekanang.

● Ntlafatso: Sebelisa mekhoa e tsoetseng pele ea ho roala CVD-SiC e nang le litekanyo tse ntlafalitsoeng tsa deposition ho finyella liphahlo tse phahameng le tse lekanang.

2. Moloko oa Karolo - Li-micro-cracks kapa mefokolo ka har'a koae li ka lokolla likaroloana ka kamoreng ea ts'ebetso.

● Ntlafatso: Kenya ts'ebetsong maqheka a ho roala ka mekhahlelo e mengata le tlhahlobo ea kamehla ea holim'a metsi ho fokotsa likotsi.

3. Bophelong bohle tlas'a maemo a thata - Ho pepesehela mocheso o phahameng (> 1600 ° C) le likhase tse senyang li khutsufatsa nako ea bophelo ea motho ea sebelisang matla.

● Ntlafatso: Sebelisa lisebelisoa tsa ho roala tsa moloko o latelang kapa maano a doping a SiC ho matlafatsa nako e telele le ho atolosa potoloho ea ts'ebetso.

4. Thermal Stress Management - Litefiso tse fapaneng tsa katoloso lipakeng tsa graphite substrate le ho roala SiC li ka baka khatello ea maikutlo.

● Ntlafatso: Ntlafatsa machining a substrate le botenya ba ho roala ho leka-lekanya katoloso ea mocheso le ho thibela delamination.

Semixlab SiC Coated Epitaxial Susceptor ha se sets'oants'o sa wafer feela - ke sesebelisoa sa mantlha sa kholo ea boleng bo holimo ea epitaxial indastering ea semiconductor. Ka ho sebetsana le mathata a ho kopanya ho kopanya, khatello ea mocheso, le taolo ea likaroloana, Semixlab e fana ka tharollo e tšepahalang, ea nako e telele e finyellang litlhoko tse thata tsa tlhahiso ea semiconductor ea moloko o latelang. Semixlab e labalabela ho ba molekane oa hau oa nako e telele Chaena.